MT-17E-003-D STP-H600/H1000 Series Turbomolecular Pump INSTRUCTION MANUAL (Third Edition-d) Read through the Safety Precautions of this Manual carefully before using the STP pump. Keep this Manual in a place where you can quickly access it at any time. Seiko Instruments Inc. Dec. 2001 Copyright 2001 Seiko Instruments Inc. All rights reserved. Printed in Japan.
STP-H600/H1000 Series Instruction Manual SAFETY PRECAUTIONS The Safety Precautions in this Manual constitute guidelines to protect operators, the STP pump and its peripheral equipment. To avoid personal injury and prevent product and/or peripheral equipment damage, observe the Safety Precautions as well as the general safety rules (your country’s laws, regulations, safety standards and so on).
STP-H600/H1000 Series Instruction Manual WARNING ◇ Check the properties of the gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier. Follow any and all safety precautions and/or recommendations instructed by the gas supplier. Take appropriate measures specified in the MSDS to prevent a problem if you use any corrosive, reactive, flammable or other system gas. Dilute the pumped gas with a monitored inert gas if necessary.
STP-H600/H1000 Series Instruction Manual CAUTION ◇ NEVER use any gas that is not specified as usable in this Manual. The use of such gas may corrode the STP pump and damage it. ◇ A hazardous live voltage may exist at connector/terminal that marked . DO NOT touch the terminal. Doing so may result in electric shock. When operating connection/disconnection to terminal, always power OFF the STP pump (Switch the breaker “OFF”).
STP-H600/H1000 Series Instruction Manual CAUTION ◇ DO NOT put foreign objects into the STP pump. Doing so may result in product damage. ◇ NEVER turn OFF the primary power (DO NOT switch the breaker “OFF”) while the STP pump is rotating. Doing so may result in product damage. ◇ Perform investigations into probable causes and remove them before restarting the STP pump in the event of occurrence of a problem. The use of the abnormal STP pump may result in product damage.
STP-H600/H1000 Series Instruction Manual INTRODUCTION Thank you very much for purchasing Seiko Instruments’s turbomolecular pump. The turbomolecular pump is designed to be installed in the vacuum equipment in to exhaust gases from it.
STP-H600/H1000 Series Instruction Manual PRECAUTIONS 1) 2) No part of this manual may be reproduced in any form by any means without prior written permission from Seiko Instruments. Seiko Instruments pursues a policy of continuing improvement in design and performance of this product. The right is, therefore, reserved to vary specifications and design without notice. Understand that the product you purchased and its contents including specifications described in this manual may differ.
STP-H600/H1000 Series Instruction Manual LIMITED WARRANTY This WARRANTY applies to the customer to whom Seiko Instruments has delivered this product. 1. WARRANTY PERIOD: Seiko Instruments warrants this product against defects for a period of two (2) years from the date of delivery or during the period specified in the agreement made by and between the customer and Seiko Instruments. 2. ITEM WARRANTED: 1) This warranty applies only to the product delivered from Seiko Instruments to the customer.
STP-H600/H1000 Series Instruction Manual indication (“WARNING” message) on the LCD display; 16) Overhaul and replacement of maintenance parts; 4.
STP-H600/H1000 Series Instruction Manual TABLE OF CONTENTS SAFETY PRECAUTION INTRODUCTION LIMITED WARRANTY 1 Precautions for Safe Operation of the STP Pump ..................................... 1-1 1.1 1.2 1.3 1.4 Usable Gases............................................................................................................ 1-1 Maintenance Precautions.......................................................................................... 1-1 Inspection Precautions...............................
STP-H600/H1000 Series Instruction Manual 5.6 5.5.4 Starting the STP Pump after Stopping ......................................................... 5-3 5.5.5 Powering OFF .............................................................................................. 5-4 Remote Operation..................................................................................................... 5-5 5.6.1 Powering ON................................................................................................ 5-5 5.
STP-H600/H1000 Series Instruction Manual 12 Maintenance and Inspection .................................................................... 12-1 12.1 12.2 12.3 12.4 12.5 12.6 Replacing the Internal Battery ................................................................................. 12-1 Inspecting the Air Cooling Fan ................................................................................ 12-1 Replacing the Fuses ................................................................................
