Instruction manual

STP-200/300/400 Series Instruction Manual
5.5.3 Stopping the STP Pump
1) Press the "MOTOR STOP" switch on the front panel to stop the STP pump.
The STP pump starts to decelerate and stops.
The "NORMAL OPERATION" lamp or the "ACCELERATION" lamp goes out
(BRAKE state).
2) The number of rotations goes down to approx. 3,000 rpm or less in approx.
15 minutes. This decrease in rpm is indicated by the ROTATION meter on
the front panel showing a full-scale deflection to the red.
Make sure the STP pump stops thoroughly by confirming that the
ROTATION meter on the front panel deflects to full-scale in the red.
When the pressure inside the STP pump is 1.3×10
-5
Pa [10
-7
Torr] or
less, the stopping time is 15 minutes or more.
The STP pump can be stopped faster by introducing a gas (such as
dry N
2
gas) into the STP pump. Introduce a gas so that the pressure
inside the STP pump increases to 5.3×10
2
to 6.7×10
2
Pa [4 to 5 Torr]
in 10 seconds after gas introduction.
Note that a sharp increase in the pressure may cause the STP pump
to operate abnormally.
5.5.4 Starting the STP Pump after Stopping
Press the "MOTOR START" switch on the front panel to reaccelerate the STP
pump.
The STP pump can be reaccelerated even while it is stopping.
5-4