Specifications

SIMPLICITY IN SPUTTERING
• MAGNETS - NO magnet erosion
Cooling Block (Copper)
• Water channel 75% of volume,
THUS…..
• High water flow - maximizing cooling
efficiency of copper surface area
Cathode (Copper)
•Only
small volume above AlN has electrical
potential applied,
THUS…..
• minimizing heated area - facilitating
cooling
• all components except small cathode
area, are at ground or neutral potential
Cathode
Cooling Block
Magnet
Return
AlN
Water Line
Power
Feedthru
Water Line
Passage for
Insulated Power
Post
Cooling
Channel
AlN - Alumina Nitride
• Thermal Conductor
• Electrical Insulator
Excellent:
Water Isolated
from:
BENEFITS OF THE MAK
1 OF 3
• POWER - (ALL electrical components)
– no power changes due to water
resistance
– simplifies RF Tuning
• NO
special treatment of water needed
CATHODE BLOCK - without magnets