STP-H600/H1000 Series Instruction Manual TABLES Table 3.1 Table 3.2 Table 3.3 Table 4.1 Table 5.1 Table 6.1 Table 6.2 Table 6.3 Table 7.1 Table 8.1 Table 8.2 Table 8.3 Table 8.4 Table 8.5 Table 8.6 Table 10.1 Table 15.1 Table 15.2 Table 15.3 Table 15.4 Table 15.5 Table 16.1 Table 16.2 Table 16.3 Table 16.4 Tightening torque of bolt ....................................................................................... 3-8 Maximum Torque predicted and Recommended securing bolt for inlet port flange .......
STP-H600/H1000 Series Instruction Manual FIGURES Figure 2.1 Figure 3.1 Figure 3.2 Figure 3.3 Figure 3.4 Figure 3.5 Figure 3.6 Figure 3.7 Figure 3.8 Figure 4.1 Figure 4.2 Figure 4.3 Figure 4.4 Figure 4.5 Figure 4.6 Figure 4.7 Figure 4.8 Figure 8.1 Figure 8.2 Figure 8.3 Figure 8.4 Figure 8.5 Figure 8.6 Figure 9.1 Figure 9.2 Figure 9.1 Figure 11.1 Figure 16.1 Figure 16.2 Figure 16.3 Figure 16.4 Figure 16.4 Example of Lifting the STP Pump........................................................................
STP-H600/H1000 Series Instruction Manual 1 Precautions for Safe Operation of the STP Pump 1.1 Usable Gases Chlorine or fluorine system gases can be used in chemical specific pumps (STPH600C/H1000C or other models). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Seiko Seiki. WARNING ◇ Check the properties of the gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.
STP-H600/H1000 Series Instruction Manual 1.3 Inspection Precautions Perform inspections of the STP pump and the STP control unit (check of the air cooling fan and reset of the "BATTERY NG" lamp), following Section 12, "Maintenance and Inspection" When performing inspections (check of the air cooling fan and reset of the "BATTERY NG" lamp), always turn OFF the primary power (switch the breaker "OFF") before opening the front panel, then turn ON the primary power again (switch the breaker "ON").
STP-H600/H1000 Series Instruction Manual (3) Heavy Product Caution Label This label is affixed to the product with a mass of 20 kg or more. Follow the precautions of Section 2, "Unpacking" so as not to cause any accident during handling. (4) STP Pump Installation Warning Label This label describes installation of the STP pump. Install the STP pump according to the precautions of Section 3, "Installation of the STP Pump. " (5) Emergency Vent. Valve Caution Label This label describes the emergency vent.
STP-H600/H1000 Series Instruction Manual (6) Connector Caution Label ◇ This label describes lock of the connector. ◇ This label instructs operators to prevent the connectors from being disconnected while the STP pump is in operation. (7) STP Control Unit Safety Instruction Label This label describes instructions before operating the STP control unit. (8) High Voltage Device Caution Label The STP control unit is equipped with a high voltage device. pay attention to the high voltage device.
STP-H600/H1000 Series Instruction Manual (9) Battery Instruction Label This label instructs operators to replace batteries once a year. The next replacement date of batteries is specified upon delivery of the STP pump. Record the next replacement date (after one year) of batteries in the blank of the label when replacing them. This label describes precautions for use of external batteries. (10) Rotational Direction Instruction Label This label describes the rotational direction of the STP pump.
STP-H600/H1000 Series Instruction Manual (12) Hot Surface Warning Label This label instructs operators so as not to touch the hot surface of the STP pump. The use of the baking heater (optional accessory) may lead to a considerable rise in temperatures outside the STP pump. This label warns operators so as not to burn hands. (only when using the baking heater.) (13) Tuning Caution Label This label describes precautions for performing the tuning.
STP-H600/H1000 Series Instruction Manual 2 Unpacking 2.1 Unpacking the STP Pump Check the following before unpacking the STP pump. 1) Check the package for bruises, breakage, wetness, etc. If there is any abnormality/error or it is judged necessary to return the product, contact Seiko Seiki. 2) Check the contents of the package. See Section 16.3, "Accessories." CAUTION ◇ The mass of the STP pump is approx. 30 kg. Use a crane or other appropriate means to lift the STP pump.
STP-H600/H1000 Series Instruction Manual 2.2 Unpacking the STP Control Unit Check the following before unpacking the STP control unit. 1) Check the package for bruises, breakage, wetness, etc. If there is any abnormality/error or it is judged necessary to return the product, contact Seiko Seiki. 2) Check the contents of the package. See Section 16.3, "Accessories." CAUTION ◇ The mass of the STP control unit is approx. 40 kg. Use a crane or appropriate means to lift the STP control unit.
