Instruction manual

STP-200/300/400 Series Instruction Manual
Table 6.4 Safety Functions (2/2)
Abnormality
/Error
Operation state of safety
functions
Lamp indication REMOTE
output signal
State of the STP pump Probable causes of an
abnormality/error
Temperature of the STP
pump motor: 90°C or more
"OVER
TEMPERATURE"
"OVER
TEMPERA-
TURE"
Decelerates down to
40,000 rpm.
Overheating
inside the
STP pump
Temperature of the STP
pump motor: 100°C or more
"OVER
TEMPERATURE"
"FAILURE"
"OVER
TEMPERA-
TURE"
"FAILURE"
The STP pump stops.
Abnormal baking temperature.
Insufficient cooling.
Leakage of vacuum equipment or
piping.
Continuous repetition of start/stop.
Extraordinarily-high temperature.
Overheating
inside the
STP control
unit
75°C or more in the STP
control unit and heat sink.
"FAILURE" "FAILURE" The STP pump stops. Failure in the cooling fan.
Shielding of cooling air inlet and
ventilation port.
Extraordinarily-high temperature
Overspeed Rotational speed of the STP
pump: 52,500 rpm or more.
"FAILURE" "FAILURE" The STP pump stops. Failure in the inverter.
Abnormal
battery
terminal
voltage
Battery terminal voltage:
21 V or less
"FAILURE" "FAILURE" The STP pump does not start. Incorrect connection of the battery.
Deterioration in the battery.
6-9