User Manual

e1851a

Siemens Building Technologies

Cerberus Division

01.2002

Particulate concentration

Number of particles per volume of air (particles/m3) determined by the respective measu-

ring technique.

SMIF-box

Standard Mechanical Inter-Face for the transport of wafers from one work station to an-

other, thus avoiding the exposure of the wafers to room atmosphere.

9 Bibliography

D The Fundamentals of Clean room Design. Dr. Hans Schicht AG, CH-Zumikon 1998

D Reinraumtechnik VDI 2083 Blatt 1 und 2

D Clean room technology VDI 2083 Part 1 and 2

D Loss prevention data sheet on semiconductor fabrication facilities. Factory Mutual Engi-

neering Corp. January 1997