Specifications

Copper Backing Plate
MAK Backing Plate w/ keeper
Backing Plates
Ceramics, oxides, and any other non-
machinable targets are commonly
bonded to a copper backing plate for
all sputtering sources.
MAK Backing Plates
The MAK sputter source uses the
same backing plate, but with a
magnetic keeper attached. The
keeper holds the target in place
without a mechanical clamp.
TARGET MOUNTING OF THE MAK
NON-MACHINABLE MATERIALS
1 OF 2
Cu plate
with drill
and tapped
hole
Keeper with
screw