STP-H600/H1000 Series Instruction Manual 3 Installation of the STP pump 3.1 Name and Function of Each Part (1) Inlet Port Flange (ICF*1 , VG*2 , ASA, ISO, etc.) l Connected to the vacuum equipment (at the high vacuum side). CAUTION ◇ A splinter shield is attached to the inlet port flange to prevent foreign particles from falling into the STP pump. NEVER remove it. (2) Outlet Port Flange (KF*2 40) l Connected to the inlet port side of the auxiliary pump.
STP-H600/H1000 Series Instruction Manual (1) Inlet Port Flange (9) Temperature Sensor Connector Optional Accessory (2) Outlet Port Flange (6) Cooling Water Port ( 6) Cooling Water Port (3) STP Connector (4) Motor Connector (8) Ground Terminal (7) Emergency Vent . Valve (5) Purge Port Figure 3.
STP-H600/H1000 Series Instruction Manual 3.2 Precautions Before Installation 3.2.1 Operating Environment CAUTION ◇ Chlorine or fluorine system gases can be used in chemical specific pumps (type C). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, Sn, or HBr, contact Seiko Instruments. ◇ NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the STP-H600/STP-H1000 pump or other models without anti-corrosion treatment (see Section 1.
STP-H600/H1000 Series Instruction Manual 3.2.2 Installation Area Leave enough space for the following in addition to that for the STP pump: · Space for maintenance and inspection · Space for connecting cables ◇ The minimum bending radius of the STP connection cable is 150 mm (see Figure 16.1, "External Appearance of the STP Pump" [bending dimensions of the STP connection cable]). DO NOT excessively bend the cables and beware of any obstacles when installing the STP pump.
STP-H600/H1000 Series Instruction Manual 3.3 How to Install the STP Pump Install the STP pump to the vacuum equipment as shown in Figure 3.2. The STP pump can be installed through the damper (optional accessory). Vacuum Equipment Inlet Port Inlet Port Flange Vacuum Valve Front Panel To Power Supply Power Cable Emergency Vent.Valve STP Pump Dry Pump,etc. Auxiliary Pump Emergency Vent.
STP-H600/H1000 Series Instruction Manual NOTICE ◇ The STP pump cannot be used with the outlet port open to atmospheric air. Always use the auxiliary pump (dry pump or similar one). ◇ Use an auxiliary pump with a pumping speed of 240 L/min or more. ◇ Depending upon the type of the auxiliary pump used, oil vapor may contaminate the inside of the STP pump. Some oil viscosity could cause a malfunction when there is a strong reverse flow of oil.
STP-H600/H1000 Series Instruction Manual 3.3.2 STP Pump Installation Positions The STP pump can be installed vertically, horizontally, upside-down and slanted. Upside-down Horizontal STP Pump Slanted Vertical Figure 3.3 STP Pump Installation Positions When installing the STP pump in a horizontal or slanted position, it is recommended to install it so that the direction of the outlet port is on a vertical or horizontal plane in the direction of the gravity.
STP-H600/H1000 Series Instruction Manual 3.3.3 How to Secure the STP Pump ◇ The STP pump is provided with a high-speed rotor. The worst-case failure may result in a jump in rotational torque leading to personal injury or peripheral equipment damage. The method of securing the STP pump will depend on the installation requirements. Secure the STP pump to the vacuum equipment as follows: ◇ Design and secure the mounting for the STP pump so that it can withstand the maximum rotational torque.
STP-H600/H1000 Series Instruction Manual 1) When securing the inlet port with bolts Refer to Table 3.2 for torque in pump abnormality and recommended securing bolts. Secure the inlet port flange with all of the boltholes of the size specified in the Inlet Port Flange Standard. Secure the base with all 8 screw-holes for legs or all 8 attached legs. Follow “CAUTION” on page 3-8 about legs and bolts for securing the base.
STP-H600/H1000 Series Instruction Manual 2) When securing the inlet port flange with claw clamps Refer to Table 3.2 for rotational torque. When securing the inlet port flange with only the claw clamp, the vacuum equipment cannot withstand the maximum rotational torque generated by the worst-case failure. To make the vacuum equipment withstand abnormal torque, secure the base with all 8 screw-holes for legs or all 8 attached legs. Follow “CAUTION” on page 3-8 about legs and bolts for securing the base.
