SQM-160 Rate/Thickness Monitor User’s Guide Version 4.
Safety Information Read this manual before installing, operating, or servicing this equipment. Do not install substitute parts, or perform any unauthorized modification of the product. Return the product to Sigma Instruments…Now part of INFICON for service and repair to ensure that safety features are maintained. Safety Symbols W ARNING: Calls attention to a procedure, practice, or condition that could possibly cause bodily injury or death.
Warranty Information This INFICON product is warranted against defects in material and workmanship for a period of two (2) years from the date of shipment, when used in accordance with the instructions in this manual. During the warranty period, INFICON will, at its option, either repair or replace products that prove to be defective.
Table of Contents Chapter 1 Quick Start Chapter 2 Operation Chapter 3 Options 1.0 1.1 1.2 1.3 1.4 1.5 1.6 Introduction .....................................................................................................1-1 Installation........................................................................................................1-1 Front Panel.......................................................................................................1-2 Rear Panel ................................
Chapter 4 Maintenance 4.0 Introduction ......................................................................................................4-1 4.1 Cleaning...........................................................................................................4-1 Appendix A. B. C. D. E.
Chapter 1 Quick Start 1.0 Introduction Congratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor. The SQM-160 is an easy-to-use instrument for measuring many types of thin-film coatings. This chapter will help to get you up and running quickly. Please review the entire manual for detailed operational, programming, and safety information. 1.1 Installation This section assumes you are familiar with thin-film monitors. Refer to Sections 1.3 and 1.
Chapter 1 Quick Start 1.
Chapter 1 Quick Start 1.3 Rear Panel RS-232 USB/Ethernet 3 Sensor 1 Sensor 2 Rate Out Thick Out Option Card Sensor 4 5 Fuse T2.5A 250V 6 Relay I/O 100-120/200-240V~ 50/60 Hz 20 W Rear Panel Connections Sensor 1 & 2 Connection to quartz crystal sensors. See Section 1.4 for detailed hookup information. Rate and Thick Outputs Provides 0-5V analog outputs for Sensor 1 & 2 rate and thickness readings. For connection to strip chart recorders,etc.
Chapter 1 Quick Start 1.4 System Connections The diagram shows typical vacuum system wiring. The table identifies each component’s function. WARNING: Maintain adequate insulation and physical separation of sensor wiring from hazardous voltages. S ensor 9 3 2 -0 0 0 G ro u n d W ire O p tio n C a rd Sensor R S -2 3 2 In - V a c C a b le 9 0 2 -0 1 4 S o u rc e S h u tte r F e e d th ro u g h 9 3 0 -0 0 0 3 4 S e n s o r 1 S e n s o r 2 R a te O u T t h ic k O u t 5 6 F u s e T 2 .
Chapter 1 Quick Start 1.5 Film Setup This section will help you set up the SQM-160 to measure a film. Refer to Chapter 2 for detailed programming instructions. Note: User actions with front panel controls are indicated by a Box. Results shown on displays are indicated by a Dashed Box . Enter Program Mode Press Program to enter the film setup menu. If the Crystal Life display is shown, first press Xtal Life to return to Rate/Thickness mode then press Program.
Chapter 1 Quick Start 1.6 Depositing a Film If you have followed this Quick Start chapter, you are ready to deposit a film. Follow the procedure below to begin deposition. Verify Sensor Operation Verify that the Crystal Status LED for the measuring sensor(s) is lit, and not blinking. Display Rate/Thickness Display 1 should be displaying Rate on the left and Thickness on the right. If the Crystal Life display mode is active, press the Xtal Life switch to return to Rate/Thickness mode.
Chapter 1 Quick Start 1-7
Chapter 2 Operation 2.0 Introduction This section details the operation of the SQM-160 menus and front panel controls. It is arranged by common user tasks. Note: User actions with front panel controls are indicated by a Box. Results shown on displays are indicated by a Dashed Box . 2.1 Menu Selection Two menus provide control of the SQM-160 programming. The Film Menu allows you to customize each of the stored films. The System Menu sets values that remain constant for all films.
