Datasheet

Features 2
MULTI COUNTER
:
CEU5
A
COM
COM COM
B
DC12V
GND F.G.
R.S.
HOLD
BANK1 BANK2
COM S.STOP OUT1OUT2OUT3
OUT4
OUT5 AC100~240V
COUNT
PRESET
FUNC.
SD SGRD RS-232C
UP
LEFT
RIGHT
DOWN
SEL.
SET
MODE
M/C
M/C
M/C
 The accumulated pulse output
function enables remote monitoring
of accumulated flow.
Main line flow control
Flow control for each branch line
Pulse counter
1 to 10
5 to 50
10 to 100
20 to 200
50 to 500
150 to 3000
300 to 6000
600 to 12000
PF2A710
PF2A750
PF2A711
PF2A721
PF2A751
PF2A703H
PF2A706H
PF2A712H
Flow rate measurement
range
l/min
Integrated type
Display unit
PF2W30

PF2W33

Sensor unit
PF2W504
(
T
)
PF2W520
(
T
)
PF2W540
(
T
)
PF2W511
Display unit (4ch)
PF2W20

0.5 to 4
2 to 16
5 to 40
10 to 100
PF2W704
(
T
)
PF2W720
(
T
)
PF2W740
(
T
)
PF2W711
Flow rate measurement
range
l/min
Display unit
PF2D30

Sensor unit
PF2D504
PF2D520
PF2D540
Display unit (4ch)
PF2D20

0.4 to 4
1.8 to 20
4.0 to 40
For WaterFor Water
For Deionized Water and ChemicalsFor Deionized Water and Chemicals
For AirFor Air
Display unit
PF2A30

PF2A31

—
Flow rate measurement
range
l/min
Integrated type
Remote type
Remote type
Remote type
Sensor unit
PF2A510
PF2A550
PF2A511
PF2A521
PF2A551
—
Display unit (4ch)
PF2A20

—
P. 44
P. 15
P. 1
(Refer to page 36.)
Clean gas filter
Set the clean gas
filter on the outlet side
piping of the flow switch.
Flow control of N 2 gas to prevent
detection
camera
shimmering
and lead
frame
oxidation
Flow control of cooling water for
wafer temperature regulation and
high fre-
quency
power
supply
Flow
control of
pressurized
cooling
water for
welding
gun
Makes it possible to monitor the
air flow from the main line to each
branch line.
Application ExamplesApplication Examples