SQM-160 Rate/Thickness Monitor User’s Guide Version 4.06 © Copyright Sigma Instruments, Inc.
Safety Information Read this manual before installing, operating, or servicing this equipment. Do not install substitute parts, or perform any unauthorized modification of the product. Return the product to Sigma Instruments for service and repair to ensure that safety features are maintained. Safety Symbols W ARNING: Calls attention to a procedure, practice, or condition that could possibly cause bodily injury or death.
Warranty Information This Sigma Instruments product is warranted against defects in material and workmanship for a period of 2 years from the date of shipment, when used in accordance with the instructions in this manual. During the warranty period, Sigma Instruments will, at its option, either repair or replace products that prove to be defective.
Table of Contents Chapter 1 1.0 1.1 1.2 1.3 1.4 1.5 1.6 Quick Start Introduction .....................................................................................................1-1 Installation........................................................................................................1-1 Front Panel.......................................................................................................1-2 Rear Panel ...........................................................................
Chapter 4 Maintenance 4.0 Introduction ......................................................................................................4-1 4.1 Cleaning...........................................................................................................4-1 Appendix A. B. C. D.
Chapter 1 Quick Start 1.0 Introduction Congratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor. The SQM-160 is an easy-to-use instrument for measuring many types of thin-film coatings. This chapter will help to get you up and running quickly. Please review the entire manual for detailed operational, programming, and safety information. 1.1 Installation This section assumes you are familiar with thin-film monitors. Refer to Sections 1.3 and 1.
Chapter 1 Quick Start 1.2 Front Panel Gary Display1 Was Display2 Crystal Status LEDs Here Control Knob Rate A/s Thickness kA Zero 2 3 4 5 6 Crystal Status Open Time Closed Xtal Life 1 Time SP Thk SP Next Shutter Prev Clear Program Final Thk Control Configuration Control Section Setpoint LEDs Configuration Section Front Panel Controls Display 1 Displays rate/thickness or frequency in normal operation. Displays setup parameter name in program mode.
Chapter 1 Quick Start 1.3 Rear Panel RS-232 Option Card Sensor 4 5 USB/Ethernet 3 Sensor 1 Sensor 2 Rate Out Thick Out Fuse T2.5A 250V 6 Relay I/O Manufactured By Sigma instruments 100-120/200-240V~ 50/60 Hz 20 W Rear Panel Connections Sensor 1 & 2 Connection to quartz crystal sensors. See Section 1.4 for detailed hookup.. Rate and Thickness Outputs Provides 0-5V analog outputs for rate and thickness readings. For connection to strip chart recorders or similar instruments.
Chapter 1 Quick Start 1.4 System Connections The diagram shows typical vacuum system wiring. The table identifies each component’s function. WARNING: Maintain adequate insulation and physical separation of sensor wiring from hazardous voltages. S ensor 9 3 2 -0 0 0 G ro u n d W ire O p tio n C a rd Sensor R S -2 3 2 In - V a c C a b le 9 0 2 -0 1 4 3 4 S e n s o r 1 S e n s o r 2 R a te O u T t h ic k O u t S o u rc e S h u tte r F e e d th ro u g h 9 3 0 -0 0 0 5 F u s e T 2 .
Chapter 1 Quick Start 1.5 Film Setup This section will help you set up the SQM-160 to measure a film. Refer to Chapter 2 for detailed programming instructions. Note: User actions with front panel controls are indicated by a Box. Results shown on displays are indicated by a Dashed Box . Enter Program Mode If the Crystal Life display is shown, press Xtal Life to return to Rate/Thickness mode. Press Program to enter the film setup menu.
Chapter 1 Quick Start 1.6 Depositing a Film If you have followed this Quick Start chapter, you are ready to deposit a film. Follow the procedure below to begin deposition. Verify Sensor Operation Verify that the Crystal Status LED for the measuring sensor is lit, and not blinking. Display Rate/Thickness Display 1 should be displaying Rate on the left and Thickness on the right. If the Crystal Life display mode is active, press the Xtal Life switch to return to Rate/Thickness mode.
Chapter 1 Quick Start 1-7
Chapter 2 Operation 2.0 Introduction This section details the operation of the SQM-160 menus and front panel controls. It is arranged by common user tasks. Note: User actions with front panel controls are indicated by a Box. Results shown on displays are indicated by a Dashed Box . 2.1 Menu Selection Two menus provide control of the SQM-160 programming. The Film Parameters Menu allows you to customize each of the nine stored films.
