Operator`s manual

11 Signametrics
[2] Available only with the SMU2064.
2.3 Resistance Measurements
Input Characteristics
 Number of Current Sources seven in SMU2064, five in the SMU2060
 Burden Voltage 240mV or 2.4V max, depending on range.
Range Full Scale Reading Resolution Test current Maximum Test Voltage (at Full Scale)
24  [1] 24.000000  1 
10 mA 240mV
240  240.00000  10 
1 mA 240mV
2.4 k 2.4000000 k 100 
1 mA 2.4V
24 k 24.000000 k 1 m 100 A
2.4V
240 k 240.00000 k 10 m 10 A
2.4V
2.4 M 2.4000000 M 100 m 1 A
2.4V
24 M 24.0000 M 100 
100 nA 2.4V
240 M[1] 240.000 M 1 k
4 nA 1.0V
[1] Ranges are only available in the SMU2064.
2.3.1 2-wire
Accuracy ± (% of reading + ) [1]
Range
24 hours 23C  1C 90 Days 23C  5C One Year 23C  5C
24  0.0038 + 1.4 m [2] 0.005 + 1.6 m [2] 0.008 + 2 m [2]
240  0.0037 + 4.5 m [2] 0.0046 + 5 m [2] 0.007 + 6 m [2]
2.4 k 0.0023 + 28 m 0.004 + 32 m 0.006 + 33 m
24 k 0.0025 + 300 m 0.004 + 330 m 0.006 + 350 m
240 k 0.0055 + 3.2  0.006 + 4  0.007 + 5 
2.4 M 0.018 + 40  0.03 + 50  0.04 + 70 
24 M 0.12 + 400  0.13 + 500  0.2 + 600 
240 M 0.8 + 20 k 1.0 + 30 k 1.3 + 50 k
[1] With Aperture set to  0.5 Sec, and within one hour from Self Calibration (S-Cal).
[2] Use of S-Cal and Relative to improve measurement floor.
2.3.2 4-wire
Accuracy ± (% of reading + ) [1]
Range Maximum Lead
Resistance
24 hours
23C  1C
90 Days
23C  5C
One Year
23C  5C
24  50  0.0038 + 0.7 m [2] 0.005 + 0.8 m [2] 0.008 + 1 m [2]
240  500  0.0037 + 3 m [2] 0.0046 + 4 m [2] 0.007 + 5 m [2]
2.4 k 500  0.0023 + 28 m 0.004 + 32 m 0.006 + 33 m
24 k 5 k 0.0025 + 300 m 0.004 + 330 m 0.006 + 350 m
240 k 50k  0.0055 + 3.2  0.007 + 4  0.007 + 5 
2.4 M 50 k 0.018 + 40  0.03 + 50  0.04 + 70 
24 M 50 k 0.12 + 400  0.13 + 500  0.2 + 600 
[1] With Aperture set to  0.5 Sec, and within one hour from Self Calibration (S-Cal).
[2] Use of Relative to facilitate indicated floor (adder part of spec).
2.3.3 6-wire Guarded Resistance Measurement (SMU2064)
This is an in-circuit forced guard measurement method, as implemented in ICT testers. Add this typical
additional error to the above specification.
Accuracy ± (% of reading + )
Range Max Guard forced current
One Year 23C  5C [1] (adder)
24 
20 mA
0.3 + 4 m
240 
20 mA
0.003 + 20 m
2.4 k
20 mA
0.005 + 100 m
24 k 100 A 0.03 + 1 
240 k 10 A 0.35 + 10 
24 M 1 A 0.85 + 1000 
[1] This table should be used in conjunction with the 2-wire and 4-wire table above.