Specifications

Non-Machinable Materials
Ceramic and oxide materials, a copper backing plate containing a magnetic keeper should be
used. The target must be bonded to this backing plate and this bond must be able to withstand a
temperature of 220
o
C.
TARGET MOUNTING OF THE MAK
NON-MACHINABLE MATERIALS
Cu plate with
drilled and tapped
hole
Backing Plates
Ceramics, oxides, and any other non- ma-
chinable targets are commonly bonded to a
copper backing plate for all sputtering
sources.
MAK Backing Plates
The MAK sputter source uses the same
backing plate, but with a magnetic keepe
r
attached. The keeper holds the target in
place without a mechanical clamp.
Keeper with
screw
Bonded Target - Example
This is an example of a SiO
2
target
bonded to a copper backing plate with a
magnetic keeper attached.
target keeper
bond
copper backing
plate
16