Series 830/840/860 Instruction Manual Table of Contents Sierra Series 830/840/860 Side-Trak™ and Auto-Trak™ Mass Flow Meters and Controllers Instruction Manual Part Number IM-83/84/86 Revision G .1 - 2-06 5 Harris Court, Building L Monterey, CA 93940 (831) 373-0200 (800) 866-0200 Fax (831) 373-4402 http://www.sierrainstruments.com Sierra Instruments b.v.
Table of Contents Series 830/840/860 Instruction Manual Customer Notice Sierra Instruments, Inc. is not liable for any damage or personal injury, whatsoever, resulting from the use of Sierra Instruments standard mass flow meters or controllers for oxygen gas. You are responsible for determining if this mass flow meter or controller is appropriate for your oxygen application. You are responsible for cleaning the mass flow meter or controller to the degree required for your oxygen flow application.
Series 830/840/860 Instruction Manual Table of Contents Revision F changes: Add wiring designations for 15-pin and 20-pin connectors. Correct units on page A-1, Example 1.
Table of Contents Series 830/840/860 Instruction Manual Table of Contents Chapter 1 Introduction Introduction..............................................................................1-1 Using this Manual...............................................................1-1 Safety Information..............................................................1-2 Receipt of System Components ..........................................1-2 Technical Assistance .......................................................
Series 830/840/860 Instruction Manual Table of Contents Electromagnetic Valves - Low and Medium Flow.............. 4-8 Electromagnetic Valves - High Flow.................................. 4-9 Motor-Operated Rotary Valves ........................................ 4-11 Valve Adjustment ............................................................ 4-12 Transducer Calibration..................................................... 4-15 Chapter 5 Troubleshooting Troubleshooting Procedures..........................
Table of Contents Series 830/840/860 Instruction Manual List of Tables 2-1. 0-6 Recommended Wire Gauges ..........................................
Series 830/840/860 Instruction Manual Table of Contents Warnings and Cautions Warning! Follow National Electric Code or your local code safety practices when wiring or connecting this unit to a power source. Only qualified personnel should install and wire the transducer. Warning! Always remove main power before disassembling the transducer. Caution! During operation, the mass flow controller valve becomes hot. Caution! Do not use the manual purge function when RS-485 is active (Model 860 only).
Series 830/840/860 Instruction Manual Chapter 1 Introduction Chapter 1 Introduction Sierra’s Side-Trak™ and Auto-Trak™ mass flow meters and controllers are designed to accurately measure and control flows of process gases.
Chapter 1 Introduction Series 830/840/860 Instruction Manual Throughout this manual, we use the word transducer as a generic term to represent all Side-Trak and Auto-Trak mass flow meters and controllers.
Series 830/840/860 Instruction Manual Chapter 1 Introduction Safety Information Caution and warning statements are used throughout this book to draw your attention to important information. Caution! Warning! This statement appears with information that is important to protect people and equipment from damage. Pay very close attention to all warnings that apply to your application. This statement appears with information that is important for protecting your equipment and performance.
Chapter 1 Introduction Series 830/840/860 Instruction Manual The Series 800 Flow Sensing Principle The operating principle of Sierra’s Side-Trak and Auto-Trak flow meters and controllers is based on heat transfer and the first law of thermodynamics. During operation process gas enters the instrument’s flow body and divides into two flow paths, one through the sensor tube, the other through the laminar flow element bypass.
Series 830/840/860 Instruction Manual Chapter 1 Introduction Figure 1-3. Sensor Temperature Distribution Figures 1-2 and 1-3 show the mass flow through the sensor tube as inversely proportional to the temperature difference of the coils. The coils are legs of a bridge circuit with an output voltage in direct proportion to the difference in the coils’ resistance; the result is the temperature difference (∆T). Two other parameters, heat input (H) and coefficient of specific heat (Cp) are both constant.
Series 830/840/860 Instruction Manual Chapter 2 Installation Chapter 2 Installation Quick-Installation Instructions For 830/840 L, M and H Meters And Controllers 1. NEVER TEST FOR LEAKS WITH LIQUID LEAK DETECTOR. If liquid seeps into the electronics or the sensor compartment below, the instrument may be damaged. Use a pressure-decay test instead. 2. Install an appropriate in-line filter upstream if the gas contains any particulate matter or condensed moisture.