Chapter 2 Operation 2.2 Film Parameters The Film Parameters Menu programs the SQM-160 for the materials that will be deposited as thin films. Nine films can be stored, but only one film is active at any time. 1. Press Program to enter program mode. 2. Use the Control Knob to scroll to the desired Film # (1-9). 3. Depress the Control Knob or Next to enter the film parameters menu for the selected film. 4. Use Next and Prev to move through the film parameters, shown in Display 1. 5.
Chapter 2 Operation Film Parameters Display Description Range Default Units DENSITY Density of the material being deposited. Consult the Appendix for common material densities. 0.5 – 99.99 1.00 gm/cc TOOLING Overall Tooling Factor for this film. See the Sensor Tooling section of this chapter. 10 – 399 100 % Z-FACTOR Z-Factor of the material being deposited. Consult the Appendix for common material Z-Factors. 0.10 – 10.00 1.0 FINL THK Desired Final Thickness of deposited material.
Chapter 2 SENS AVG Operation Enable/disable crystals for this film. See the Sensor Selection section of this chapter. *Not available Relay 3 is set to Dual in the System Menu.
Chapter 2 Operation 2.3 System Parameters The System Parameters Menu sets values that pertain to the overall functions of the SQM-160 and to your vacuum system’s setup. System parameters apply to all films. 1. Press Program to enter program mode. 2. Press Prev to enter the System Parameters Menu. 3. Use Next and Prev to move through the system parameters. 4. Use the Control Knob to adjust the parameter value shown in Display2 to the desired setting. 5.
Chapter 2 Operation System Parameters Display Description Range Default Units TIMEBASE Time required for a measurement. 0.15 – 2.00 0.25 Sec. SIM MODE Simulates sensor inputs. On/Off Off DISPLAY Toggles between Rate/Thickness in Angstroms, Rate/Thickness in Nanometers, Frequency, and Mass (ugm/cc) displays. THCK/nAnM/ FREQ/MASS Rate RATE RES Sets rate resolution to .01 or .1 Å/s. Hi/Low Low RATEFILT Number of rate readings averaged.
Chapter 2 Operation FMIN/MAX Sub-menu sets minimum and maximum crystal frequencies. R/T BNDS Rate and Thickness Bounds submenu. RATE MIN Deposition Rate for zero output (zero Volts). 4.00 – 6.00 5.00 4.10-6.10 6.10 MHz 0 – 999 0 Å/s RATE MAX Deposition Rate for full scale output (+5 Volts). 9.9 – 999 100 Å/s THICKMIN 0 – 99.99 0.00 kÅ 0 – 99.99 1.00 kÅ Thickness for zero output (zero Volts). THICKMAX Thickness for full scale output (+5 Volts).
Chapter 2 Operation 2.4 Sensor Selection The SQM-160 comes standard with two sensor inputs. Four additional sensors are available by adding a Sensor Option Card. A specific sensor can each be assigned to each film, or multiple sensors can be averaged for a film. The averaging option provides more uniform coverage of the deposition area, and provides a backup sensor capability. If one of multiple sensors assigned to a film fails, the sensor is automatically removed from rate/thickness calculations.
Chapter 2 Operation 2.5 Sensor Frequency The Sensor Min/Max frequencies establish the operating range for the sensing quartz crystals. Both values are used to determine the % life that is displayed in Xtal Life mode. When the sensor frequency drops below the minimum, the SQM-160 indicates a sensor failure by blinking the Crystal Status display. To set sensor minimum and maximum frequencies: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Parameters menu. 3.
Chapter 2 Operation 2.6 Sensor Tooling Sensor Tooling adjusts for the difference in deposition rate between the sensor and the substrate being coated. It is an empirically determined value that matches the sensor readings to your vacuum system. Substrate Substrate Tooling Over 100% Tooling Under 100% xTooling is set in the System Parameters menu. It adjusts the tooling for each individual sensor before it is averaged. xTooling for a sensor applies to all films.
Chapter 2 Operation 2.7 Display Units The SQM-160 can display crystal measurements in several different units. To select the display units: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Parameters menu. 3. Press Next until DSP….. is shown. 4.
