Datasheet

44
Particle characteristics (reference)
50
0
0 10203040506070
2 or 3 particles/cc
Duration of flow [min]
Remote type sensor unit
Common environment
Clean room class 1000
Drying
Processing chart for Series PF2D
Shipment
Supersonic cleaning
Double-packing
Assembly
Swept flow characteristics (reference)
1
10
100
1000
0 5 10 15 20 25 30
Duration of flow [min]
Ratio of resistance [kΩ
·
m]
Tube
Sensor
Body
Fill the flow path with sulfuric
acid and leave it for 30
minutes.
After disposing the sulfuric
acid, flush the flow path out
with deionized water and
measure the resistance rate
of the fluid that is discharged
from the downstream side.
A quick recovery time
indicates little liquid pool.
Vibration reducing seals
Malfunctions (output errors) that
would otherwise be caused by
vibration are prevented.
Particle ratio [number/cc]
Dust generation of 3 particles/cc or less
(average number)
Karman vortex eliminates moving parts
and allows low dust generation.
Swept flow characteristics
Tapered side seal minimizes dead volume
to reduce accumulation of liquid pool.
The data was obtained by performing an actual 10 minutes’ supersonic
cleaning using an average 16 MΩ·cm of deionized water at class 10000 clean
room (1
l/min flow rate).
The diameter of the measured particles ranges from 0.1 to 0.5 µm. The flow
rate used during measuring is 100 cc/min.
Series PF2D
Digital Flow Switch for
Deionized Water and Chemicals
4-channel Flow Monitor
Series PF2D200
A single controller can monitor the
flow rate of 4 different sensors.
Body and Sensor
Body and Sensor
New PFA
Tube
Tube
Super PFA
Three types of flow range
0.4 to 4 l /min (PF2D504)
1.8 to 20
l /min (PF2D520)
4.0 to 40
l /min (PF2D540)