Instruction manual

EXT Split Flow Compound Turbomolecular Pumps

MAINTENANCE

PAGE

Issue F 22 Mar 07

5.4 Cleaning the pump

If the inside of the EXT Split Flow pumps is contaminated, it may not be possible to achieve the specified

ultimate vacuum, or pump-down time may increase. In these circumstances the pump must be returned

to a BOC Edwards Service Centre, where the pump will be dismantled and cleaned. Use the procedure

given in the forms at the end of this manual to return the pump.

Use a cleaning solution which is suitable for the contaminants in the pump. You can use any organic

solvent to clean the EXT Split Flow Pump, but we recommend that you use non-CFC solvents, such as

isopropanol or ethanol.

For environmental reasons, keep wastage of cleaning solutions and solvents to a minimum.

5.5 Fault finding

Refer to Table 7 for the possible causes of faults and for the recommended actions to rectify faults.

Table 7 is applicable to a basic, manually controlled pumping system with an EXC Controller configured

for local (manual) operation.

Note that if you use an EXDC Pump Drive Module to control the EXT Split Flow Pump, or if you use an

EXC Controller configured for remote operation to control the EXT Split Flow Pump, some of the

checks and actions in Table 7 may not apply to your system. Refer to the fault finding section of the

instruction manual supplied with your EXDC Pump Drive Module or EXC Controller for further fault

finding information.

WARNING

Clean the external surfaces of the EXT Split Flow pumps in a well-ventilated location.

When you use cleaning solutions and solvents to clean the pump, observe all precautions

specified by the manufacturer. Avoid inhalation of any particulates which may be present

in the pump.

CAUTION

Do not attempt to clean any parts of the EXT Split Flow pumps other than the external surfaces.

Organic solvents may damage internal pump components. Do not use abrasive materials to clean any

part of the pump.