Chapter 2 Operation 2.2 Film Menu The Film Menu programs the SQM-160 for the materials that will be deposited as thin films. Ninety nine films can be stored, but only one film is active at any time. 1. Press Program to enter program mode. 2. Use the Control Knob to scroll to the desired Film # (1-99). 3. Depress the Control Knob or Next to enter the film parameters for the selected film. 4. Use Next and Prev to move through the film parameters, shown in Display 1. 5.
Chapter 2 Operation Film Menu Display Description Range Default Units DENSITY Density of the material being deposited. Consult the Appendix for common material densities. 0.5 – 99.99 1.00 gm/cc TOOLING Overall Tooling Factor for this film. See the Sensor Tooling section of this chapter. 10 – 399 100 % Z-FACTOR Z-Factor of the material being deposited. Consult the Appendix for common material Z-Factors. 0.10 – 10.00 1.0 FINL THK Desired Final Thickness of deposited material.
Chapter 2 SENS AVG Operation Enable/disable crystals for this film. See the Sensor Selection section of this chapter. *Not available when Relay 2 is set to Dual in the System Menu.
Chapter 2 Operation 2.3 System Menu The System Menu sets values that pertain to the overall functions of the SQM-160 and to your vacuum system’s setup. System Menu parameters apply to all films. 1. Press Program to enter program mode. 2. Press Prev to enter the System Menu. 3. Use Next and Prev to move through the system parameters. 4. Use the Control Knob to adjust the parameter value shown in Display2 to the desired setting. 5. Press Clear to abandon the change and return to the original setting. 6.
Chapter 2 Operation System Menu Display Description Range Default Units TIMEBASE Time required for a measurement. Longer times yield higher accuracy. 0.15 – 2.00 0.25 Sec. SIM MODE Simulates sensor inputs. On/Off Off DISPLAY Selects Rate/Thickness in Angstroms, Rate/Thickness in Nanometers, Frequency, or Mass (ugm/cc) display. THCK/nAnM/ FREQ/MASS Rate RATE RES Sets rate resolution to .01 or .1 Å/s. Hi/Low Low RATEFILT Number of rate readings averaged.
Chapter 2 FMIN/MAX R/T BNDS RATE MIN Operation Sub-menu sets minimum and maximum crystal frequencies. Rate and Thickness Bounds submenu for analog outputs. Deposition Rate for zero output (zero Volts). RATE MAX Deposition Rate for full scale output (+5 Volts). THICKMIN Thickness for zero output (zero Volts). THICKMAX Thickness for full scale output (+5 Volts). 4.00 – 6.00 5.00 4.10-6.10 6.10 MHz 0 – 999 0 Å/s 9.9 – 999 100 Å/s 0 – 99.99 0.00 kÅ 0 – 99.99 1.
Chapter 2 Operation 2.4 Sensor Selection The SQM-160 comes standard with two sensor inputs. Four additional sensors are available by adding a Sensor Option Card. A specific sensor can be assigned to each film, or multiple sensors can be averaged for a film. The averaging option provides more uniform coverage of the deposition area, and provides a backup sensor capability. If one of multiple sensors assigned to a film fails, the sensor is automatically removed from rate/thickness calculations.
Chapter 2 Operation 2.5 Sensor Frequency The Sensor Min/Max frequencies establish the operating range for the sensing quartz crystals. Both values are used to determine the % life that is displayed in Xtal Life mode. When the sensor frequency drops below the minimum (or reads above the maximum), the SQM-160 indicates a sensor failure by blinking the Crystal Status display. To set sensor minimum and maximum frequencies: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Menu. 3.
Chapter 2 Operation 2.6 Sensor Tooling Sensor Tooling adjusts for the difference in deposition rate between the sensor and the substrate being coated. It is an empirically determined value that matches the sensor readings to your vacuum system. Substrate Substrate Tooling Over 100% Tooling Under 100% xTooling is set in the System Menu. It adjusts the tooling for each individual sensor before it is averaged. xTooling for a sensor applies to all films.
