Specifications

INSTALLATION OF SOURCES
STANDARD MOUNTING
To mount the source a QUICK COUPLE feedthrough adapter is required. A 0.75” adapter is used
for the 1.3”, 2”, and 3”, and 4” sources. The 6” MAK requires a 1.25” quick coupler adapter.
Water Lines
Power Connector
(HN)
HN Power Pin
End Adapter
Vacuum
Vessel
Atmosphere
Tube Clamp
Quick Coupler
MAK Installed in Vacuum
Chamber
A. PREPARING THE SOURCE FOR MOUNTING VIA A QUICK COUPLER
1. Loosen the screws on the End Adapter holding the electrical connector on the end of the tube.
2. Pull straight out on the electrical connector mounting assembly. The whole assembly will come
off, leaving the water tubes free and the electrical connector assembly unplugged from the
power feed rod.
3. Remove the tube clamp from the tube. This clamp is designed to keep the source in position
when the system is under vacuum.
4. From the inside of the vacuum system, insert the water tubes into the feedthrough hole, and
then insert the tube. Position the tube to the approximate desired source to substrate distance.
5. Slide on the “O” ring, compression ring and coupler nut. Hand tighten the nut.
6. Slide on the clamp tube, position and tighten.
Issued September 11, 2008
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