User Manual

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Siemens Building Technologies
Cerberus Division
01.2002
3.5 Stages in the planning of a fire detection
system
Production processes in the semiconductor industry are highly specialized and adjusted to
current products. Each factory looks different and has a different environment.
Our recommendations are therefore of a general nature. However, with the detailed infor-
mation on clean room technology, the planning engineer should be able to work out his own
concepts and solutions.
We recommend proceeding as follows:
Step Assignment
1
Discuss the fire protection and intervention aims (e.g. extinguishing) with the
customer.
2
Obtain important clean room data on:
– the air handling concept and the
– operating modes of the air handling equipment
– air flow control in the clean room
– pressure differences in the area monitored; overpressure, underpressure
areas. Which areas have overpressure/underpressure?
– areas with different air cleanliness classes
– etc.
Detailed information on clean room technology can be found in section 6!
Here it is very important that early contact is made with the consulting
engineers who designed the clean room and the air handling systems.
3 Check out the possible positions of air sampling tubes and point-type detectors.
4 Check out where critical processes which pose a fire hazard are taking place
and also those installations which have to be monitored or protected.
5 Check out where there are explosion-hazard areas.
6 Check out requirements to be met for installation and the material for clean
rooms.
7 Define monitoring concept.
8 Specify fire control installations with the consulting engineer/operator.
9 Define system design.
In comparison with a standard fire detection system e.g. a hospital or the like, the
realization of a clean room project always involves more work. This must be taken into
account when calculating the quotation.
Where do the additional costs arise?
D Checking out the entire air flow control and air handling systems is time-consuming
D The same applies to the working out of a monitoring concept for wet benches and other
process-controlled manufacturing devices.
Note: Wet benches, work stations and process-controlled manufacturing devices and
equipment always require individual fire protection solutions, therefore this topic is not
dealt with in this paper.
The manufacturing processes have inherent high risks due to the extensive use of toxic,
highly corrosive and flammable gases and liquids. Standard fire detection and fire extin-
guishing equipment does not always meet the necessary material specifications.
D Whoever has to work in clean rooms must comply with various requirements, e.g. in re-
spect of clean room clothing, compliance with specific operational regulations etc.
D Access to clean rooms is often difficult. Authorization must be obtained for access.