Chapter 2 Operation 2.7 Display Units The SQM-160 can display crystal measurements in several different units. To select the display units: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Menu. 3. Press Next until DSP….. is shown. 4.
Chapter 2 Operation 2.9 Zero Thickness Before starting each film deposition, you will probably want to reset the SQM-160 Thickness value to zero. To zero Thickness: 1. Press the Zero switch in the front panel Control section. In addition to zeroing Thickness, pressing the Zero switch has these effects: 1. The Time display is reset to its programmed value, and starts counting down. 2. The Thickness Setpoint and Timer relays open. 3. The Time SP, Thk SP, and Final Thk LEDs turn off. 2.
Chapter 2 Operation 2.11 Dual Sensors Dual shuttered sensors provide a backup (secondary) sensor in case of primary sensor failure. When Relay 2 is programmed for Dual sensors in the System menu, the SQM160 will automatically switch to Sensor 2 when Sensor 1 readings stop or become erratic. To program the SQM-160 for dual sensors: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Menu. 3. Press Next until RELAY 2 is shown. 4.
Chapter 2 Operation 2.12 Rate Sampling In Rate Sampling mode, the SQM-160 opens a sensor shutter for a fixed time to “sample” the process rate, then closes the shutter and “holds” the last rate reading for a fixed time. While the shutter is closed (hold mode), the SQM-160 calculates thickness based on the last sampled rate. Note: Rate sampling can significantly extend crystal life in a high deposition rate process.
Chapter 2 Operation 2.13 Time Setpoint The Time Setpoint provides a convenient way to signal a timed event. After a preprogrammed time period, the Time Setpoint closes a relay when the Zero switch is pushed. To program the Time Setpoint: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Menu. 3. Press Next until RELAY 2 is shown. 4. Turn the Control Knob right to select TIME. Depress the Control Knob to accept the value. 5.
Chapter 2 Operation 2.14 Thickness Setpoint The Thickness Setpoint closes a relay when a programmed thickness is reached. This setpoint is independent from Final Thickness, which always closes the source shutter. To program the Thickness Setpoint: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Menu. 3. Press Next until SAMPLING is shown. 4. Turn the Control Knob right to turn OFF the Sampling function. Depress the Control Knob to accept the value. 5.
Chapter 2 Operation 2.15 Simulate Mode In Simulate mode, the SQM-160 simulates attached sensors. It is an easy way to become familiar with the SQM-160 front panel controls and programming. You can open/close the shutter to simulate deposition, zero readings, and display crystal life. You can also test the Time and Thickness setpoint relays and LEDs. To enter Simulate mode: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Menu. 3. Press Next until SIM MODE is shown. 4.
Chapter 2 Operation 2.17 Analog Output Configuration The SQM-160 analog outputs must be set to match the device that will be attached to the Rate or Thickness output. To set up the analog outputs in the System Menu: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Menu. 3. Use Next to move through the system parameters until R/T BNDS is displayed. 4. Depress the Control Knob to display RATE MIN. 5. Adjust the Control Knob to the Rate desired for a 0V output. 6.
Chapter 2 Operation 2.18 Troubleshooting Most SQM-160 problems are caused by defective crystals or improper film setup. Follow the procedures below to identify and correct common problems. No Reading, or Erratic Readings from Sensors: First, replace the quartz crystal. Crystals sometimes fail unexpectedly, or exhibit erratic frequency shifts (mode hopping) before total failure. Depending on the material, crystals may fail well before the 5 MHz lower limit.
Chapter 2 Operation When the frequency reading is stable, start the deposition process. As material is deposited on the crystal, the frequency reading should drop steadily. If not, check your source supply for erratic output. Also assure that the sensor is not too close to the source (particularly in sputtering). Incorrect Rate or Thickness Measurement: First complete the procedures in Section 2.14 to assure accurate frequency readings. Set the System Menu xTooling as described in Section 2.6.