Chapter 2 Installation Series 830/840/860 Instruction Manual Installation Overview Side-Trak™ and Auto-Trak™ transducers are supplied with either compression, VCO, VCR or NPT process connections. To ensure a successful installation, inlet and outlet tubing should be in a clean state prior to plumbing the transducer into the system. The shipping caps covering the inlet/outlet fittings should not be removed until immediately prior to installation. Before installing the transducer, verify the following: 1.
Series 830/840/860 Instruction Manual Chapter 2 Installation Installing the Transducer Caution! Only qualified personnel should install the transducer. Follow the installation instructions that are applicable to your transducer’s process connection. For all NPT and 1/2-inch size fittings, see the piping recommendations given on page 2-3. Before use, all plumbing should be checked carefully for leaks and the transducer purged with dry nitrogen.
Chapter 2 Installation Series 830/840/860 Instruction Manual VCR Fittings 1. Position the transducer with the flow direction arrow pointing downstream in the direction of flow. 2. Install new washers compatible with the gas to be used. (Do not mix or interchange parts of tube fittings made by different manufacturers.) 3. Tighten the nut finger tight, and then 1/4 turn tighter with a wrench. Do not over-tighten! 4. Check the system’s entire flow path thoroughly for leaks.
Series 830/840/860 Instruction Manual Chapter 2 Installation Wiring the Transducer Warning! Follow National Electric Code or your local code safety practices when wiring or connecting this unit to a power source. Only qualified personnel should wire the transducer. Side-Trak and Auto-Trak transducers require a +15, 0, –15 VDC power supply and a readout device. Additionally, controllers require a set point input (0-5 VDC standard, 4-20 mA optional).
Chapter 2 Installation Series 830/840/860 Instruction Manual Table 2-1.
Series 830/840/860 Instruction Manual Chapter 2 Installation Wiring Transducers with 20-Pin Card-Edge Connectors Input Power Connections Figure 2-2. Input Power Connections (20-Pin Connector) Output Signal Connections Standard output for all transducers is a 0-5 VDC signal, which directly corresponds to the 0 to 100% mass flow full scale range. Output signals are linear and require a minimum load resistance of 1000 Ohms (4-20 mA output 600 Ohms maximum loop resistance).
Chapter 2 Installation Series 830/840/860 Instruction Manual Input Signal Connections (Controllers Only) The 0-5 VDC (4-20 mA optional) set point command input signal allows you to set the flow to any desired value within the range of the controller. The set point input signal is a direct linear representation of 0 to 100 percent of the controller’s mass flow full scale value. For 0–5 VDC set point control, connect a manual-adjust potentiometer as shown below.
Series 830/840/860 Instruction Manual Chapter 2 Installation Valve Purge and Valve Off Connections (Controllers Only) Depending on the valve voltage, connect as shown below. 15 Volt Valve COM 1 2 3 4 5 6 7 8 9 10 A B C D E F G H I J Purge On Off Valve Off Open collector output On Off Figure 2-6. Valve Purge and Valve Off (20-Pin Connector) 30 Volt Valve COM +15V 1 2 3 4 5 6 7 8 9 10 A B C D E F G H I J Purge On Off Valve Off Open collector output On Off Figure 2-7.
Chapter 2 Installation Series 830/840/860 Instruction Manual Figure 2-8. 20-Pin Connector Pin Designations Note: Prior to 2001, sierra supplied separate cables for controllers and meters. These are now combined into one style for 830/840 devices and one style for 860M/C.
Series 830/840/860 Instruction Manual Chapter 2 Installation Wiring Transducers with 15-Pin D-Connectors Input Power Connections Figured 2-9. Input Power (15-Pin D-Connector) Note: Use separate, dedicated wires for pins 9 and 10 to the power supply common on meters and pins 9,10 and 3 on controllers. Output Signal Connections Standard output for all transducers is a 0-5 VDC signal, which directly corresponds to the 0 to 100% mass flow full scale range.
Chapter 2 Installation Series 830/840/860 Instruction Manual Input Signal Connections (Controllers Only) A 0-5 VDC (4-20 mA optional) set point command input signal allows you to set the flow to any desired value within the range of the controller. The set point input signal is a direct linear representation of 0 to 100 percent of the controller’s mass flow full scale value. For 0–5 VDC set point control, connect a manual-adjust potentiometer as shown below.
