Specifications

7. Slide the End Adapter on the tube, making sure that the slip pin in the connector body is in-

serted in the socket of the power feed rod. Push on as far as it will go and tighten the screws.

8. The system may now be pumped down.

9. Hook up the water lines. Connect the house supply and drain lines to the source tubes. See

technical specifications for minimum flow requirements.

10. Connect the power cable.

B. DIRECT FLANGE MOUNTING VIA CF, ISO, ANSI, JIS and other flanges

1. MAK Source has been attached to the mounting flange. To adjust source to substrate distance

--- either the substrate must be moved or a feedthrough nipple must be placed between the

mounting flange and the vacuum system.

2. Attach the MAK mounting flange to the system.

3. Refer to step (7) above.

3” MAK Welded onto

Conflat Flange

PN: L300A01-CF

Issued September 11, 2008