Brochure
29
Internal Circuits
DC (+)
12 to 24
VDC
+
–
(Brown)
Auto-shift input
(Grey)
(Black)
(White)
(Blue)
OUT1
OUT2
DC (–)
DC (+)
12 to 24
VDC
+
–
(Brown)
(Grey)
(Black)
(White)
(Blue)
OUT1
OUT2
DC (–)
Auto-shift input
DC (+)
12 to 24
VDC
+
–
(Brown)
Analogue output
(Grey)
(Black)
(White)
(Blue)
OUT1
OUT2
DC (–)
DC (+)
(Brown)
Analogue output
(Grey)
(Black)
(White)
(Blue)
OUT1
OUT2
DC (–)
12 to 24
VDC
+
–
PFM30
NPN open collector output: 2 outputs
Max. 30 V, 80 mA, residual voltage 1 V or less
Analogue output: 1 to 5 V
Output impedance: approx. 1 kΩ
PFM33
PNP open collector output: 2 outputs
Max. 80 mA, residual voltage 1 V or less
Analogue output: 1 to 5 V
Output impedance: approx. 1 kΩ
PFM31
NPN open collector output: 2 outputs
Max. 30 V, 80 mA, residual voltage 1 V or less
Analogue output: 4 to 20 mA
Max. load impedance: 300 Ω (12 VDC) 600 Ω (24 VDC)
Min. load impedance: 50 Ω
PFM34
PNP open collector output: 2 outputs
Max. 80 mA, residual voltage 1 V or less
Analogue output: 4 to 20 mA
Max. load impedance: 300 Ω (12 VDC) 600 Ω (24 VDC)
Min. load impedance: 50 Ω
PFM32
NPN open collector output with external input: 2 outputs
Max. 30 V, 80 mA, residual voltage 1 V or less
PFM35
PNP open collector output with external input: 2 outputs
Max. 80 mA, residual voltage 1 V or less
DC (+)
12 to 24
VDC
+
–
(Brown)
Analogue output
(Grey)
(Black)
(White)
(Blue)
OUT1
OUT2
DC (–)
DC (+)
(Brown)
Analogue output
(Grey)
(Black)
(White)
(Blue)
OUT1
OUT2
DC (–)
12 to 24
VDC
+
–
Accumulated pulse output wiring example
PFM30
PFM31
PFM32
Black OUT1
White OUT2
Blue DC (–)
Max. 30 V, 80 mA
50 msec
0 V
50 msec
or
50 msec
0 V
50 msec
or
Max. 80 mA
Brown DC (+)
Black OUT1
White OUT2
PFM33
PFM3
4
PFM3
5
Load
Load
Load
Load
Load
Load
Load
Load
Load
Load
Load
Load
Load
Load
Load
Load
Load
Load
Load
Load
Main circuit
Main circuit
Main circuit
Main circuit
Main circuit
Main circuit
Flow Sensor Monitor
Series PFM3
Analogue Output
Note: Analogue output at maximum rated flow rate when CO2 is selected is 3 [V] for the voltage output type and 12 [mA] for the current output type.
1
0
Max. rated flow value Max. rated flow value
5
1 to 5 VDC
0
4
0
20
4 to 20 mADC
0
0.2 to 10 l/min
0.5 to 25
l/min
1 to 50
l/min
2 to 100
l/min
Rated flow range
Max. rated flow value
[l/min]
10 (5)
25 (12.5)
50 (25)
100 (50)
Note 1) Select the sensor to connect in the initial setting. If CO
2
is selected as the operating fluid, the value is 1/2 on the maximum side.
Note 2) When 10 l/min with a minimum unit setting of 0.01 l/min is selected for the connected sensor, the upper limit of the display range is 10.50 l/min.
When 100 l/min with a minimum unit setting of 0.1 l/min is selected for the connected sensor, the upper limit of the display range is 105.0 l/min.
The setting at the time of shipment is 10 l/min with a minimum unit setting of 0.01 l/min for the connected sensor.
Note 3) When equipped with a unit switching function. (The SI unit (l/min or l) is fixed for types with no unit switching function.)
Note 4) The accumulated flow value is cleared to 0 when power is turned off. It is possible to select function that holds the accumulated flow value so it is not cleared. (The accumulated flow
value can be held at 2- or 5-minute intervals.) The service life of the memory element (electronic component) is limited to 1
million overwrite cycles (assuming 24-hour operation, 5
minutes x 1 million cycles = 5 million minutes = 9.5 years) when 5-minute intervals are selected. Therefore, when using the holding function, calculate the service life based on the usage
conditions, and use the switch within the service life. Applies to models equipped with a unit switching function. (The SI unit
(l/min or l) is fixed for types with no unit switching function.)