Series 830/840/860 Instruction Manual Chapter 2 Installation Valve Purge and Valve Off Connections (Controllers Only) Depending on the valve voltage, connect as shown below. 15 Volt Valve COM 9 10 11 12 13 14 15 1 2 3 4 5 6 7 8 Valve Off On Open collector output Off Purge On Off Figure 2-13. Valve Purge and Valve Off (15-Pin D-Connector) 30 Volt Valve Valve Off COM +15V 9 10 11 12 13 14 15 1 2 3 4 5 6 7 8 Open collector output Purge On Off On Off Figure 2-14.
Chapter 2 Installation Series 830/840/860 Instruction Manual Figure 2-15. 15-Pin D-Connector Pin Assignments Note: Prior to 2001, Sierra supplied separate cables for controllers and meters.
Series 830/840/860 Instruction Manual Chapter 2 Installation Motor-Operated Valve Circular 10-Pin Connector Figure 2-16. Motor-Operated Rotary Valve Connector (10-Pin Connector) Notes: 1. Both pin 2 and 4 should be connected to the power supply common via separate, dedicated wires to assure no ground loops. 2. 4-20 mA output signal is ground-referenced (“non-isolated”). Warning: Do not apply any external voltage to this loop. 3. 4-20 mA setpoint signal: Use 15 VDC maximum to produce.
Series 830/840/860 Instruction Manual Chapter 3 Operation Chapter 3 Operation This chapter covers transducer operation and controller features available on Sierra’s Side-Trak™ and Auto-Trak™ models. For more information on the advanced digital RS-485 commands available on Auto-Trak transducers, refer to the Series 860 “AutoNet” Software Addendum included with this manual.
Chapter 3 Operation Series 830/840/860 Instruction Manual Mass Flow Controller Operation Electromagnetic Valve Controllers Caution! During operation, the mass flow controller valve becomes hot. When the transducer is installed and the system has undergone a complete leak check: 1. Make sure the set point is zero before applying power. If the set point input is not connected to some type of control device, set the valve on/off switch in the off position. (No connection may cause the setpoint to float).
Series 830/840/860 Instruction Manual Chapter 3 Operation Motor-Operated Rotary Valve Controllers When the transducer is installed and the system has undergone a complete leak check: 1. Make sure the valve set point is zero before applying power. 2. Apply power. Allow thirty minutes of warm-up time. (When power is first applied, the output signal from the transducer remains fixed at a much higher than normal level until the sensor warms up to its normal operating temperature range.) 3.
Chapter 3 Operation Series 830/840/860 Instruction Manual Mass Flow Controller Features Over-Range and Cold Sensor Lockout Circuit Side-Trak Models incorporate an over-range circuit which disables the output signal when the sensor is heating to its normal operating range, or if an over flow condition exists. The operation of this circuit can be verified by observing the 5 VDC (20 mA) output signal during power up.
Series 830/840/860 Instruction Manual Chapter 3 Operation On-Off Control and Soft Start Option On-off control is provided for all models equipped with an electromagnetic valve. This feature is available by connecting a manual on-off switch to the transducer connector as shown in Chapter 2. Certain processes cannot tolerate the normally fast response of Sierra mass flow controllers.
Chapter 3 Operation Series 830/840/860 Instruction Manual Valve Purge Function Caution! Do not use the manual purge function when RS-485 is active. Electromagnetic valves are driven with either 15 or 30 volts depending on the range and pressure. In general, units below 10 slpm have the 15 volt valve. When the purge function occurs, electromagnetic valves are driven fully open regardless of the set point input. Furthermore, the purge function will override any valve-off function.
Series 830/840/860 Instruction Manual Chapter 3 Operation terial Safety Data Sheet must be enclosed with the unit upon its return.
Series 830/840/860 Instruction Manual Chapter 4 Maintenance Chapter 4 Maintenance Caution! It is important that this transducer be serviced only by qualified personnel. Side-Trak™ and Auto-Trak™ transducers essentially require no scheduled maintenance other than periodic flow path cleaning if the gas is dirty. If an in-line filter is used, the filtering element should be periodically be replaced or ultrasonically cleaned. Included in this chapter are general instructions for: • Flow Path Maintenance ....
