Specifications

POWER HOOK-UP

All MAK sputter sources may be operated in either the DC or RF mode. All models are supplied

with an HN (Amphenol UG-496/U) for convenient electrical connection to your choice of power

source. The following US Sputtering Power Supplies come complete with output cables having the

HN mating connector.

P/N SU-500 DC

500 Watt DC Power Supply

P/N SU-1500 DC

1500 Watt DC Power Supply

P/N SU-5000 DC

5000 Watt DC Power Supply

P/N: SU-R301

300 Watt RF Generator and Automatic Tuning Network

P/N: SU-R601

600 Watt RF Generator and Automatic Tuning Network

P/N: SU-R1001

1000 Watt RF Generator and Automatic Tuning Network

DC Connection

The power supply is provided with twelve feet of RG 8/U high voltage cable. Connect the PL 259

connector to the power supply and the HN connector to the sputter source.

RF Connection

The RF Generator / Automatic Tuning Network is provided with all necessary cables for hook-up.

 12’ co-axial cable for connection of the power supply to tuning network

 3’ co-axial cable for connection of tuning network to sputter source (HN Connector)

 24’ interface cable between network controller and tuning network

 Four-foot control cable between control panel and RF supply

End Adapter

HN Connector

(Male)

HN Connector

(Female)

Water lines

Cable to RF or DC

Power Supply

Issued September 11, 2008