Instruction manual

EXT Split Flow Compound Turbomolecular Pumps

INSTALLATION

PAGE

Issue F 12 Mar 07

3.2 Typical installation

A schematic of a typical vacuum system using a Turbomolecular pump is shown in Figure 5.

Figure 5 – A typical vacuum system using a Turbomolecular pump

The accessories available for these EXT Split Flow Pumps are detailed in Section 7.4.

CAUTION

Local legislation concerning the impact of the pump on the environment must be followed when

installing the pump.

1. Vacuum system

2. High vacuum gauge

3. Alternative position for vent valve

4. TMP

5. Backing valve

6. Vacuum gauge

7. Foreline trap

8. Rotary backing pump

9. Mist filter

10. Cooling fan

11. EXDC controller

12. Vent valve

13. Control system