Note 5) Set to hystresis mode at the time of shipment from the factory. Can be changed to window comparator mode using push-buttons.
Note 6) Accumulated external reset function at the time of shipment from the factory. Auto-shift or auto-shift zero function can be selected using push-buttons.
Model
PFM3
Hysteresis
Note 5)
Switch output
Analogue output
Display accuracy
Display method
Status LED’s
External input
Note 6)
Enclosure
Operating temperature range
Operating humidity range
Withstand voltage
Insulation resistance
Vibration resistance
Impact resistance
Temperature characteristics
Connection
Material
Weight
Accumulated pulse output
Response time
Repeatability
Real-time flow rate
l/min, CFM x 10
-2
Accumulated flow l, ft
3
x 10
-1
1999999 l
24 VDC (ripple
± 10% or less) (With polarity protection)
50 mA or less
Hysteresis mode: Variable, Window comparator mode: Variable
NPN or PNP open collector output (Same as switch output)
1 s (50 ms, 0.5 s, 2 s can be selected.)
±0.1%F.S. or less, Analogue output accuracy: ±0.3%F.S. or less
±0.5%F.S. ± 1 digit or less
3+1/2-digit, 7-segment LED 2-color display (Red/Green) Sampling cycle: 10 times/sec
OUT1: Illuminates when output is turned ON (Green). OUT2: Illuminates when output is turned ON (Red).
No-voltage input (Reed or Solid state), LOW level input 30 msec or more, LOW level 0.4 V or less
IP40
Operating: 0 to 50
°C Stored: –10 to 60°C (with no freezing and condensation)
Operating, Stored: 35 to 85%R.H. (with no condensation)
1000 VAC for 1 min. between whole charging part and live part
50 MΩ or more (500 VDC Mega) between whole charging part and live part
10 to 500 Hz with a 1.5 mm amplitude or 98 m/s
2
acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller. (de-energised)
100 m/s
2
in X, Y, Z directions 3 times each(de-energised)
±0.5%F.S. or less (based on 25°C)
Power supply / Output connection: 5P connector, Sensor connection: 4P connector
Front case, Rear case: PBT
30 g (Without cable) 85 g (With cable)
PFM30: Voltage input 1 to 5 VDC (input impedance: 1 MΩ)
PFM31: Current input 4 to 20 mADC (input impedance: 250 Ω)
NPN or PNP open collector output: 2 outputs
Maximum load current: 80 mA, max. load voltage 30 VDC (at NPN output),
Residual voltage 1 V or less (at load current 80 mA), With short-circuit protection
Voltage output: 1 to 5 VDC (0
l/min to max. rated flow rate value)
Output impedance: Approx. 1
kΩ, Accuracy: ±1%F.S. or less (relative to display value)
Current output: 4 to 20 mADC (0
l/min to max. rated flow rate value)
Max. load impedance: 600 Ω (at 24 VDC), Min. load impedance: 50 Ω
Accuracy: ±1%F.S. or less (relative to display value)
0.01 l/min
0.1 l/pulse
0.1
l/min
0.1
l/pulse
0.1
l/min
0.1
l/pulse
0.1
l/min
1
l/pulse
Minimum unit setting
Note 2)
Accumulated pulse flow rate exchange value
Indication unit
Note 3)
Accumulated flow range
Note 4)
Power supply voltage
Current consumption
Sensor input
Number of inputs: 1
∗ ( ): Fluid: CO
2
Rated flow range
(Flow rate range)
Dry air, N
2
, Ar
CO
2
Displayed flow range
Set flow range
Note 1)
Dry air, N
2
, Ar
CO2
Dry air, N
2
, Ar
CO
2
0.2 to 10 l/min
0.2 to 5 l/min
0.2 to 10.5 l/min
0.2 to 5.2 l/min
0 to 10.5 l/min
0 to 5.2 l/min
0.5 to 25 l/min
0.5 to 12.5 l/min
0.5 to 26.3
l/min
0.5 to 13.1
l/min
0 to 26.3
l/min
0 to 13.1
l/min
1 to 50 l/min
1 to 25 l/min
1 to 52.5
l/min
1 to 26.2
l/min
0 to 52.5
l/min
0 to 26.2
l/min
2 to 100 l/min
2 to 50 l/min
2 to 105
l/min
2 to 52
l/min
0 to 105
l/min
0 to 52
l/min
Specifications
Analog output [V]
Analog output [mA]
Note 1)
Series PFM3