EXT Split Flow Compound Turbomolecular Pumps
TECHNICAL DATA
PAGE
8
Issue F 8 Mar 07
Figure 2 – Dimensions of the EXT 200/200H GCMS Split Flow Pump system (units in mm)
1. 8 slots 8.4 mm wide 4. TAV5 vent valve
2. EXDC controller 5. Main inlet
3. Backing port 6. Side inlet