Chapter 4 Maintenance Series 830/840/860 Instruction Manual Figure 4-1. Low Flow Transducer LFE Cleaning Low Flow Transducers: The LFE is accessed by unscrewing the main inlet fitting and removing it from the flow body. The LFE is screwed into the inlet fitting, which has been specially machined for this purpose. To access the components: Caution! Removing or repositioning the LFE may alter the calibration.. 1. Remove the unit from the system. 2.
Series 830/840/860 Instruction Manual Chapter 4 Maintenance Figure 4-2. Medium Flow Transducer LFE Cleaning Medium Flow Transducers: In the medium flow body, the LFE assembly consists of the honeycomb laminar flow element, inlet screen, 0.63 inch long standoff, two ranging washers, 2-1/4 inch long 4-40 screw and 4-40 nut. Range changes in the honeycomb element are made with various diameter ranging washers. To access the components: 7. Remove the unit from the system. 8.
Chapter 4 Maintenance Series 830/840/860 Instruction Manual Figure 4-3. High Flow Transducer LFE Cleaning High Flow Transducers: The high flow LFE is similar to the honeycomb element used in the medium flow body but larger in diameter. The high flow body consists of four parts: inlet tube, inlet cap, main flow body and end cap. The inlet tube is only removed to inspect and replace the sealing Oring between the inlet tube and inlet cap. To access the components: 1. Remove the unit from the system. 2.
Series 830/840/860 Instruction Manual Chapter 4 Maintenance Figure 4-4. NPT Transducer LFE Cleaning NPT-Type Transducers: The NPT flow body is comprised of a stainless steel pipe terminated on either end by an end cap sealed with an O-ring. The end caps are held in place by four tie rods which run the length of the flow meter and are fastened with eight 3/8-16 nuts and washers. The inlet screen is mounted to the inside of the inlet end cap on three standoffs.
Chapter 4 Maintenance Series 830/840/860 Instruction Manual Sensor Maintenance Caution! Do not remove the sensor cover, this could shift transducer calibration. The sensor tube is straight and has a relatively large, 0.031 inch ID, which makes inspection and cleaning easy.
Series 830/840/860 Instruction Manual Chapter 4 Maintenance Sensor Electrical Test To check the electrical integrity of the sensor windings: Caution! *Important note: Removal of the sensor cover and disturbance of sensor insulation blanket that is inside will alter the sensors performance, will necessitate a recalibation, and may break the sensor micro-weldings. 1. Remove the unit from the system. 2.
Chapter 4 Maintenance Series 830/840/860 Instruction Manual Valve Maintenance Electromagnetic valves may require spring-tension adjustments for various reasons (See Valve Adjust Procedure). No maintenance is required under normal operating conditions other than an occasional cleaning. Use of certain corrosive gases may require frequent replacement of the valve plug and O-rings. This indicates a need for a different elastomer.
Series 830/840/860 Instruction Manual Chapter 4 Maintenance 4. The small circuit board may be separated from the main board to ease removal of the coil. To separate, first remove the plastic #4 mounting screw located in the center of the main circuit board and carefully pull the two boards apart. Remove the four 4-40 socket head cap screws at the base of the valve. Separate the valve from the flow body. 5.
Chapter 4 Maintenance Series 830/840/860 Instruction Manual 3. Unscrew the coil cover with a 11/16 inch wrench. Remove the coil and coil enclosure. Note the location of any washers or spacers for re-assembly. 4. The small circuit board may be separated from the main board to ease removal of the coil. To separate, first remove the mounting screw located in the center of the main circuit board and carefully pull the two boards apart. 5. Remove the four 1/4-28 socket head cap screws at the base of the valve.
Series 830/840/860 Instruction Manual Chapter 4 Maintenance Motor-Operated Rotary Valves The electronic components in the Model 840 motorized valve flow controllers require no maintenance with the exception of the motor, which requires replacement when its service life has ended. This will be evidenced by “hunting,” or the inability to maintain set point without a constant motion back and forth, or outright failure.
