Instruction manual
EXT Split Flow Compound Turbomolecular Pumps
TECHNICAL DATA
PAGE
6
Issue F 6 Mar 07
Minimum backing pump
displacement
0.6 m
3
h
-1
0.6 m
3
h
-1
0.6 m
3
h
-1
0.6 m
3
h
-1
Maximum continuous inlet
pressure - water-cooling at
35
o
C
§
No water cooling on GCMS
and ICPMS.
Main inlet
2.5 x 10
-3
mbar
(2.5 x 10
-1
Pa)
2.5 x 10
-3
mbar
(2.5 x 10
-1
Pa)
Side inlet
5 x 10
-3
mbar
(5 x 10
-1
Pa)
5 x 10
-3
mbar
(5 x 10
-1
Pa)
Maximum continuous inlet
pressure - air-cooling at
35
o
C ambient
§
Air-cooling is beneficial to
the EXDC controller.
Nitrogen unless otherwise
stated.
Main inlet
3 x 10
-3
mbar
(3 x 10
-1
Pa)
3 x 10
-3
mbar
(3 x 10
-1
Pa)
5 x 10
-3
mbar
(He: 7.5 x 10
-3
mbar)
1 x 10
-2
mbar
(Ar: 5 x 10
-3
mbar)
Side inlet
9 x 10
-3
mbar
(9 x 10
-1
Pa)
9 x 10
-3
mbar
(9 x 10
-1
Pa)
1.5 x 10
-2
mbar
(He: 5 x 10
-3
mbar)
1 x 10
-2
mbar
(Ar: 5 x 10
-3
mbar)
Operating attitude
Vertical and
upright through to
horizontal ±2
o
Vertical and
upright through to
horizontal ±2
o
Vertical Vertical
Nominal rotational speed
60000 r.min
-1
60000 r.min
-1
60000 r.min
-1
60000 r.min
-1
Standby rotational speed
42000 r.min
-1
42000 r.min
-1
42000 r.min
-1
42000 r.min
-1
EXC controller only
Starting time to 90% speed
EXDC160
110 sec 110 sec 120 sec 150 sec
EXC100E
190 sec 190 sec
EXC100L
245 sec
EXC120
130 sec 130 sec
EXC300
100 sec 100 sec 120 sec
EXDC80
270 sec 330 sec
Cooling method
Forced-air/water Forced-air/water
Ambient air temperature
(forced-air cooling)
0 - 35
o
C 0 - 35
o
C0 - 35
o
C0 - 35
o
C
Water temperature
(water-cooling)
10 - 20
o
C 10 - 20
o
C
N/A N/A
Noise level (at 1 metre)
< 50 dB(A) < 50 dB(A) < 50 dB(A) < 50 dB(A)
Recommended controller
EXDC160 EXDC160 EXDC160 EXDC160
EXDC160 maximum VA
input
250 VA 250 VA 250 VA 250 VA
Quiescent power
25 W 25 W 40 W 40 W
Recommended backing
pump
†
RV3 RV3 RV3 RV3
*
The data shown for EXT200/200H GCMS applies to pumps: B75640991, B75641991, B75642991, B75643991 and B75644991. This is
because these pumps have the same internal components and the data is taken without inlet screens fitted.
‡
Pumping speeds are without inlet-screen or inlet-strainer (EXT200/200Hi, GCMS and ICPMS).
Inlet-screens and inlet-strainers reduce speed by approximately 10%.
#
Pb = backing pressure,
P
i
= Inlet pressure,
+
Inlet pressure has risen to 10
-3
mbar.
§
Above this pressure, rotational speed drops below nominal.
†
A larger backing pump may be required for maximum throughput.
Ø
Mass applies to products listed under the Declaration of Incorporation.
Parameter
EXT70/200H EXT200/200H
and Hi
EXT200/200H
GCMS*
EXT 200/200H
ICPMS
Notes
Table 4 - Technical data (Continued)