Brochure

3
Piping Specifications / Weight
Analogue Output Note: Analogue output at maximum rated flow rate when CO2 is selected is 3 [V] for the voltage output type and 12 [mA] for the current output type.
Part no.
01
Port size
Weight
Wetted parts material
Straight Without orifice: 125
g
Bottom Without orifice: 135
g
Straight With orifice: 165
g
Bottom With orifice: 175 g
Straight Without orifice: 55
g
Bottom Without orifice: 65
g
Straight With orifice: 95
g
Bottom With orifice: 105 g
Straight Without orifice: 95 g
Bottom Without orifice: 105 g
Straight With orifice: 135 g
Bottom With orifice: 145 g
LCP, PBT, Brass (Electroless nickel plated), HNBR (+ Fluoro coated), FKM (+ Fluoro coated), Silicon, Au, Stainless steel 304
Rc
1/8
02
Rc
1/4
N01
NPT
1/8
N02
NPT
1/4
F01
G1/8 G1/4
C4F02
ø4
(5/32")
one-touch
fitting
C6
ø6
one-touch
fitting
C6
ø8
(5/16")
one-touch
fitting
N7
1/4
one-touch
fitting
10
25
50
100
PFM710--C/E
PFM725--C/E
PFM750--C/E
PFM711--C/E
Analogue Voltage Output (1 to 5 V)
Model
Max. rated
flow value
[l/min]
10 (5)
25 (12.5)
50 (25)
100 (50)
PFM710--D/F
PFM725-
-D/F
PFM750-
-D/F
PFM711-
-D/F
Analogue Current Output (4 to 20 mA)
Model
Max. rated
flow value
[l/min]
Max. rated
flow value
0
4
20
Analog output [V]
Analog output [mA]
Max. rated
flow value
0
0 0
1
5
2 NPN outputs type
PFM7--A-
NPN + Analogue output type
PFM7--C-/PFM7--D-
NPN + External input type
PFM7--G-
2 PNP outputs type
PFM7--B-
PNP + Analogue output type
PFM7--E-/PFM7--F-
PNP + External input type
PFM7--H-
Max. 80 mA
Brown DC (+)
Black OUT1
White OUT2 (PFM7--B- only)
Load
Load
50 msec
0 V
50 msec
or
50 msec
0 V
50 msec
or
Accumulated pulse output wiring examples
Black OUT1
White OUT2 (PFM-7--A- only)
Blue DC (–)
Load
Load
Max. 28 V, 80 mA
Max. 28 V, 80 mA
Internal voltage drop 1 V or less
Brown DC (+)
Black OUT1
White OUT2
Blue DC (–)
24 VDC
Load
Load
Max. 80 mA
Internal voltage drop 1.5 V or less
24 VDC
Brown DC (+)
Black OUT1
White OUT2
Blue DC (–)
Load
Load
Max. 28 V, 80 mA
Internal voltage drop
1 V or less
External input: No-voltage input
Reed switch or solid
state switch input
30 msec or more
Brown DC (+)
Black OUT1
White
External input
Blue DC (–)
24 VDC
Load
Max. 28V, 80 mA
Internal voltage drop
1 V or less
C: Analogue output 1 to 5 V
Output impedance 1
k
D: Analogue output 4 to 20 mA
Load impedance 50 to 600
Brown DC (+)
Black OUT1
Blue DC (–)
24 VDC
White
Analogue output
Load
Load
Max. 80 mA
Internal voltage drop
1.5 V or less
E: Analogue output 1 to 5 V
Output impedance 1 k
F: Analogue output 4 to 20 mA
Load impedance 50 to 600
24 VDC
Brown DC (+)
Black OUT1
White
Analogue output
Blue DC (–)
Load
Load
Max. 80 mA
Internal voltage drop
1.5 V or less
External input: No-voltage input
Reed switch or solid
state switch input
30 msec or more
Brown DC (+)
Black OUT1
White
External input
Blue DC (–)
24 VDC
Load
2 NPN outputs type
PFM7--A-
2 PNP outputs type
PFM7--B-
NPN + External input type
PFM7--G-
NPN + Analogue output type
PFM7--C-
NPN + Analogue output type
PFM7--D-
PNP + Analogue output type
PFM7--E-
PNP + Analogue output type
PFM7--F-
PNP + External input type
PFM7--H-
Internal Circuits and Wiring Examples
( ): Fluid: CO
2
Main circuit
Main circuit
Main circuit
Main circuit
Main circuit
Main circuit
2-Colour Display Digital Flow Switch
Series PFM7
Specifications
Note 1) When the minimum unit setting 0.01 l/min is selected for 10 l/min type, the indication upper limit will be [9.99 l/min].
When the minimum unit setting 0.1 l/min is selected for 100 l/min type, the indication upper limit will be [99.9 l/min].
Note 2) User can select between 0.01 l/min and 0.1 l/min for the PFM710, and between 0.1 l/min and 1 l/min for the PFM711 respectively.
If the indication unit is selected to “CFM”, the minimum unit setting cannot be changed.
At the time of shipment from the factory, the minimum unit setting is set to 0.1
l/min for the PFM710 and 1 l/min for the PFM711 respectively.