Chapter 4 Maintenance Series 830/840/860 Instruction Manual 840 L, M and H series Valve Adjustment Procedure The Sierra 840 L, M and H (low, medium or high-flow units) control the flow with a proportional electromagnetic valve that is set up for certain process conditions. Variables, which affect their operation, include orifice size, spring selection and adjustment, input and output pressures and gas-flow orientation (horizontal or vertical).
Series 830/840/860 Instruction Manual Chapter 4 Maintenance the no-leak condition). Now, adjust this screw clockwise one quarter turn past this point, tighten the locknut and replace the cap. Apply power and test the controller for proper operation. (Quick fix for oscillation).
Chapter 4 Maintenance Series 830/840/860 Instruction Manual slowly, 1/8 turn at a time and observe until the desired voltage is obtained. 4. Now apply a 5% setpoint signal and confirm that the voltage does not drop below 11 volts on the 30-volt circuit or 6 volts on the 15-volt circuit. Go back and forth between these settings and make sure that the voltages stay within these boundaries. When this voltage “window” is obtained, the symptoms should disappear and the lock nut can be re-tightened. 5.
Series 830/840/860 Instruction Manual Chapter 4 Maintenance Transducer Calibration Caution! It is important that this transducer be calibrated only by qualified personnel. Calibration of Sierra’s flow meters and controllers requires a calibration standard of at least equal accuracy and preferably an order of magnitude of at least four times better than the transducer.
Series 830/840/860 Instruction Manual Chapter 5 Troubleshooting Chapter 5 Troubleshooting Warning! Always remove main power before disassembling the transducer. Caution! Only qualified personnel should perform troubleshooting procedures. This chapter is provided to help locate the cause of a transducer failure. It is not intended to be an all inclusive repair manual. In the case of major repairs, the unit should be returned to the factory for service.
Chapter 5 Troubleshooting Series 830/840/860 Instruction Manual Flow Meters and Flow Controllers with Electromagnetic Valves Problem Possible Cause Solution No output Clogged sensor Clean or replace sensor PCB defective Repair or replace PCB Inlet filter screen clogged Clean or replace screen Gas leak Find and correct leaks Application requires high pressure and non-horizontal mounting Re-zero transducer PCB defective Repair or replace PCB Low or no gas pressure Set correct gas pressure
Series 830/840/860 Instruction Manual Chapter 5 Troubleshooting Flow Controllers with Motor-operated Rotary Valves Problem Possible Cause Solution Valve “hunts” back and forth continuously Pressure differential too great Reduce pressure Motor coupling set screws loose Tighten set screws Valve motor failure Replace motor Limit switch out of adjustment or broken Adjust or replace switch Microprocessor failed Replace microprocessor Contaminant blocking valve Remove blockage Motor fuse blown
Chapter 5 Troubleshooting Series 830/840/860 Instruction Manual Returning Equipment to the Factory Factory Calibration—All Models Sierra Instruments maintains a fully-equipped calibration laboratory. All measuring and test equipment used in the calibration of Sierra transducers are traceable to NIST Standards. Sierra is ISO-9001 registered and conforms to the requirements of ANSI/NCSL-Z540 and ISO/IEC Guide 25.
Series 830/840/860 Instruction Manual Chapter 5 Troubleshooting RETURN ADDRESS: Sierra Instruments, Inc. Attention: Factory Service Center 5 Harris Court, Building L Monterey, CA 93940 USA CUSTOMER SERVICE AND SUPPORT INFORMATION: Email Technical Support: service@sierrainstruments.com Email Sales: sales@sierrainstruments.com FACTORY USA (recommended): TOLL FREE: 800-866-0200 PHONE: 831-373-0200 FAX: 831-373-4402 EMAIL: service@sierrainstruments.
Series 830/840/860 Instruction Manual Appendix A Appendix A Conversion Formulas and Gas Tables Conversion of Flow Rate to Other T and P Conditions The flow rate of your transducer is referenced to certain “standard” conditions of temperature and pressure. Unless otherwise specified in your order, these standard conditions are 21°C (70°F) and 760 mm of mercury (1 atmosphere).
Appendix A Series 830/840/860 Instruction Manual 14.7 460 + 100 Q2 = (10.00) = 3.47 lm 14.