Chapter 2 Operation 2-21
Chapter 3 Options 3.0 Rack Mounting The Full Rack Extender option (PN 900-008) mounts a single SQM-160 into a full-width 19” rack space. Follow these steps to assemble the extender and mount the SQM-160: Remove SQM-160 Mounting Ear Determine on which side of the SQM-160 you want to attach the rack extender. If a rack-mount ear is already attached to the SQM-160 on that side, remove the two 10-32 flat head screws that mount the ear and remove the rack-mount ear.
Chapter 3 Options 3-2
Chapter 4 Maintenance 4.0 Maintenance WARNING: There are no adjustments or user-serviceable parts inside the SQM-160. For maintenance or repair, contact: INFICON Two Technology Place East Syracuse, New York 13057 USA Tel +1.315.434.1100 Fax +1.315.437.3803 4.1 Cleaning Use a soft cloth, moistened with water or a mild cleaner, to clean the outer surfaces.
Chapter 4 Maintenance A. Material Parameters In the table below, an * is used to indicate that the material’s Z Factor is not known. A method of determining Z Factor empirically follows the materials table. Formula Ag AgBr AgCl Al Al2 O3 Al4 C3 AlF3 AlN AlSb As As2Se3 Au B B2O3 B4C BN Ba BaF2 BaN2O 6 BaO BaTiO3 BaTiO3 Be BeF2 BeO Bi Bi2 O3 Bi2 S3 Bi2 Se3 Bi2 Te3 BiF3 C C C8 H8 Density 10.500 6.470 5.560 2.700 3.970 2.360 3.070 3.260 4.360 5.730 4.750 19.300 2.370 1.820 2.370 1.860 3.500 4.886 3.244 5.
Appendix Formula Ca CaF2 CaO CaO-SiO2 CaSO4 CaTiO3 CaWO4 Cd CdF2 CdO CdS CdSe CdTe Ce CeF3 CeO2 Co CoO Cr Cr2 O3 Cr3 C2 CrB Cs Cs2 SO4 CsBr CsCl CsI Cu Cu2O Cu2S Cu2S CuS Dy Dy2O 3 Er Er2O3 Eu EuF2 Density 1.550 3.180 3.350 2.900 2.962 4.100 6.060 8.640 6.640 8.150 4.830 5.810 6.200 6.780 6.160 7.130 8.900 6.440 7.200 5.210 6.680 6.170 1.870 4.243 4.456 3.988 4.516 8.930 6.000 5.600 5.800 4.600 8.550 7.810 9.050 8.640 5.260 6.500 Z-Ratio 2.620 0.775 *1.000 *1.000 0.955 *10~ *1.000 0.682 *1.000 *1.000 1.
Appendix Formula Fe Fe2O3 FeO FeS Ga Ga2O3 GaAs GaN GaP GaSb Gd Gd2O3 Ge Ge3N2 GeO2 GeTe Hf HfB2 HfC HfN HfO2 HfSi2 Hg Ho Ho2O 3 In In2O3 In2Se3 In2Te3 InAs InP InSb Ir K KBr KCl KF KI Density 7.860 5.240 5.700 4.840 5.930 5.880 5.310 6.100 4.100 5.600 7.890 7.410 5.350 5.200 6.240 6.200 13.090 10.500 12.200 13.800 9.680 7.200 13.460 8.800 8.410 7.300 7.180 5.700 5.800 5.700 4.800 5.760 22.400 0.860 2.750 1.980 2.480 3.128 Z-Ratio 0.349 *1.000 *1.000 *1.000 0.593 *1.000 1.590 *1.000 *1.000 *1.000 0.
Appendix Formula La La2O 3 LaB6 LaF3 Li LiBr LiF LiNbO3 Lu Mg MgAl2O 4 MgAl2O 6 MgF2 MgO Mn MnO MnS Mo Mo2 C MoB2 MoO3 MoS2 Na Na3AlF6 Na5AL3 F14 NaBr NaCl NaClO3 NaF NaNO3 Nb Nb2O 3 Nb2O 5 NbB2 NbC NbN Nd Nd2O 3 NdF3 Density 6.170 6.510 2.610 5.940 0.530 3.470 2.638 4.700 9.840 1.740 3.600 8.000 3.180 3.580 7.200 5.390 3.990 10.200 9.180 7.120 4.700 4.800 0.970 2.900 2.900 3.200 2.170 2.164 2.558 2.270 8.578 7.500 4.470 6.970 7.820 8.400 7.000 7.240 6.506 Z-Ratio 0.920 *1.000 *1.000 *1.000 5.900 1.230 0.