STP-H600/H1000 Series Instruction Manual 3) When installing the damper in the inlet port flange Refer to Table 3.2 for rotational torque. In case of using a damper, secure the base with all 8 screw-holes for legs or all 8 attached legs. Follow “CAUTION” on page 3-8 about legs and bolts for securing the base. When the base cannot be secured because of the equipment design, install the pump with a torque restraint like the one shown in Figure 3.7 (b). ◇ Use a damper only at the vertically upright position.
STP-H600/H1000 Series Instruction Manual 3.3.4 Vacuum Piping ◇ DO NOT open the STP pump through the flange to atmospheric air while the STP pump is running. If atmospheric air flows into the STP pump, it may not function normally. ◇ Depending upon the type of the auxiliary pump used, atmospheric air may reverse flow into the STP pump when the auxiliary pump stops.
STP-H600/H1000 Series Instruction Manual (1) Piping at the Inlet Port Flange Attach the inlet port to the high vacuum side. Maximum working pressure (Pressure at the inlet port flange applicable continuously) l 67 Pa [0.5 Torr] (for water cooled) l 5.3 Pa [4×10-2 Torr] (for air cooled) l 0.9 Pa [7×10-3 Torr] (for natural air cooled) l 13 Pa [0.1 Torr] (when TMS unit is used) (2) Piping at the Outlet Port Flange Attach the outlet port to the inlet port flange of the auxiliary pump (primary side pump).
STP-H600/H1000 Series Instruction Manual 3.3.5 Connecting the Emergency Vent. Valve The emergency vent. valve stops the STP pump by introducing gases if any abnormality/error occurs in the STP pump. Connect the emergency vent. valve (contained in the attached accessories) to the purge port as shown in Figure 3.7. Note that the side of the emergency vent. valve without filter is connected to the purge port. Connect the cable for the emergency vent.
STP-H600/H1000 Series Instruction Manual Dry N2 Gas or Other Filter Side Emergency Vent. Valve KF10 Dry N2 Gas or Other Purge Port Figure 3.8 Connecting the Purge Port and Emergency Vent. Valve 3.3.7 Connecting the Ground Cable Connect the ground cable (yellow/green) between the ground terminal of the STP pump and the ground terminal of the STP control unit. When the resistance between the ground terminals is lower than 0.
STP-H600/H1000 Series Instruction Manual 4 Installation of the STP Control Unit 4.1 Name and Function of Each Part 4.1.1 Front Panel (1) "POWER ON/OFF" Switch (illuminated alternate push button switch, green LED) l Press this switch to power ON/OFF the STP pump (MANUAL operation only). l The POWER ON/OFF built-in lamp lights when the power is ON. (2) "MOTOR START" Switch (momentary push button switch, black) l Press this switch with power ON to rotate and accelerate the STP pump (MANUAL operation only).
STP-H600/H1000 Series Instruction Manual (8) "OVER TEMPERATURE" Lamp (red LED) l Lights when any of the following abnormalities occurs: a) When the motor or electromagnet overheats (110 ℃ or higher). b) When the STP connection cable is not connected. (9) "BATTERY OPERATION" Lamp (red LED) l Lights while the power is being supplied from the battery to the STP pump during a power failure.
STP-H600/H1000 Series Instruction Manual (5) (6) (12) (7) (8) (9) (10) (11) (1) (2) (4) (3) Figure 4.
STP-H600/H1000 Series Instruction Manual 4.1.2 Rear Panel CAUTION ◇ A hazardous live voltage may exist at connector/terminal that marked . DO NOT touch the terminal. Doing so may result in electric shock. When operating connection/disconnection to terminal, always power OFF the STP pump (Switch the breaker "OFF"). (13) AC POWER Terminal Block (TB1) A maximum voltage : Equal to the input voltage of this terminal block. (MAX 240VAC) l For primary power input.
STP-H600/H1000 Series Instruction Manual (22) START/STOP TB6 Terminal Block A maximum voltage : Equal to the input voltage of this terminal block. (MAX 250VAC) l For remote control. For details concerning remote control terminal blocks (19) to (22), see Section 8, "Remote Input/Output Signal Terminal Blocks." (23) "MANUAL/REMOTE" Changeover Switch l When setting to MANUAL, only start, stop or other operations can be performed with the switches on the STP control front panel.
