Instruction manual

EXT Split Flow Compound Turbomolecular Pumps
TECHNICAL DATA
PAGE
7
Mar 07 7 Issue F
2.5 Materials exposed to gases pumped
The following materials and component types are exposed to the gases pumped: aluminium alloys,
stainless steels, fluoroelastomer and nitrile o-rings, hydrocarbon lubricant, felt, rare earth magnets,
silicon nitride, phenolic resin and carbon-fibre reinforced epoxy resin
Figure 1 – Dimensions of the EXT 200/200H Split Flow Pump system (units in mm)
1. TAV5 vent valve 4. Main inlet
2. 8 slots 8.4 mm wide 5. EXDC controller
3. Side inlet 6. Backing port