Specifications

Magnetics
No Magnetic Housing
• Provides higher magnetic density at
target surface
THUS…..
– Sputters at lower voltage for
comparable power levels
– Standard MAK sputters
magnetic material
Balanced / Unbalanced
• Magnet array is
INTERCHANGEABLE from
balanced or unbalanced.
Disassembly of source NOT
REQUIRED!
BENEFITS OF THE MAK
Cathode Ring Magnet
Center Magnet
Adjustable Anode
Set Screws
SIMPLICITY IN SPUTTERING
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