STP-H600/H1000 Series Instruction Manual 4.1.3 Inside of the STP Control Unit (25) Inverter l This is a three-phase transistor-inverter which starts/stops the STP pump. (26) Fuses 3 to 9, 11, and 12 l These fuses protect as follows: F3 and 4: 250 V, 5 A (for control power protection) F5 to 7 : 250 V, 10 A, arc-extinguishing fuses (for I/O TB2 terminal block power optional drive protection) F8 and 9: 250 V, 10 A, arc-extinguishing fuses (for internal and external batteries protection) F11 and 12: 250 V, 0.
STP-H600/H1000 Series Instruction Manual (25) (30) (26) (27) (28) (29) (30) (32) (31) Figure 4.
STP-H600/H1000 Series Instruction Manual 4.2 Precautions Before Installation 4.2.1 Operating Environment Install the STP control unit in a place meeting the following requirements: Ambient Temperature 0 ℃ to 40 ℃ Ambient Relative 30 to 95% (no dew condensing) Humidity Environment l A place free of exposure to direct sunlight. l A place free of high humidity. l A place free of dust. l A place free of salty air. l A place free of dripping water. l A place free of explosive or inflammable gas.
STP-H600/H1000 Series Instruction Manual 4.2.2 Installation Area Leave enough space for the following in addition to that for the STP control unit. · · · Space for maintenance and inspection Space for inlet and outlet of air for cooling - Top and side: 5 cm or more - Bottom: 2.4 cm or more (height of the rubber foot) Space for connecting the cables - Rear: 15 cm or more CAUTION ◇ The minimum bending radius of the STP connection cable is150 mm (see Rack Wall Side 5 cm or more Figure 16.
STP-H600/H1000 Series Instruction Manual 4.3 Attaching the STP Control Unit Front Panel to a Rack The dimensions of the STP control unit front panel conform to JIS. Therefore, this panel can be attached to any type of commercially-available racks. Attach the front panel unit to the rack according to the following steps: 1) When attaching the front panel to a rack: l Attach the front panel to a rack using the screw holes for the front panel.
STP-H600/H1000 Series Instruction Manual 4.4 Cable Connection 4.4.1 Name and Dimensions of Each Cable STP Control Unit Side Ground Terminal ( STP Pump Side ) Ground Terminal ( *1 Ground Cable Crimp-Type Terminal Lug (M4 ) Yellow / Green Wire L≦20m : 4mm2 L＞20m : 10mm2 ) *1 Crimp-Type Terminal Lug (M4 ) φ4.3(L≦20m) φ6.5(L＞20m) Unit: mm 45 Pin (pin) 41 Pin (socket) φ 40 STP-H600/H1000 Series 76.5 φ17 STP Connection Cable 24.
STP-H600/H1000 Series Instruction Manual Power Side STP Control Unit Side *1 9.8 Power Cable Crimp-Type Terminal Lug (M4 ) 2.5mm2×3core (brown, blue, yellow/green) (a) without the Power Plug Power Side STP Control Unit Side Plug type *1 Crimp-Type Terminal Lug (M4 ) 72.3 NEMA L6-30 Y(N[L2]) blue φ 54 9.8 Power Cable 3pin (pin) 2.5mm2×3core (brown, blue, yellow/green) G(GND[ ]) yellow/green (b) with the Power Plug*2 Figure 4.
STP-H600/H1000 Series Instruction Manual 4.4.2 How to Connect the Cables CAUTION ◇ When connecting/disconnecting cables, always power OFF the STP pump (switch the breaker "OFF"). Failure to do so may result in electric shock or product damage. ◇ With each connector, align the position of the guide key and insert the pin vertically so as not to bend it. If the pin is bent, not only may the connector not function normally, but may the pin make contact, resulting in a malfunction.
STP-H600/H1000 Series Instruction Manual 2) Connecting the STP Connection Cable Connect the socket side of the STP connection cable to the STP connector of the STP pump and connect the pin side to "P.CONNECTOR CON5A" of the STP control unit. CAUTION ◇ Always use the STP pump, STP control unit and the STP connection cables of the same model name, serial number and cable length. Failure to do so may result in product damage.