Chapter 2 Operation 2.9 Zero Thickness Before starting each film deposition, you will probably want to reset the SQM-160 Thickness value to zero. To zero Thickness: 1. Press the Zero switch in the front panel Control section. In addition to zeroing Thickness, pressing the Zero switch has these effects: 1. The Time display is reset to its programmed value, and starts counting down. 2. The Thickness Setpoint and Timer relays open. 3. The Time SP, Thk SP, and Final Thk LEDs turn off. 2.
Chapter 2 Operation 2.11 Dual Sensors Dual shuttered sensors provide a backup (secondary) sensor in case of primary sensor failure. When Relay 3 is programmed for Dual sensors in the System menu, the SQM160 will automatically switch to Sensor 2 when Sensor 1 readings stop or become erratic. To program the SQM-160 for dual sensors: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Parameters menu. 3. Press Next until RELAY 3 is shown. 4.
Chapter 2 Operation 2.12 Rate Sampling In Rate Sampling mode, the SQM-160 opens a sensor shutter for a fixed time to “sample” the process rate, then closes the shutter and “holds” the last rate reading for a fixed time. While the shutter is closed (hold mode), the SQM-160 calculates thickness based on the last sampled rate. Note: Rate sampling can significantly extend crystal life in a high deposition rate process.
Chapter 2 Operation 2.13 Time Setpoint The Time Setpoint provides a convenient way to signal a timed event. The Time Setpoint closes a relay a programmed time period after the Zero switch is pushed. To program the Time Setpoint: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Parameters menu. 3. Press Next until RELAY 3 is shown. 4. Turn the Control Knob right to select TIME. Depress the Control Knob to accept the value. 5.
Chapter 2 Operation 2.14 Thickness Setpoint The Thickness Setpoint closes a relay when a programmed thickness is reached. This setpoint is independent from Final Thickness, which always closes the source shutter. To program the Thickness Setpoint: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Parameters menu. 3. Press Next until SAMPLING is shown. 4. Turn the Control Knob right to turn OFF the Sampling function. Depress the Control Knob to accept the value. 5.
Chapter 2 Operation 2.15 Simulate Mode In Simulate mode, the SQM-160 simulates attached sensors. It is an easy way to become familiar with the SQM-160 front panel controls and programming. You can open/close the shutter to simulate deposition, zero readings, and display crystal life. You can also test the Time and Thickness setpoint relays and LEDs. To enter Simulate mode: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Parameters menu. 3. Press Next until SIM MODE is shown. 4.
Chapter 2 Operation 2.17 Analog Output Configuration The SQM-160 System Parameters must be set to match the device that will be attached to the Rate or Thickness output. To set up the analog outputs in the System Parameters menu: 1. Press Program to enter Program mode. 2. Press Prev to enter the System Parameters menu. 3. Use Next to move through the system parameters until R/T BNDS is displayed. 4. Depress the Control Knob to display RATE MIN. 5.
Chapter 2 Operation 2.18 Troubleshooting Most SQM-160 problems are caused by defective crystals or improper film setup. Follow the procedures below to identify and correct common problems. No Reading, or Erratic Readings from Sensors: First, replace the quartz crystal. Crystals sometimes fail unexpectedly, or exhibit erratic frequency shifts (mode hopping) before total failure. Depending on the material, crystals may fail well before the typical 5 MHz value.
Chapter 2 Operation When the frequency reading is stable, start the deposition process. As material is deposited on the crystal, the frequency reading should drop steadily. If not, check your source supply for erratic output. Also assure that the sensor is not too close to the source (particularly in sputtering). Incorrect Rate or Thickness Measurement: First complete the procedures in Section 2.14 to assure accurate frequency readings. Set the System Menu xTooling as described in Section 2.6.
Chapter 2 Operation 2-21
Chapter 3 Options 3.0 Introduction There are three options available for the SQM-160: the Four-Sensor Card (P/N 502062), the Half-Rack Adapter (P/N 900-014), and the Full Rack Extender (P/N 900-008). 3.1 Option Card Installation The SQM-160 motherboard has a 36-pin header to accommodate the optional FourSensor Card. The Four-Sensor Card expands the SQM-160 inputs to a total of six quartz crystal sensors. WARNING: Hazardous voltages are present inside the SQM-160 when it is connected to a power source.
Chapter 3 Options 3.3 Rack Installation The Half Rack Adapter kit (PN 900-014) mounts one SQM-160 on one side of a standard 19” equipment rack. It consists of one rack-mount ear and two 10-32 flat head screws for attaching the ear to the unit. (The other half of the 3½” high rack space is empty, allowing the mounting of another half-rack piece of equipment next to the SQM160, if desired.) The Full Rack Extender option (PN 900-008) mounts a single SQM-160 into a full-width 19” rack space.
