Instruction manual

Instruction Manual Smart-Trak
®
50 Series
IM-50 Rev. A.2 35
Actual Gas
Chemical
Symbol
K
-factor
Relative
Air
Cp
(Cal/g)
Density
(g/l) @
70°F
Density
(g/l) @
0°C
Elastomers*
O-ring Valve
Seat
Methyl Mercaptan CH
3
SH .521 .2459 1.992 2.146 KR
Methyl Trichlorosilane (CH
3
) SiCl
3
.251 .164 6.191 6.669 KR
Molybdenum Hexafluoride MoF
6
.210 .1373 8.695 9.366 KR
Monoethylamine C
2
H
5
NH
2
.351 .387 1.867 2.011 KR
Monomethylamine CH
3
NH
2
.511 .4343 1.287 1.386 KR
Neon NE 1.463 .245 .836 .900
Nitric Oxide NO .992 .2328 1.243 1.339
Nitrogen N
2
1.002 .2485 1.161 1.25
Nitrogen Dioxide NO
2
.742 .1933 1.905 2.052 800 Series Recommended
Nitrogen Trifluoride NF
3
.481 .1797 2.941 3.168 KR
Nitrosyl Chloride NOCl .611 .1632 2.711 2.920 KR
Nitrous Oxide N
2
O .716 .2088 1.836 1.964
Octafluorocyclobutane
(Freon-C318)
C
4
F
6
.170 .185 7.795 8.397 KR
Oxygen Difluoride OF
2
.631 .1917 2.234 2.406
Oxygen O
2
.998 .2193 1.326 1.427
Ozone O
3
.447 .3 1.990 2.144
Pentaborane B
5
H
9
.261 .38 2.614 2.816 KR
Pentane C
5
HI
2
.210 .398 2.988 3.219 KR
Perchloryl Fluoride CIO
3
F .391 .1514 4.243 4.571 KR
Perfluoropropane C
3
F
8
.174 .197 7.787 8.388 KR
Phosgene COCl
2
.441 .1394 4.101 4.418 KR
Phosphine PH
3
.762 .2374 1.408 1.517 KR
Phosphorous Oxychloride POCl
3
.361 .1324 6.352 6.843 KR
Phosphorous
Pentafluoride
PH
5
.301 .1610 5.217 5.620 KR
Phosphorous Trichloride PCl
5
.301 .1250 5.688 6.127 KR
Propane C
3
H
8
.335 .3885 1.826 1.967
Propylene C
3
H
6
.411 .3541 1.742 1.877
Silane SiH
4
.601 .3189 1.330 1.433 KR
Silicon Tetrachloride SiCl
4
.281 .1270 7.037 7.580 KR
Silicon Tetrafluoride SiF
4
.351 .1691 4.310 4.643 KR
Sulfur Hexafluoride SF
6
.261 .1592 6.049 6.516 KR
Sulfuryl Fluoride SO
2
F
2
.391 .1543 4.235 4.562 KR
Teos .090 800 Series Recommended
Tetrafluorahydrazine N
2
F
4
.321 .182 4.307 4.64 KR
Trichlorofluormethane
(Freon-11)
CCl
3
F .331 .1357 5.690 6.129 KR
Trichlorisilane SiHCl
3
.331 .1380 5.610 6.043 KR
1,1,2-Trichloro-1,2,2
Trifluorethane (Freon-113)
CCl
2
FCClF
2
.200 .161 7.761 8.360 KR
Trisobutyl Aluminum (C
4
H
9
)Al .061 .508 8.214 8.848 KR
Titanium Tetrachloride TiCl
4
.271 .120 7.858 8.465 KR
Trichloro Ethylene C
2
HCl
3
.321 .163 5.523 5.95 KR
Trimethylamine (CH
3
)
3
N .281 .3710 2.450 2.639 KR
Tungsten Hexasfuoride WF
6
.251 .0810 12.328 13.28 800 Series Recommended
Uranium Hexafluoride UF
6
.200 .0888 14.574 15.70 KR
Vinyl Bromide CH
2
CHBr .461 .1241 4.430 4.772 KR
Vinyl Chloride CH
2
CHCl .481 .12054 2.588 2.788 KR
Xenon Xe 1.443 .0378 5.438 5.858
 If no O-ring material is specified then O-ring to be used is Viton. NEO is neoprene or equivalent. KR is DuPont
Kalrez or equivalent. Valve Seat applies only to controllers.