Safety No compromise for high-accuracy products PD LD The total quality control system that operates throughout the entire design and production process ensures products with enhanced safety, high quality, and high reliability that match our customers’ requirements. The company is certified for length calibration in compliance with the traceability system required by the “Weights and Measures Act,” and has been granted ISO 9001 certification, which is the international standard for quality assurance.
What's Lasers cale? # Laserscale easily achieves measurement and control by ultra high resolution less than 1nm. Sinusoidal wave of approx. 138nm signal period is generated by a hologram scale with high diffraction efficiency and a high resolution detecting head based on grating interference method,strong against disturbance by air pressure or current, plus easy to install (BS series). Signal distortion in principle remains minimal at high S/N ratio.
Principle Application The semiconductor laser beam is split by a polarized light beam splitter into S and P polarized light beams, then diffracted through a volume hologram lattice with very high diffraction efficiency. The two diffracted beams pass through separate 1/4-wavelength plates to a mirror, which reflects the beams back through the plates. This process converts the S polarized beam to P polarized light and the P polarized beam to S polarized light.
Lineup Series Feature Max.resolution Accuracy Measuring length Interpolator Output Response speed Page 400mm/s P. 10 400mm/s P. 12 700mm/s P, 14 40bit Binary BS78 Low expansion glass 17pm ±0.04μm (Measuring length 40mm) 10mm~420mm BD96 (BD95) BS Serial =138nm Transmission BS65-R BH25-RE/NE BH Low expansion glass Blue plate glass 17pm 0.03125nm ±0.5μm (30mm-170mm) ±1μm (220mm-420mm) Low expansion glass: 30mm~420mm Blue plate glass: 30mm~420mm - Radius 12.03mm Radius 27.
BS78-xxxN(NS)(measuring length：40／120／170／220／370／420) L1 1 L3 1 L2 1 (with/without reference mark) L3 1 13.1 9.8 0.2* N-M4 scale clamp mounting screw 60 2-M4 reference plate mounting screw 50 3* Scale movement 25 0.2* Reference point 25 0.2* detection direction * 0.01 M 0.01 A L2 1 25 0.2* 25 0.2* 25 0.2* 6 14 BS78 5 4.6 Reference signal detection position 43.5 32.7 0.3 BS External Dimensions Scale signal detection position 30.5 Detector head mounting screw 2-M3x30 29.5 38 0.
External Dimensions Main specifications BS78 Model BS78-xxx(NS)(measuring length：40／120／170／220／370／420) Measuring length Overall length Max. travel length L1 1 L3 1 L2 1 L2 1 25 0.2* 25 0.2* 25 0.2* 6 4.6 (24.5) 14 23 39.2 0.2* 5 19 25 0.2* Accuracy(at20˚C) 2-M4 reference plate mounting screw 50 0.3* 25 0.2* 13.1 9.8 0.2* N-M4 scale clamp mounting screw 60 * 0.01 M 0.01 L3 1 * 0.03 A 30.5 Detector head mounting screw 2-M3x30 29.5 38 0.2* 46 0.3* 3 ± 0.
BS65-xxxN(NS)(measuring length：160／260／360／460／560／660／760／860／960) L1 BS65-R L3 x N L2 L2 L3 x N 11.5 L3 50 5 6 25 25 25 25 25 25 25 55 30.5 12 7 20 19 (39) 23 44.5 7 20 9 7.8 2-M4 Reference plate mounting screw 5 11.5±0.2 N-M4 Scale clamp mounting screw 60 14 L3 (with reference mark) (3.5) BS External Dimensions 2-M5 Detector head mounting screw 40 70 L2 +0.
BH25-RED BH25-***REDB L1±1 L3 L2 L2 L3 98 M 40±0.2* 25±0.2* 25±0.2* 25±0.2* 25±0.2* 2.5 25±0.2* 25±0.2* 9 43.5 20 15* 11.5 5 6±0.5 (with/without reference markreference mark) Abutting surface for mounting SC-Scale clamp SP-Spacer 26 0.01/200 88±0.3* Scale abutting surface (Note 5) 21* BH25-RE / BH25-NE 0.02 (26) (21)* BH External Dimensions Reference plate(BE-C) P-4x8 Scale clamp mounting screw 2-M4x8 Reference plate(BE-C) mounting screw 11.
Amplifier BOX BH20-NED 50.5 2-M3 BH20-RE / BH20-NE 21 30.5 (With / Without reference mark) 10214-52A2JL (Manufactured by 3M) 2.5 BH External Dimensions 20 2.5 25 ø5.5 11.7 12.5 1000 2.5 Compact, reflective rotary Laserscale featuring high accuracy, high resolution and high response speed. 12.5 4 2-M2 (Mounting hole) 20 26 precision measuring instruments, and aspheric surface processing machines. 8.
BH200-RE / BH200-NE 106 BH200-RE / BH200-NE 4.5 (with reference mark) / (without reference mark) 98 4 87.2 5.4 R2.25 42 52 48.5 27.2 20.6 5 29 20.5 ø4.5 24.5 BH External Dimensions BH200-RE (2.5) 13.5 Compact, reflective rotary Laserscale featuring high accuracy, 11.5 Cable Length 1000 5 1.6 Reference mark measuring point 0.5 Ideal for high-resolution angle measuring in HDD manufacturing equipment 1.6 29 high resolution, and high-speed response, 4.