Chapter 3 Options 3-3
Chapter 4 Maintenance 4.0 Introduction WARNING: There are no adjustments or user-serviceable parts inside the SQM-160. For maintenance or repair, contact Sigma Instruments 120 Commerce Drive, Unit 1 Fort Collins, CO 80524 USA 970-416-9660 4.1 Cleaning Use a damp cloth, wetted with water or a mild detergent, to clean the outer surfaces.
Chapter 4 Maintenance 4-2
Appendix A. Material Parameters In the table below, an * is used to indicate that the material’s Z Factor is not known. A method of determining Z Factor empirically follows the materials table. Formula Ag AgBr AgCl Al Al2 O3 Al4 C3 AlF3 AlN AlSb As As2Se3 Au B B2O3 B4C BN Ba BaF2 BaN2O 6 BaO BaTiO3 BaTiO3 Be BeF2 BeO Bi Bi2 O3 Bi2 S3 Bi2 Se3 Bi2 Te3 BiF3 C C C8 H8 Density 10.500 6.470 5.560 2.700 3.970 2.360 3.070 3.260 4.360 5.730 4.750 19.300 2.370 1.820 2.370 1.860 3.500 4.886 3.244 5.720 5.999 6.035 1.
Appendix Formula Ca CaF2 CaO CaO-SiO2 CaSO4 CaTiO3 CaWO4 Cd CdF2 CdO CdS CdSe CdTe Ce CeF3 CeO2 Co CoO Cr Cr2 O3 Cr3 C2 CrB Cs Cs2 SO4 CsBr CsCl CsI Cu Cu2O Cu2S Cu2S CuS Dy Dy2O 3 Er Er2O3 Eu EuF2 Density 1.550 3.180 3.350 2.900 2.962 4.100 6.060 8.640 6.640 8.150 4.830 5.810 6.200 6.780 6.160 7.130 8.900 6.440 7.200 5.210 6.680 6.170 1.870 4.243 4.456 3.988 4.516 8.930 6.000 5.600 5.800 4.600 8.550 7.810 9.050 8.640 5.260 6.500 Z-Ratio 2.620 0.775 *1.000 *1.000 0.955 *10~ *1.000 0.682 *1.000 *1.000 1.
Appendix Formula Fe Fe2O3 FeO FeS Ga Ga2O3 GaAs GaN GaP GaSb Gd Gd2O3 Ge Ge3N2 GeO2 GeTe Hf HfB2 HfC HfN HfO2 HfSi2 Hg Ho Ho2O 3 In In2O3 In2Se3 In2Te3 InAs InP InSb Ir K KBr KCl KF KI Density 7.860 5.240 5.700 4.840 5.930 5.880 5.310 6.100 4.100 5.600 7.890 7.410 5.350 5.200 6.240 6.200 13.090 10.500 12.200 13.800 9.680 7.200 13.460 8.800 8.410 7.300 7.180 5.700 5.800 5.700 4.800 5.760 22.400 0.860 2.750 1.980 2.480 3.128 Z-Ratio 0.349 *1.000 *1.000 *1.000 0.593 *1.000 1.590 *1.000 *1.000 *1.000 0.
Appendix Formula La La2O 3 LaB6 LaF3 Li LiBr LiF LiNbO3 Lu Mg MgAl2O 4 MgAl2O 6 MgF2 MgO Mn MnO MnS Mo Mo2 C MoB2 MoO3 MoS2 Na Na3AlF6 Na5AL3 F14 NaBr NaCl NaClO3 NaF NaNO3 Nb Nb2O 3 Nb2O 5 NbB2 NbC NbN Nd Nd2O 3 NdF3 Density 6.170 6.510 2.610 5.940 0.530 3.470 2.638 4.700 9.840 1.740 3.600 8.000 3.180 3.580 7.200 5.390 3.990 10.200 9.180 7.120 4.700 4.800 0.970 2.900 2.900 3.200 2.170 2.164 2.558 2.270 8.578 7.500 4.470 6.970 7.820 8.400 7.000 7.240 6.506 Z-Ratio 0.920 *1.000 *1.000 *1.000 5.900 1.230 0.