Appendix Formula Ni NiCr NiCrFe NiFe NiFeMo NiO P3N5 Pb PbCl2 PbF2 PbO PbS PbSe PbSnO3 PbTe Pd PdO Po Pr Pr2O3 Pt PtO2 Ra Rb Rbl Re Rh Ru S8 Sb Sb2 O3 Sb2 S3 Sc Sc2O3 Se Si Si3 N4 SiC SiO SiO2 Density 8910 8.500 8.500 8.700 8.900 7.450 2.510 11.300 5.850 8.240 9.530 7.500 8.100 8.100 8.160 12.038 8.310 9.400 6.780 6.880 21.400 10.200 5.000 1.530 3.550 21.040 12.410 12.362 2.070 6.620 5.200 4.640 3.000 3.860 4.810 2.320 3.440 3.220 2.130 2.648 Z-Ratio 0.331 *1.000 *10~ *1.000 *10~ *1.000 *1.000 1.130 *1.
Appendix Formula Sm Sm2O3 Sn SnO2 SnS SnSe SnTe Sr SrF2 SrO Ta Ta2O5 TaB2 TaC TaN Tb Tc Te TeO2 Th ThF4 ThO2 ThOF2 Ti Ti2O3 TiB2 TiC TiN TiO TiO2 Tl TlBr TlCl TlI U U3 O8 U4 O9 UO2 V V2O5 VB2 VC VN Density 7.540 7.430 7.300 6.950 5.080 6.180 6.440 2.600 4.277 4.990 16.600 8.200 11.150 13.900 16.300 8.270 11.500 6.250 5.990 11.694 6.320 9.860 9.100 4.500 4.600 4.500 4.930 5.430 4.900 4.260 11.850 7.560 7.000 7.090 19.050 8.300 10.969 10.970 5.960 3.360 5.100 5.770 6.130 Z-Ratio 0.890 *1.000 0.724 *1.
Appendix Formula VO2 W WB2 WC WO3 WS2 WSi2 Y Y2 O3 Yb Yb2 O3 Zn Zn3Sb2 ZnF2 ZnO ZnS ZnSe ZnTe Zr ZrB2 ZrC ZrN ZrO2 Density 4.340 19.300 10.770 15.600 7.160 7.500 9.400 4.340 5.010 6.980 9.170 7.040 6.300 4.950 5.610 4.090 5.260 6.340 6.490 6.080 6.730 7.090 5.600 Z-Ratio *1.000 0.163 *1.000 0.151 *1.000 *1.000 *1.000 0.835 *1.000 1.130 *1.000 0.514 *1.000 *1.000 0.556 0.775 0.722 0.770 0.600 *1.000 0.264 *1.000 *1.
Appendix Another alternative is to change crystals frequently. For a crystal with 90% life, the error is negligible for even large errors in the programmed versus actual Z Factor.
Appendix B. Specifications Measurement Number of Sensors Sensor Frequency Range Reference Frequency Accuracy Reference Frequency Stability Thickness Display Resolution Frequency Resolution* Rate Resolution* Thickness Resolution* 2 standard, 4 additional optional 4.0 MHz to 6.0 MHz .002% +/- 2ppm (total, 0 to 50 C) 1Å +/- 0.12 Hz (Std.), +/- 0.03 Hz (HiRes) 0.60 Å/s (Std.), 0.037 Å/s (HiRes) 0.15 Å (Std.), 0.037 Å (HiRes) *Density = 1, Period = 4 rdgs/sec (Std.) 10 rdgs/sec.
