User Manual

e1851a
30
Siemens Building Technologies
Cerberus Division
01.2002
Gas Comments / HazardsFormula
Phosphorous
Pentafluoride
PF
5
– toxic
– corrosive
– oxidizing gas
Silane SiH
4
– very toxic
– spontaneously flammable in air
Tetrachlorosilane SiCL
4
– corrosive
– react violently if mixed with water
Silicon Tetrafluoride SiF
4
– toxic
– corrosive
Tungsten Hexafluoride WF
6
– toxic
– corrosive
7.2 Inert gases
Gas Formula Comments / Hazards
Argon
Ar – inerte (nonflammable)
Carbon Dioxide CO
2
– inerte (nonflammable)
Nitrogen N
2
– inert
Sulphur Hexafluoride SF
6
– inert (nonflammable)
Xenon Xe – inert (nonflammable)
7.3 Other gases
Gas Formula Comments / Hazards
Nitrous Oxide
N
2
O – oxidizing gas
Oxygen O
2
– powerfull oxidizing gas