EXT Split Flow Compound Turbomolecular Pumps
TECHNICAL DATA
PAGE
10
Issue F 10 Mar 07
Figure 4 – Dimensions of the EXT 200/200H GCMS/LCMS (reversed body)
1. Extended vent-port adaptor 4. 8 slots 8.4 mm wide
2. Backing port 5. Main inlet
3. EXDC controller 6. Side inlet
