Instruction manual

EXT Split Flow Compound Turbomolecular Pumps
SERVICE, SPARES AND ACCESSORIES
PAGE
32
Issue F 32 Mar 07
7.4.8 VRX Vent-restrictor
Use a VRX fixed orifice vent-restrictor to restrict the flow of vent gas into the EXT Split Flow Pump.
Refer to Section 3.4 for information on the selection of the correct VRX Vent-restrictor.
Figure 8 – Installation of optional accessories
Vent-restrictor Orifice diameter Item Number
VRX10 0.1 mm B580-66-021
VRX20 0.2 mm B580-66-022
VRX30 0.3 mm B580-66-023
VRX50 0.5 mm B580-66-024
VRX70 0.7 mm B580-66-025
Table 17 - VRX Vent-restrictor
1. ACX Cooling fan 3. TAV Vent-valve
2. WCX Water-cooler 4. EXDC Controller