Instruction manual

STP-200/300/400 Series Instruction Manual
15.4 Abnormalities While the STP Pump Is Rotating
(When any "Abnormality/Error Warning" lamp lights, see Section 15.5, "When
any Abnormality/Error Warning Lamp Lights.")
Table 15.3 Troubleshooting While the STP Pump Is Rotating (1/2)
No.
Symptom Probable Causes Countermeasures
Referred
Section
Insufficient pressure at
the inlet port.
Use at 1.3
×
10
-2
Pa
(1
×
10
-4
Torr) or less.
3.3.4
16.1
Insufficient pressure at
the outlet port.
Use at 13 Pa (0.1 Torr) or
less.
3.3.4
16.1
Leakage of the
piping system.
Check piping. 3.3.4
1 The "NORMAL
OPERATION" lamp
does not light approx.
30 minutes after
performing start
operation.
Failure in the backing
pump.
Check capacity and starting
state (Use a pump of
160 L/min or more for
STP-200 or 240 L/min or
more for STP-300/400.)
3.3
16.1
Baking temperature
overheat.
Set the temperature to
120°C or less.
7.
１
Insufficient cooling. Always cool during baking
or gas suction.
7.2
Power failure. Check if power has failed. 6.1.1
Over vibration
(vibration 100 µm O-P
or more).
After the STP pump stops
thoroughly, power OFF and
remove external vibration
so as not to transmit it to
the STP pump.
6.1.3
Overheating inside the
STP control unit
Remove heat source or
shield for air route
12.2
1) Ambient
temperature
1) Keep ambient
temperature 40°C or less.
4.2.1
2) Remove obstacles at the
ventilation port.
4.2.2
2) Insufficient cooling
of the STP control unit.
If the air cooling fan is
broken, contact Service
office.
12.2
Improper pressure of
the inlet port.
Use at 1.3
×
10
-2
Pa
(1
×
10
-4
Torr) or less.
3.3.4
16.1
2 The STP pump stops.
Improper pressure
of the outlet port.
Use at 13 Pa (0.1 Torr) or
less.
3.3.4
16.1
15-3