Appendix Formula Ni NiCr NiCrFe NiFe NiFeMo NiO P3N5 Pb PbCl2 PbF2 PbO PbS PbSe PbSnO3 PbTe Pd PdO Po Pr Pr2O3 Pt PtO2 Ra Rb Rbl Re Rh Ru S8 Sb Sb2 O3 Sb2 S3 Sc Sc2O3 Se Si Si3 N4 SiC SiO SiO2 Density 8910 8.500 8.500 8.700 8.900 7.450 2.510 11.300 5.850 8.240 9.530 7.500 8.100 8.100 8.160 12.038 8.310 9.400 6.780 6.880 21.400 10.200 5.000 1.530 3.550 21.040 12.410 12.362 2.070 6.620 5.200 4.640 3.000 3.860 4.810 2.320 3.440 3.220 2.130 2.648 Z-Ratio 0.331 *1.000 *10~ *1.000 *10~ *1.000 *1.000 1.130 *1.
Appendix Formula Sm Sm2O3 Sn SnO2 SnS SnSe SnTe Sr SrF2 SrO Ta Ta2O5 TaB2 TaC TaN Tb Tc Te TeO2 Th ThF4 ThO2 ThOF2 Ti Ti2O3 TiB2 TiC TiN TiO TiO2 Tl TlBr TlCl TlI U U3 O8 U4 O9 UO2 V V2O5 VB2 VC VN Density 7.540 7.430 7.300 6.950 5.080 6.180 6.440 2.600 4.277 4.990 16.600 8.200 11.150 13.900 16.300 8.270 11.500 6.250 5.990 11.694 6.320 9.860 9.100 4.500 4.600 4.500 4.930 5.430 4.900 4.260 11.850 7.560 7.000 7.090 19.050 8.300 10.969 10.970 5.960 3.360 5.100 5.770 6.130 Z-Ratio 0.890 *1.000 0.724 *1.
Appendix Formula VO2 W WB2 WC WO3 WS2 WSi2 Y Y2 O3 Yb Yb2 O3 Zn Zn3Sb2 ZnF2 ZnO ZnS ZnSe ZnTe Zr ZrB2 ZrC ZrN ZrO2 Density 4.340 19.300 10.770 15.600 7.160 7.500 9.400 4.340 5.010 6.980 9.170 7.040 6.300 4.950 5.610 4.090 5.260 6.340 6.490 6.080 6.730 7.090 5.600 Z-Ratio *1.000 0.163 *1.000 0.151 *1.000 *1.000 *1.000 0.835 *1.000 1.130 *1.000 0.514 *1.000 *1.000 0.556 0.775 0.722 0.770 0.600 *1.000 0.264 *1.000 *1.
Appendix B. Specifications Measurement Number of Sensors Sensor Frequency Range Reference Frequency Accuracy Reference Frequency Stability Frequency Resolution* Rate Resolution* Rate Display Thickness Resolution* Thickness Display *@ 2 readings/sec, Density=2.70 gm/cc 2 standard, plus 4 optional 4.0 MHz to 6.0 MHz .002% +/- 2ppm (total, 0 to 50 C) .06 Hz @ 6 MHz .055 Å/s .01 or .1 Å/s .
Appendix Digital I/O Digital Inputs Functions Input Rating Relay Outputs Functions Relay Rating General Specifications Mains Power Supply Power Consumption Operating Environment Storage Environment Rack Dimensions (HxWxD) Weight 4 Open Shutter Close Shutter Zero Thickness Zero Time 5VDC, non-isolated 4 Shutter Sample/Hold or Thickness Setpoint Dual Sensor Shutter or Time Setpoint Crystal Fail 30Vrms or 30VDC, 2A maximum 100-120/200-240~, ±10% nominal 50/60 Hz 20W 0 C to 50 C 0 to 80% RH non-condens
Appendix C. I/O Connections A 15-pin female D-sub connector is included with the instrument to connect digital I/O to the SQM-160 Relay I/O connector. The figure below shows the solder-side pin assignments for the supplied connector. 1 8 9 15 Relay I/O Connector Rear View Pins 1,2 Relay 4 Function Crystal Fail Relay Description Contacts close when all enabled sensors have failed.
Appendix WARNING: The inputs are not isolated! The voltage level applied must be limited to between 0 and +5 volts with respect to Ground. WARNING: Output relays are rated for 30Vrms or 30VDC, at 2A maximum. Proper fusing and adequate wiring insulation and separation should be provided to assure these limits are not exceeded.
Appendix D.
