Datasheet
452
11
■
1 · 10
–6
Pa
1 · 10
–10
Pa
2 · 10
–13
Pa
0.4–0.7 MPa (0.4–0.7 bar)
XLA-16G-M9// NW16 KF
XLA-25G-M9// NW25 KF
XLA-40G-M9// NW40 KF
XLA-50G-M9// NW50 KF
XLA-63DG-M9// DN63 ISO K
XLA-80DG-M9// DN80 ISO K
XLF-16G-M9// NW16 KF
XLF-25G-M9// NW25 KF
XLF-40G-M9// NW40 KF
XLF-50G-M9// NW50 KF
XLF-63DG-M9// DN63 ISO K
XLF-80DG-M9// DN80 ISO K
XLF-100DG-M9// DN100 ISO K
XLF-160DG-M9// DN160 ISO K
XLH-16 NW16 KF
XLH-25 NW25 KF
XLH-40 NW40 KF
XLH-50 NW50 KF
OTHERS
Subject to change
= DELIVERY EX-STOCK FOR MORE INFO, ASK THE SMC EXPERTS: PHONE +31 (0) 20 531 88 88 / INFO@SMCPNEUMATICS.NL
XL – aluminium high vacuum valve
Medium Gas, air
Materials
Body: aluminum;
bellows: stainless steel SS316L; seals: FKM
Operating temperature 5 to 60 °C
Working pressure
Internal leakage
Leakage inside–out
Pilot pressure
For normally open, double acting or soft opening valves, heaters, and alternative sealing materials,
please contact SMC.
■ Minimal outgassing in vacuum ■ Minimum amount of pollution
from heavy metals ■ Highly resistant to uorides
Pneumatic angle valve – normally closed, with bellows
Part number Size
Pneumatic angle valve – normally closed, with O-ring
Part number Size
Manual angle valve – with bellows
Part number Size
XL-valves are interchangeable with XM in stainless steel.
= DELIVERY EX-STOCK FOR MORE INFO, ASK THE SMC EXPERTS: PHONE +32 (0) 3 355 1464 / INFO@SMCPNEUMATICS.BE