Series 830/840/860 Instruction Manual Appendix A Calculating For a Single Gas The following tables provide K-factors and thermodynamic properties of gases commonly used with mass flow meters and controllers. The purpose of these tables is two-fold: 1. Calibrating an “actual” gas with a reference gas. This is particularly useful if the actual gas is not a common gas or if it is toxic, flammable, corrosive, etc. 2.
Appendix A Series 830/840/860 Instruction Manual Where: H = The constant amount of heat applied to the sensor tube, • m = The mass flow rate of the gas (gm/min) Cρ = The coefficient of specific heat of the gas (Cal/gm); Cρ is given in the Table (at 0°C), ∆T = The temperature difference between the downstream and upstream coils, and N = A correction factor for the molecular structure of the gas given by the following table: Number of Atoms in the Gas Molecule Monatomic Diatomic Triatomic Polyatomic N
Series 830/840/860 Instruction Manual Appendix A For our purposes, we want the ratio of the flow rate, Q1, for an actual gas to the flow rate of a reference gas, Q2, which will produce the same output voltage in a particular mass flow meter or controller. We get this by combining equations (1) and (5): Q1/Q2 = K1/K2 = (N1/ ρ1Cp1)/(N2/ρ2CP2) (6) Please note that the constant b cancels out. Equation (6) is the fundamental relationship used in the accompanying tables.
Appendix A Series 830/840/860 Instruction Manual Calculating Dual Gas Mixtures Equation (6) is used for gas mixtures, but we must calculate N/ρCp for the mixture.
Series 830/840/860 Instruction Manual Appendix A Gas Tables and K-factors Actual Gas Acetylene Air Allene (Propadiene) Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Bromine Boron Tribromide Bromine Pentafluoride Bromine Trifluoride Bromotrifloromethane (Freon-13 B1) 1,3-Butadiene Butane 1-Butane 2-Butane 2-Butane Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride Carbon Tetrafluoride (Freon-14) Carbonyl Fluoride Carbonyl Sulfide Chlorine Chlorine Trifluoride Chlorodifluorometh
Appendix A Actual Gas Dichloromethylsilane Dichlorosilane Dichlorotetrafluoroethane (Freon-114) 1,1-Difluoroethylene (Freon-1132A) Dimethylamine Dimethyl Ether 2,2-Dimethylpropane Ethane Ethanol EthylAcetylene Ethyl Chloride Ethylene Ethylene Oxide Fluorine Fluoroform (Freon-23) Freon-11 Freon-12 Freon-13 Freon-13 Freon-14 Freon-21 Freon-22 Freon-113 Freon-114 Freon-115 Freon-C318 Germane Germanium Tetrachloride Helium Hexafluoroethane (Freon-116) Hexane Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen
Series 830/840/860 Instruction Manual Actual Gas Methyl Mercaptan Methyl Trichlorosilane Molybdenum Hexafluoride Monoethylamine Monomethylamine Neon Nitric Oxide Nitrogen Nitrogen Dioxide Nitrogen Trifluoride Nitrosyl Chloride Nitrous Oxide Octafluorocyclobutane (Freon-C318) Oxygen Difluoride Oxygen Ozone Pentaborane Pentane Perchloryl Fluoride Perfluoropropane Phosgene Phosphine Phosphorous Oxychloride Phosphorous Pentafluoride Phosphorous Trichloride Propane Propylene Silane Silicon Tetrachloride Silicon
Series 830/840/860 Instruction Manual Appendix B Specifications Appendix B Product Specifications Operating Specifications Gases All clean gases; specify when ordering Mass Flow Rates 0 to 10 sccm to 0 to 5600 slpm; flow ranges specified are for an equivalent flow of nitrogen at 760 mm Hg and 21°C (70°F); other ranges in other units are available (e.g. scfh or nm3/h) Gas Pressure 1000 psig (68.
Appendix B Specifications Series 830/840/860 Instruction Manual 840/860C (high) ......100 and 200 slm: + 15 VDC @ 80 mA, 1.2 watts and -15 VDC @ 760 mA, 11.4 watts; 300, 400 and 500 slm: +15 VDC @ 830 mA, 12.5 watts and -15 VDC @ 760 mA, 11.4 watts 840 (NPT)................+15 VDC @ 230 mA, 3.5 watts and -15 VDC @ 170 mA, 2.
