Instruction manual

EXT Split Flow Compound Turbomolecular Pumps
INSTALLATION
PAGE
15
Mar 07 15 Issue F
Use the BOC Edwards trapped o-ring supplied with the pump and use a minimum of four fixing bolts to
connect the inlet-flange of the pump to the vacuum system. M8 bolts should be tightened to a torque of
5-6Nm.
Figure 7 – Mounting attitude range of an EXT Split Flow Pump
3.3.4 Backing connection
Use suitable vacuum tubing and connectors to connect the NW flange of the backing-port to your
backing-pump. If necessary, use flexible pipe or bellows to reduce the transmission of vibration from the
backing-pump to the EXT Split Flow Pump.
WARNING
The customer must ensure safe ducting of the backing line if oil mist or hazardous
substances are present.
WARNING
Split Flow Pumps must not be operated, or vented from a positive pressure gas supply,
with a restricted/blocked backing line.
Use suitable vacuum tubing and connectors to connect the NW25 flange of the backing-
port to your backing-pump. If necessary, use flexible pipe or bellows to reduce the
transmission of vibration from the backing-pump to the Split Flow Pump.