User Manual
e1851a
11
Siemens Building Technologies
Cerberus Division
01.2002
4.1.2 Air handling principle at the workplace
Here the clean room is divided into various air cleanliness zones according to the process-
ing and circulation zones. For certain workplaces, air cleanliness class 1000 is inadequate.
Frequently the so-called tunnel principle is used for the organization of adjacent work-
places with air cleanliness classes 1 or 10. In such a case, partitions are installed between
the critical work areas and the surrounding areas. In clean room technology this technique
is referred to as linear protection. In the example shown, the air from the clean room es-
capes via vents at floor level in the service area or the technical zone where the air is ex-
tracted at the ceiling.
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Legend:
1 Outside air intake
2 Outside air purification
3 Mixing chamber
4 Air circulating equipment
5 Pressure box
6 Workroom according to tunnel
principle, air cleanliness class
10 and better
7 Service area, technical zone
or incl. corridor
8 Entire area of workroom ven-
tilated by displacement flow
9 Extract air duct
10 Extract air fan
11 Extract air purification
12 Extract air vent
Fig. 2 Workplace air handling from the microelectronics area
4.1.3 Fire detection system
In this situation we use an air sampling smoke detection system with HSD detectors and
additional MB2 detector boxes with DO1153 for early fire detection.
Point-type smoke detectors cannot be used in the clean room for early fire detection be-
cause any fire aerosols are immediately blown away by the powerful air flow. On the other
hand, the service area is equipped with point-type smoke detectors according to the moni-
toring concept for EDP systems.