BL57-xxxRE＊B（Effective length：006／016／026／036／046） L1±1 L3 BL57-RE / BL57-NE L2 SC-scale clamp SP-spacer (with reference mark) / (without reference mark) L3 L2 98 88±0.3* 40±0.2* 25±0.2* 25±0.2* 25±0.2* L2 25±0.2* 25±0.2* 25 5 ø4 0.4 L2 60 50±0.3* 25±0.2* 1.4 18 27 For BL57-016RE*B or BL57-036RE*B Scale clamp Cable length 1000 9 Scale abutting surface See note 6 36 101 *96±0.1 4-ø2.8 0.01 M 0.01 1 3-ø5 42 60 2-ø5 hole 2.8 10 6 6.3 14 2 9 2 42 60 25 38 ø2.8 +0.
External Dimensions External Dimensions BL57-xxxRE＊C（Effective length：003／006／011／016／021／026／031／036／041） BL57-xxxNE＊B（Effective length：006／016／026／036／046） L±1 L2 25±0.2* 25±0.2* 0.4 14 16.4±0.2 * 21 0.01 M 0.01 (4.5) 1 6 1 Scale signal detection position 0.02 A — — 2 — 4 50 — 3 2 6 — BL57-006RE*C 60 96 Reference plate W (t=2.2) Reference plate W (t=2.
External Dimensions BL57-RE supporting vacuum environment (Special models) BL57-xxxNE＊C（Effective length：003／007／012／017／022／027／032／037／042） Scale clamp L1±1 L3 Output cable *3 * 1.5 2.8 31 ø2.8 Effective length L1 L2 L3 SC SP P BL57-003NE*C 30 56 — — 1 — 2 10 +0.05 hole 0 25 38 Spacer (t=2.
4.5 BL55-RU 2-ø8.5 (2-Mounting hole for M8) F1 0.1 M 0.1 9.5 ø4.2 (2-Mounting hole for M4) F2 0.05 M 0.05 0.1 M 0.05 20 41.7 (Note 2) 18.8 1 0.75 70.5 32.3 (with reference mark) 9 9 61.5 23.9 BL55-RU (Note 1) Measuring length (L) + 137 Measuring length (L) + 118 9.5 9.8 BL External Dimensions 4 4 12 28.5 1 23 (35) 56 For air supply (L) 88 For air supply (9.5) 30 Sealed type linear encoder with non-contact design offers minimal reversal error. 20 18 2-4.6 x 8.
●BD96-B1 ●BD96-B2 6-M3 Tap (for mounting) (both sides) 25 11.5 180 236 48 28 24 10 10 180 236 (15.2) (28) 180 180 200 (10) 25 11.5 48 10 24 48 180 180 200 10 28 (15.2) 180 236 Base (opposite side) 4-M3 Tap (for mounting) (10) 25 11.
BD95-T10,T13,T14,T15,T16,T17commonness BD95 Interpolator for Laserscale TM 172 144 BD External Dimensions 2-R2.2 200 190 16 32 Interpolator with A/B quadrature output that achieves resolution to 4.3nm. Unit: mm Main specifications Model BD95-T13 BD95-T14 BD95-T15 BD95-T16 BD95-T10 BD95-T17 Resolution (selectable) 34.5 nm (4divisions) or 17.2nm (8 divisions) 100 nm or 50 nm during pitchcompensation 17.2 nm (8divisions) or 8.
Technology Connection Cable Before use Scales Extension Cable*2 Model Interpolator Head cable length*1 Robot cable:CK-T61 (1.0m) CK-T24 (3.0m) CK-T54 (6.0m) BS78 BS65-R Please see the diagram blow about an instrallation method of Laserscale. BD95 Upside 3m (Standard) or Robot cable:CK-T133 (0.1m) CK-T137 (3.0m) CK-T112 (5.0m) Downside BH20-NE 1m (Standard) BH25-RED BH20-RED BL57-RED 1m (Standard) Robot cable:CK-T148 (3.
As shown in Fig. 3-3, when the head cable is drawn out to the right side, the point where the distance from the slider left end and scale unit left end is 28.5 mm is considered the left end movable limit. Total length = Measuring length (L) + 137 (5.394") Although the slider or scale unit can move Scale unit an amount equal to the measuring length from this left end movable limit, there is almost no margin at both ends.
Reference point output specifications Scale Signal Output The output specifications are compliant with EIA-422. AB Signal and Alarm Output Specifications (For output formats F and G) BL55, BL57 Reference point signal and SIN and COS signal phases (Over the entire length and the entire operating temperature range) Specifications Item Specifications Item • The output specifications are compliant with EIA-422. • AB signal minimum phase difference t : 38 ns A signal Typ. Max. 0.32 μm 0.4 μm 0.
Interface unit side : Cable side : R04-R12M (manufactured by TAJIMI ELECTRONICS CO., LTD.) R04-P12F (manufactured by TAJIMI ELECTRONICS CO., LTD.) ....... Waterproof type R03-PB12F (manufactured by TAJIMI ELECTRONICS CO., LTD.) .....
http://www.mgscale.
