Specifications

Appendix A
MAK TECHNICAL SPECIFICATIONS
COOLING
MAK 1.3"
(33mm)
MAK 2"
(50.8mm)
MAK 3"
(76.2mm)
MAK 4"
(101.6mm)
MAK 6"
(152.4mm)
Water Flow at
30psi min. at
lowest power level
l/min
gal/min
3.48
0.90
3.48
0.90
3.48
0.90
3.48
0.90
7.00
1.840
Nominal Water
Flow at 60psi for
max. power
l/min
gal/min
6.20
1.60
6.20
1.60
6.20
1.60
6.20
1.60
12.40
3.20
Water Pressure
Range
Bar
psi
2.1-5.6
30-80
2.1-5.6
30-80
2.1-5.6
30-80
2.1-5.6
30-80
2.1-5.6
30-80
Water Lines Size
1/4" OD
3/16" ID
1/4" OD
3/16" ID
1/4" OD
3/16" ID
1/4" OD
3/16" ID
3/8" OD
1/4" ID
MECHANICAL
Max OD
mm
inch
59.70
2.350
59.70
2.350
85.80
3.378
104.80
4.125
170.80
6.725
Smallest Mounting
Flange
CF
ISO
4-1/2"[DN63]
NW 63
4-1/2"[DN 63]
NW 63
6"[DN 100]
NW 100
6-3/4”[DN125]
NW 160
10"[DN200]
NW 200
Shaft Diameter
mm
inch
19.05
0.75
19.05
0.75
19.05
0.75
19.05
0.75
31.75
1.25
Anode Adjustable
To Target Thick-
ness
NO YES YES YES YES
Weight
lbs.
kgms.
1.75
3.85
2.0
4.4
4.0
8.8
5.5
12.1
13.0
28.6
PERFORMANCE
Rate For Cu @ 5
mtorr Ar. Target
To Substrate =
Diameter Of MAK
2
Angstrom /
Sec
35@200W 100@500W 165@1.5KW 160@2.5KW 145@5KW
UNIFORMITY
Substrate Dia. =
Source Dia.
Target to Sub-
strate = Dia. of
Source
2
+ % 5% 6% 8% 8% 7%
(1) Maximum magnetic target thickness is material dependent.
(2) Means 2” MAK @ 2” target to substrate 4” MAK @ 4”
22