Note 3) Set to “ANR” at the time of shipment from the factory.
“ANR” is used for standard conditions: 20
°C, 1 atm and 65%R.H.
“Nl/min” is used for normal conditions: 0°C and 1 atm.
When equipped with a unit switching function. (The SI unit
(l/min or l) is fixed for types with no unit switching function.)
Note 4) Cleared when the power supply is turned off. Hold function can be selected. (Interval of 2 min or 5 min can be selected).
If the 5 min interval is selected, the life of the memory element (electronic part) is limited to 1 million cycles. (If energised for 24 hours, life is calculated as 5 min x 1 million
= 5 million min = 9.5 years). Therefore, if using the hold function, calculate the memory life for your operating conditions,
and use within this life.
Note 5) Set to 1.5 s (90%), can be changed to 100 ms.
Note 6) Set to hystresis mode at the time of shipment from the factory. Can be changed to window comparator mode using push-buttons.
Model
PFM710 PFM725 PFM750 PFM711
Applicable fluid
Pressure characteristics
Repeatability
Operating pressure range
Rated pressure range
Proof pressure
Accumulated flow range
Switch output
Accumulated pulse output
External input
Display method
Status LED’s
Power supply voltage
Current consumption
Environ-
mental
resistance
Indication unit
Note 3)
Minimum unit setting
Note 2)
Accumulated pulse flow rate exchange value
Rated flow range
(Flow rate range)
Dry air, N2, Ar
CO2
Maximum load current
Maximum applied voltage
Internal voltage drop
Response time
Output protection
Enclosure
Operating fluid temperature
Operating temperature range
Operating humidity range
Withstand voltage
Insulation resistance
Hysteresis mode
Window comparator mode
Response time
Displayed flow
Note 1)
Set flow
Note 1)
Dry air, N2, Ar
CO
2
Dry air, N2, Ar
CO
2
Dry air, N2, Ar, CO2
(Air quality grade is ISO8573.1-1, 1.2 to 1.6.2.)
0.2 to 10 l/min
0.2 to 5 l/min
0.2 to 10.5 l/min
0.2 to 5.2 l/min
0 to 10.5 l/min
0 to 5.2 l/min
0.5 to 25
l/min
0.5 to 12.5
l/min
0.5 to 26.3
l/min
0.5 to 13.1
l/min
0 to 26.3
l/min
0 to 13.1
l/min
±1%F.S. or less (Fluid: Dry air)
Analogue output accuracy: ±3%F.S. or less
±5%F.S. or less (based on 0.35 MPa)
–100 kPa to 750 kPa
–70 kPa to 750 kPa
1 MPa
Max. 999999
l
Note 4)
NPN or PNP open collector output
80 mA
28 VDC (at NPN output)
NPN output: 1 V or less (at 80 mA) PNP output: 1.5 V or less (at 80 mA)
1 s (50 ms, 0.5 s, 2 s can be selected.)
Short-circuit protection, Overcurrent protection
NPN or PNP open collector output (Same as switch output)
1.5 s or less (90% response)
Variable
Variable
No-voltage input (Reed or Solid state) Input 30 ms or more
3-digit, 7-segment LED 2-colour display (Red/Green) Renewed cycle: 10 times/sec
OUT1: Illuminates when output is turned ON (Green). OUT2: Illuminates when output is turned ON (Red).
24 VDC
± 10%
55 mA or less
IP40
0 to 50
°C (with no freezing and condensation)
Operating: 0 to 50
°C Stored: –10 to 60°C (with no freezing and condensation)
Operating, Stored: 35 to 85%R.H. (with no condensation)
1000 VAC for 1 min. between external terminal and case
50
M or more (500 VDC Mega) between external terminal and case
490 m/s
2
in X, Y, Z directions 3 times each
Real-time flow rate
l/min, CFM x 10
-2
Accumulated flow l, ft
3
x 10
-1
±2%F.S. (15 to 35°C)
±5%F.S. (0 to 50°C)
Voltage output: 1 to 5
V
Output impedance: 1
k
Current output: 4 to 20 mA
Max. load impedance: 600
, Min. load impedance: 50
Without orifice: 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s
2
acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.
With orifice: 10 to 150 Hz with a 1.5 mm amplitude or 19.6 m/s
2
acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.
Linearity
Temperature characteristics
Analogue output
Note 5)
Hysteresis
Note 6)
Display accuracy: ±3%F.S. or less (Fluid: Dry air)
Analogue output accuracy: ±5%F.S. or less
1 to 50
l/min
1 to 25
l/min
1 to 52.5
l/min
1 to 26.2
l/min
0 to 52.5
l/min
0 to 26.2
l/min
2 to 100
l/min
2 to 50
l/min
2 to 105
l/min
2 to 52
l/min
0 to 105
l/min
0 to 52
l/min
Voltage output
Current output
Vibration resistance
Impact resistance
0.01 l/min
0.1 l/pulse
0.1
l/min
0.1
l/pulse
0.1
l/min
0.1
l/pulse
0.1
l/min
1
l/pulse
Series PFM7