Appendix Digital I/O Digital Inputs Functions Input Rating Relay Outputs Functions Relay Rating General Specifications Mains Power Supply Power Consumption Operating Environment Storage Environment Rack Dimensions (HxWxD) Weight 4 Open Shutter Close Shutter Zero Thickness Zero Time 5VDC, non-isolated 4 Shutter Sample/Hold or Thickness Setpoint Dual Sensor Shutter or Time Setpoint Crystal Fail 30Vrms or 30VDC, 2A maximum 100-120/200-240~, ±10% nominal 50/60 Hz 20W 0 C to 50 C 0 to 80% RH non-condensing
Appendix C. I/O Connections A 15-pin female D-sub connector is included with the instrument to connect digital I/O to the SQM-160 Relay I/O connector. The figure below shows the solder-side pin assignments for the supplied connector.
Appendix C. Communications Communications with a computer is by RS-232, or optional USB or Ethernet. RS-232 requires a standard 9-pin straight through cable. For USB communications, first install the SQM-160 Comm program supplied on the CD-ROM. When the SQM-160 is connected to a USB port, it will be found and installed automatically by Windows. For Ethernet communications, the SQM-160 is supplied with a fixed TC/IP address of 192.168.1.200.
Appendix SQM-160 Communications Protocol The SQM-160 communicates with a host computer via an ASCII based protocol. The instrument defaults to 19200 baud, 8 data bits, and no parity. The baud rate can be changed in the System Menu of the SQM-160, but is always 8 data bits with no parity. The basic protocol is: <1 to n data characters> Once a valid command has been transmitted to the SQM-160, a response is returned.
Appendix Command: @ Parameters: None Description: Returns the model number and software version number. Example: @ Command: A AMON Ver 2.01 Parameters: [1..99], Values | ? Description: Film parameters. The parameters available for change or inspection are Label, Density, Tooling, Z-Factor, Final Thickness, Thickness Setpoint, Time Setpoint, Sensor Average The parameters are sent/retrieved in that order. The label is a maximum of 8 characters, and is terminated by a space character.
Appendix
Appendix Command: C Description: System 2 parameters. The parameters available for change or inspection are Minimum Frequency, Maximum Frequency, Minimum Rate, Maximum Rate, Minimum Thickness, Maximum Thickness, Etch Mode and the parameters are sent/retrieved in that order. Example: C? Command: D 5.000 6.000 0.000 100.00 0.000 1.000 0 Parameters: 1 to 9 Description: Sets the active film. Example: D1 Command: J Set the active film to Film #1 Parameters: None.
Appendix Example: M Command: N A10.42 Average Rate is 10.42 Angstroms/S Parameters: [1..6] Description: Read the curent thickness for a channel. Example: N4 A1.187 Angstroms. Command: O Channel four’s Thickness is 1.187 Kilo Parameters: None. Description: Read the current Average Thickness Example: O A2.376 Angstroms. Command: P The current Average Thickness is 2.376 kilo Parameters: [1..6] Description: Read the current Frequency for a channel. Example: P2 Command: R A5701563.
Appendix Description: Zero Average Thickness and Rate. Example: S Command: T A Parameters: None. Description: Zero Time Example: T Command: U A Zeroes time display on unit. Parameters: 0,1, or ? Description: Toggles shutter open/closed or reads shutter state. Example: U1 U? U0 Command: Y A A1 A Shutter is opened Shutter Status is open Shutter is closed. Parameters: None. Description: Read the Power-Up Reset flag.
Appendix Example: Z to defaults.
Appendix SIGMACOM.DLL Function Descriptions This dll acts as an interpreter between an application and the SQM160. The dll transforms function calls to specific command sequences that the unit understands. Transfer of data to the unit, in general, requires two function calls. The first function call is to transfer the data to the unit. The data to be sent is usually contained in the function’s parameter(s). The second function call is to ChkCommDone.
Appendix ClearComm is used to clear the communications buffers in the dll. Example: ReturnVal =ClearComm() the dll Clear the comm buffers in CloseComm Parameters: None. Return : 16 Bit Integer, always returns a 1. CloseComm is used to close the currently opened communications port. CloseComm should always be used before attempting to open another port or before exiting the dll’s calling application. The dll can have only one port open at a time.
