User Manual

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10
Siemens Building Technologies
Cerberus Division
01.2002
4 Planning examples
The first planning example shows a factory for watch microelectronics. Here so-called „lin-
ear protection” is used for the clean room protection concept . We talk of linear protection if
a clean room conditions have to be provided for a row of adjacent workplaces. A common
application of this principle is the „clean tunnel” which is often found in the microelectronics
field (see also 4.1.2).
The second example shows a spacious microchip factory. In this case so-called „surface
protection” is used for the protection concept. Surface protection is used for extensive
clean rooms. Basically speaking, with surface protection concepts the building is one gi-
gantic air re-circulating machine in which the clean room (that is the area which is immedi-
ately useful for production) often only makes up 10% of the total room volume.
4.1 Factory for watch microelectronics
4.1.1 Room-in-room construction
This example deals with a room-in-room construction. The clean room and the service
areas are on the same floor.
The initial pressure stage prevents contaminated outside air from infiltrating the building
where the service area (technical zone) encloses the clean room. This area has air cleanli-
ness class 100,000. The second pressure stage which is between the service area and the
actual clean room has air cleanliness class 1000.
2 2 2
2
2 2 2
2
3
1
Legend:
1 Building shell
2 Service area, technical zone air
cleanliness class 100,000 *
(sometimes also known as
„grey zone”)
3 Clean room area air cleanliness
class 1000 *
* according to U.S. Federal Stan-
dard 209D
Fig. 1 Room-in-room construction