Datasheet

Humidity sensor
Version : 0.1
File: SMTHSver
DRAFT VERSION
- 1 -
SMARTEC BV, Delpratsingel 26 WWW.SMARTEC.NL
4811 AP BREDA, The Netherlands Tel: +31 (0)76 5205353
SMARTEC CAPACITIVE HUMIDITY SENSOR.
The capacitive humidity sensor of Smartec is based on silicon technology on glass wafer.
Due to the use of this process it is possible to make sensors on a high volume scale on a low
cost way.
The Smartec humidity sensor consists of three layers. The base and top layer are conductive
and the layer in between is humidity sensitive polyimide. The selection of this sensitive
interface makes the sensor highly independent to temperature effects. The top layer has grid
like structure. The sensor converts the humidity into a capacitance. Due to the construction
the response to humidity is very fast (<15 sec) and the hysteresis very low (<2% RH)
Typical applications:
Hygrometers, consumer goods
Humidifiers and Dehumidifiers
Medical applications
Weather stations
Automotive
HVAC
Food processing
Room comfort control
Product Highlights.
The Smartec capacitive humidity sensor measures from 0 to 100 % RH. In many
applications condensation on the sensor may occur. This has no effect on the
performance of the sensor but the response time while drying will be large.
The linearity of the Smartec is within a band of 2 % in the range between 20 and 95
% RH.
The response time is relatively fast so in case where this is needed the Smartec
humidity sensors can be applied (response time < 15 s.)
Specifications:
Measured @ 25 °C, Sensor excitation: 1V@ 20 kHz
HS07 HS08A
Parameter Condition Min Typ Max Min Typ Max Unit
Capacitance 55% RH 310 330 350 170 180 190 pF
Sensitivity 20 - 95 % RH 0,6 0,34 pF/%RH
Hysteresis 20 -095 % RH 2 2 % RH
Linearity 20 - 95 % RH ±2 ±2 %RH
Response time 30 - 90 % RH 15 15 sec
Temp coeeficient 5 - 70 °C 0,15 0,16 0,17 0,07 pF/°C
Long term stability 0,2 0,5 %RH/year
Temperature range -40 120 -40 120 °C
Operating humidity range 0 100 0 100 % RH
Frequency range 1 100 1 100 kHz

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