Appendix SendGetVers is used to retrieve the software version of the unit from the unit.
Appendix GetVers Parameters: Pointer to Null-Terminated string. Return : 16 Bit Integer, always returns a 1. GetVers is used to retrieve the software version of the unit from the dll. This function must be preceded by the SendGetVers. The Null-terminated string is used to return the version from the dll.
Appendix do while(ChkCommDone == -1) ReturnVal = GetFilm(&FilmStruct) wait for comm to finish FilmStruct contains Film info SetSys1 Parameters: Pointer to a System1 Structure. Return : 16 Bit Integer, always returns a 1. SetSys1 is used to set the System1 Parameters. The parameters are passed to the function through the System1 Structure. Example: ReturnVal = SetSys1(&Sys1Struct) do while(ChkCommDone == -1) set System1 parameters to Sys1Struct values wait for comm to finish SendGetSys1 Parameters: None.
Appendix do while(ChkCommDone == -1) wait for comm to finish
Appendix SendGetSys2 Parameters: None. Return : 16 Bit Integer, always returns a 1. SendGetSys2 is used to get the System2 Parameters from the unit. This function must precede the use of the GetSys2 function. GetSys2 Parameters: Pointer to a System2 Structure. Return : 16 Bit Integer, always returns a 1. GetSys2 is used to retrieve the System2 Parameters from the dll. The parameters are passed through the System2 Structure.
Appendix ZeroStartTime is used to zero the beginning time before acquiring data with GetAllData.
Appendix SendGetAllData Parameters: None. Return : 16 Bit Integer, always returns a 1. SendGetAllData is used to get the data from the unit. This function must precede the use of the GetAllData function. GetAllData Parameters: Pointer to an AllData Structure. Return : 16 Bit Integer, always returns a 1. GetAllData is used to retrieve the data from the dll. The parameters are passed through the AllData Structure.
Appendix Example: ReturnVal = SendCrystalLife(XtalNum) tell unit to transfer Life for XtalNum do while(ChkCommDone == -1) wait for comm to finish ReturnVal = CrystalLife() ReturnVal contains Life for XtalNum ZeroReadings Parameters: None. Return : 16 Bit Integer, always returns a 1. ZeroReadings is used to command the unit to zero the rate and thickness values for all channels and the average rate and thickness.
Appendix SendGetShutter is used to retrieve the condition of the shutter, open or closed, from the unit.
Appendix GetShutter Parameters: None. Return : 16 Bit Integer, Shutter value (0 = Closed, 1 = Open). GetShutter is used to retrieve the value of the shutter from the dll. The returned value from the function is the value of the shutter : Example: ReturnVal = SendGetShutter() tell unit to transfer Shutter value do while(ChkCommDone == -1) wait for comm sequence to finish ReturnVal = GetShutter() ReturnVal contains Shutter value SendGetReset Parameters: None. Return : 16 Bit Integer, always returns a 1.
Appendix Data Structures: unit. The size of each data type in the structures is : double : 8 bytes, the LSB is thrown out before transmission to the int : 2 bytes. char : 1 byte.
Appendix
Appendix E. EC Declaration of Conformity This is to certify that this equipment, designed and manufactured by: INFICON Inc. Two Technology Place East Syracuse, NY 13057 USA meets the essential safety requirements of the European Union and is placed on the market accordingly.
Appendix Immunity: EN 61326-1:1997/A1: 1998/A2: 2001 (General EMC) Class A: Immunity per Table A1 (EMC – Measurement, Control & Laboratory Equipment) RoHS: Fully compliant CE Implementation Date: January 2003 (Updated December 2008) Authorized Representative: Duane H. Wright Operations Quality Manager, ISS INFICON Inc. ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON'S PRODUCTS SHOULD BE DIRECTED, IN WRITING, TO THE VICE-PRESIDENT OF OPERATIONS AT THE ABOVE ADDRESS.
