Instruction manual

EXT Split Flow Compound Turbomolecular Pumps
TECHNICAL DATA
PAGE
5
Mar 07 5 Issue F
Parameter
EXT70/200H EXT200/200H
and Hi
EXT200/200H
GCMS*
EXT 200/200H
ICPMS
Notes
Mass
9 kg
9 kg (7.5 kg
Ø
)
9 kg 9 kg
mass without controller
Side inlet-flange
DN100ISO DN100ISO DN100ISO DN100ISO
controller
Main inlet-flange
DN63ISO DN100ISO DN100ISO DN100ISO
Outlet-flange
DN25NW DN25NW DN25NW DN25NW
Vent-p o r t
1/8 inch BSP 1/8 inch BSP 1/8 inch BSP 1/8 inch BSP
Interstage-port (optional)
DN25NW DN25NW DN25NW DN25NW
Main inlet pumping speed
N
2
#‡
110 ls
-1
177 ls
-1
155 ls
-1
107 ls
-1
Pb < 5 mbar (500 Pa)
He
#‡
145 ls
-1
190 ls
-1
185 ls
-1
113 ls
-1
Pb < 1 mbar (100 Pa)
H
2
#‡
130 ls
-1
163 ls
-1
175 ls
-1
102 ls
-1
Pb < 0.5 mbar (50 Pa)
Ar
#‡
--
153 ls
-1
104 ls
-1
Pb < 0.2 mbar (20 Pa)
Side inlet pumping speed
N
2
#‡
155 ls
-1
155 ls
-1
155 ls
-1
155 ls
-1
Pb < 5 mbar (500 Pa)
He
#‡
131 ls
-1
131 ls
-1
179 ls
-1
187 ls
-1
Pb < 1 mbar (100 Pa)
H
2
#‡
79 ls
-1
79 ls
-1
131 ls
-1
143 ls
-1
Pb < 0.5 mbar (50 Pa)
Ar
#‡
--
127 ls
-1
148 ls
-
Interstage pumping speed
‡
N
2
#
-
8.75 ls
-1
N/A N/A
Pb = 5 mbar (500 Pa)
He
#
-
10.4 ls
-1
N/A N/A
Pb = 5 mbar (500 Pa)
P
i
= 5 x 10
-1
mbar (50 Pa)
Compression ratio from
the backing port to the
main inlet
* This is a measured value.
Theoretical value >10
9
and
>10
11
respectively for GCMS
and ICPMS.
** Theoretical values 2 x 10
9
and 7 x 10
11
respectively.
N
2
>5 x 10
7
>5 x 10
7
>5 x 10
7*
>5 x 10
7*
He
1 x 10
6
1 x 10
6
1 x 10
7
2.5 x 10
7
H
2
3.5 x 10
4
3.5 x 10
4
-
5 x 10
5
Ar
--
>5 x 10
7**
>5 x 10
7**
Compression ratio from
the side inlet to the main
inlet
N
2
6 x 10
3
6 x 10
3
1 x 10
4
9 x 10
3
He
6 x 10
2
6 x 10
2
1.5 x 10
2
2.5 x 10
3
H
2
2 x 10
1
2 x 10
1
3.3 x 10
1
6 x 10
1
Ar
--
1.7 x 10
4
7 x 10
3
Maximum backing
pressure
+
N
2
12.6 mbar (1260
Pa)
12.6 mbar (1260
Pa)
7.3 mbar (730 Pa) -
He
7.7 mbar (770 Pa) 7.7 mbar (770 Pa) - -
H
2
2 mbar (200 Pa) 2 mbar (200 Pa) - -
Ar
---8 mbar (800 Pa)
Table 4 - Technical data