Instruction manual

EXT Split Flow Compound Turbomolecular Pumps
SERVICE, SPARES AND ACCESSORIES
PAGE
30
Issue F 30 Mar 07
7.3.3 Inlet-flange seals
EXT Split Flow Pumps are supplied with inlet seals. The Item Numbers of replacement seals are given
below.
7.4 Accessories
7.4.1 Installation
The accessories available for use with the EXT Split Flow Pumps are described in the following sections.
Figure 2 shows how the accessories are fitted to an EXT Split Flow Pump.
7.4.2 EXDC Drive Modules
Fit an EXDC Drive Module as an alternative to an EXC Controller and pump-to-controller cable.
7.4.3 EXC Controllers
The BOC Edwards EXC Controllers provide the facilities necessary for operating a pumping system
based on an EXT70/200H, EXT70/200Hi, EXT200/200H or EXT200/200Hi Split Flow Pump. The Item
Numbers of the EXC Controllers are given below.
Flange size Inlet-flange seal Item Number
DN100ISO-K ISO100 trapped o-ring, fluoroelastomer B271-58-171
DN63ISO-K ISO63 trapped o-ring, fluoroelastomer B271-58-170
Table 10 - Inlet-flange seals
Drive Module Item Number
EXDC160 24 V 45 deg D396-46-600*
EXDC160 80 V D396-41-000
* Pump system originally supplied with D396-46-510 (unpackaged)
Table 11 - EXDC Drive modules
Controller Voltage Item Number
EXC100E 90 - 264 V a.c. D396-20-000
EXC100L 90 - 264 V a.c. D396-22-000
EXC120 90 - 264 V a.c. D396-16-000
EXC300 90 - 132/180 - 264 V a.c. D396-14-000
Table 12 - EXC Controllers