EXT Split Flow Compound Turbomolecular Pumps
TECHNICAL DATA
PAGE
9
Mar 07 9 Issue F
Figure 3 – Dimensions of the EXT 200/200H ICPMS Split Flow Pump system (units in mm)
1. 8 slots 8.4 mm wide 4. Vent port
2. Controller connection 5. Main inlet
3. Backing port 6. Side inlet