Series 830/840/860 Instruction Manual Control Range Appendix B Specifications 840/860C .................2 to 100% of full scale; valve shuts when flow drops below 2% 840 (NPT) ................
Appendix B Specifications Series 830/840/860 Instruction Manual and valve plug standard; Neoprene, 4079 Kal-Rez (or equivalent) and other elastomers available on special order; PFA Teflon valve lug available 840 (NPT)...................... 316 stainless steel, Teflon® valve set, Viton O-rings standard; Neoprene, 4079 Kal-Rez (or equivalent) optional, others on special order Control Valve Type B-4 840/860C (low, med, high) ............ Electromagnetic 840 (NPT)......................
Series 830/840/860 Instruction Manual Appendix B Specifications Transducer Mounting Dimensions All dimensions are inches, millimeters are in parentheses. Certified drawings are available on request. Shaded portion of dimensional drawings indicates controller models. Low Flow Body Flow Range, 0–10 sccm to 0–15 slpm Process Tubing .25 (6.4) .562-18 Thread (on Flow Body) Fitting Type Compression .125 or .25 VCO (male) .25 VCR (male) .25 Dim. L 4.84 or 5.0 (122.9 or 127.0) 4.60 (116.8) 4.90 (124.
Appendix B Specifications Series 830/840/860 Instruction Manual Medium Flow Body Flow Range, slpm Process Tubing 0–15 0–30 0–50, 100 .25 or .375 (6.4 or 9.5) .25 or .375 (6.4 or 9.5) .25 or .375 (6.4 or 9.5) 0–100 .375 (9.5) .562-18 Thread (on Flow Body) Fitting Type Compression .25 or .375 VCO (male) .25 or .375 VCR (male) .25 or .375 Dim. L 6.27 or 6.39 (159.3 or 162.3) 5.81 or 6.25 (147.6 or 158.8) 6.13 or 6.43 (155.7 or 163.
Series 830/840/860 Instruction Manual Appendix B Specifications High Flow Body Flow Range, slpm Process Tubing 0–100 0–200 0–300 0–400 0–500 .375 or .50 (9.5 or 12.7) .375 or .50 (9.5 or 12.7) .50 (12.7) .50 (12.7) .50 (12.7) .75-16 Thread (on Flow Body) Fitting Type Compression .375 or .50 VCO (male) .375 VCR (male) .375 Dim. L 830 11.90 or 12.10 (302.3 or 307.3) 11.80 (299.7) 12.19 (309.6) Dim. L2 840 14.10 or 14.30 (358.1 or 363.2) 14.00 (355.6) 14.40 (365.
Appendix B Specifications B-8 Series 830/840/860 Instruction Manual IM-83/84/86-H
Series 830/840/860 Instruction Manual Appendix B Specifications NPT Flow Body 830 Flow Range, slpm 0–50 0–100 0–200 Inlet FNPT 1-inch 1.5-inch 2-inch Outlet FNPT 1-inch 1.5-inch 2-inch Dim. D 4.95 (125.7) 5.95 (151.1) 7.95 (201.9) Dim. H 10.72 (272.3) 11.72 (297.7) 13.78 (350.0) Dim. H2 8.25 (209.6) 8.75 (222.3) 9.81 (249.2) Dim. L 10.10 (256.5) 12.10 (307.3) 16.10 (408.
Appendix B Specifications Series 830/840/860 Instruction Manual NPT Flow Body 840 Flow Range, slpm 0–50 0–100 0–200 1-inch 1.5-inch 2-inch Outlet FNPT 3/4-inch 3/4-inch 1.5-inch Dim. A 2.92 (74.2) 4.30 (109.2) 6.64 (168.7) Dim. B 1.0 (25.4) 1.88 (47.8) 2.87 (72.9) Dim. C 2.25 (57.2) 1.37 (34.8) .38 (9.7) Dim. D 4.95 (125.7) 5.95 (151.1) 7.95 (201.9) Dim. H 10.72 (272.3) 11.72 (297.7) 13.78 (350.0) Dim. H2 8.25 (209.6) 8.75 (222.3) 9.81 (249.2) Dim. L 10.10 (256.5) 12.
Series 830/840/860 Instruction Manual IM-83/84/86-H Appendix B Specifications B-11
