Specifications

Anode
• Height adjustable to target thickness -
Selectively positioning anode to same
plane of target--- minimizing material
build-up
Small Profile
• Mounts on CF, ISO or installs thru a Quick
Disconnect
• As example, standard 3” MAK fits thru
opening of 6” CF (DN100)
• Standard HN power connector permits
RF/DC operation
One Vacuum Seal
• Elastomer (HV) or Metal (UHV) field
interchangeable
• No water to Vacuum Seal
No Mechanical Target Clamp
• Target surface is not in contact with
dissimilar clamping material---
minimizing stress during sputtering
and cool down (especially for
ceramics and oxides)
VACUUM SEAL
HN CONNECTOR
WATER LINES
• Teflon water lines with quick disconnects
PICTURE SHOWN
IS NOT TO SCALE
BENEFITS
OF
THE MAK
Physical Parameters
SIMPLICITY IN SPUTTERING
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