User Manual

34
Siemens Building Technologies
Cerberus Division
01.2002
Keyword index
A
Acids, 1
Air cleanliness class, 23, 26, 27, 28
Air supply, 23
Airborne contamination, 32
Airlock, 32
Alerting of the works fire brigade, 2
Average amount, 1
B
Basic concept for clean room monitoring, 6
C
Causes of fire, 2
Changing rooms, 32
Clean room data, 8
Clean workplace, 32
Cleanliness, 32
Concentration of particles, 28
Concentration value, 28
Contaminated outside air, 10
Continuous operation of the air handling system in the
clean room, 4
Conventional fire detection systems, 5
D
Damage expected, 1
Dangerous chemicals, 1, 29
Detector siting, 7
Detectors on the ceiling, 5
Dielectric deposition and metalization process, 22
Doping or ion implantation, 22
E
Early fire detection, 11
Etching, 22
Extinguishing systems, 2
F
Film deposition, 21
Filter fan unit, 6, 15, 19, 25
Filtering the air for floating particles, 23
Fire aerosols, 12
Fire aerosols versus airflow, 5
Fire protection of wet benches, 8
Fires in clean rooms, 1
First air, 32
Floating particle filter, 23
G
Gases, 1
H
High sensitivity air sampling smoke detection system, 6,
7
HSD detector, 6, 7
I
Infrared flame detector, 6
Isolator, 32
L
Laminar flow, 24, 25
Leak, 32
Limit concentration of particles, 28
M
Manual call point, 7
Manufacturing process, 21
Masking, 22
Maximum concentration value, 28
Microchip production, 21
Minienvironment, 32
Monitoring of ceiling voids, 6
Monitoring of extract air from the clean room, 6
N
Non-unidirectional airflow, 4, 32
Number of air changes per hour, 26