Instruction manual

STP-200/300/400 Series Instruction Manual
3.2 Precautions Before Installation
3.2.1 Operating Environment
◇ Chlorine or fluorine system gases can be used in chemical specific
pumps (type C). When you use gases including alkaline metals, but
excluding Li, gases including Ga, Hg, Sn, or HBr, contact BOC
Edwards.
◇ NEVER use corrosive gases (chlorine, fluorine, or other system
gases) in the STP-200/STP-300/STP-400 pump or other models
without anti-corrosion treatment (See Section 1.1, "Usable Gases").
Install the STP pump in a place meeting the following requirements:
Ambient Temperature 0 to 40 °C
Ambient Relative Humidity 30 to 95 % (no dew condensing)
Environment
• A place free of externally-applied mechanical
shock.
• A place free of a heat source
(Keep clear of the heat source or attach a
thermal shield plate).
• A place free of a strong magnetic field
(Range: up to 150 gauss (15 mT) in the axial
direction, and up to 30 gauss (3 mT) in the
radial direction with respect to the rotational
axis of the STP pump).
• A place free of a strong electric field.
• A place free of exposure to radiation.
• No discharge of high voltage (more than 500 V)
(If more than 500 V is discharged, contact BOC
Edwards).
STP Pump Installation
Equipment Conditions
• Install the STP pump securely so that foreign
materials will easily fall into the STP pump
(Ex.: Si wafers or samples are positioned above
the STP pump)(To prevent foreign materials
from falling into the STP pump, design a shield
plate with large conductance).
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