STP-H600/H1000 Series Instruction Manual 5) Connecting Primary Power (Primary Side) Cable Connect power cable to the "AC POWER TB1" on the STP control unit rear panel as shown in Table 4.1. Table 4.1 Connecting Primary Power Cable TB1 Pin No. Cable Color Remarks 1 [L(L1)] Brown Single phase 200 to 240 V AC ±10% 13A (maximum) 2 [N(L2)] Blue Both 50/60 Hz Yellow/Green Ground 3 [PE( )] Secure primary power cable to the STP control unit rear panel using the cable fitting tool (see Figure 4.7).
STP-H600/H1000 Series Instruction Manual Magnified TB1 TB1 Cover Ground Cable for Cover Cable Fitting Tool Primary Power Cable part: Secure using attached screws Figure 4.
STP-H600/H1000 Series Instruction Manual 5 How to Start/Stop the STP Pump CAUTION ◇ NEVER connect or disconnect any cables while the power is ON. ◇ NEVER turn the primary power OFF (switch the breaker "OFF") while the STP pump is in rotation. ◇ DO NOT release the inlet port flange or outlet port flange into the atmosphere while the STP pump is in rotation. 5.
STP-H600/H1000 Series Instruction Manual 5.3 Start Procedures Start the auxiliary pump before or simultaneously with start of the STP pump. Open the vacuum valve located at the outlet port flange side after starting the auxiliary pump. NOTICE ◇ DO NOT open the vacuum valve without operating the auxiliary pump. Doing so may cause a reverse flow of oil, which could contaminate the inside of the STP pump. 5.
STP-H600/H1000 Series Instruction Manual There are two methods of operating the STP pump: MANUAL and REMOTE. Select one which fits your vacuum equipment. 5.5 Manual Operation Slide the "MANUAL/REMOTE" changeover switch on the rear panel to "MANUAL." 5.5.1 Powering ON 1) 2) Switch ON the breaker on the rear panel (to prevent incorrect operation, a metal fitting is attached to the breaker. Loosen the screw, lift the metal fitting and secure it).
STP-H600/H1000 Series Instruction Manual 5.5.5 Powering OFF 1) When all of the "ACCELERATION," "NORMAL OPERATION" and "BRAKE" lamps are off: Press the "POWER ON/OFF" switch. The switch pops up into the unlocked position, the magnetic bearing stops, and the rotor lands (POWER OFF state). The "POWER ON/OFF" switch built-in lamp goes out. 2) When one of the "ACCELERATION," "NORMAL OPERATION" and "BRAKE" lamps is lit: i. Even when the "POWER ON/OFF" switch is OFF, the rotor will not land.
STP-H600/H1000 Series Instruction Manual 5.6 Remote Operation Slide the "MANUAL/REMOTE" changeover switch on the STP control unit rear panel to "REMOTE." 5.6.1 Powering ON Switch ON the breaker on the STP control unit rear panel, (to prevent incorrect operation, a metal fitting is attached to the breaker. Loosen the screw, lift the metal fitting and secure it ). The magnetic bearing functions and the rotor levitates (POWER ON state). The "POWER ON/OFF" switch built-in lamp lights. 5.6.
STP-H600/H1000 Series Instruction Manual 5.6.4 Powering OFF When all three ("ACCELERATION", "NORMAL OPERATION" and "BRAKE") lamps are off, switch the breaker OFF on the rear panel. The magnetic bearing stops, and the rotor lands. The POWER ON/OFF switch built-in lamp goes out. CAUTION ◇ NEVER switch OFF the breaker on the rear panel while any of the "ACCELERATION," "NORMAL OPERATION" and "BRAKE" lamps is being lit.
STP-H600/H1000 Series Instruction Manual 6 Safety Functions When an Abnormality/Error Occurs The STP pump is provided with safety functions for various abnormalities/errors (See Tables 6.3 and 6.4, "Safety Functions"). For troubleshooting, see Section 6.2, "Restarting After Any Safely Function Operates" and Section 15, "Troubleshooting." 6.1 Safety Functions 6.1.
STP-H600/H1000 Series Instruction Manual 1) MANUAL Operation The STP pump continues decelerating even after a power recovery. Press the "START" switch to reaccelerate the STP pump. 2) REMOTE Operation · When the START signal is input to the REMOTE input terminal at a power recovery to reaccelerate the STP pump. · When the START signal is not input to the REMOTE input terminal after the power recovery, the STP pump continues the BRAKE operation.
STP-H600/H1000 Series Instruction Manual 6.1.2 Abnormal State of Magnetic Bearing When the magnetic bearing does not function normally due to a breakage of the STP connection cable, disconnection of connectors or any abnormality/error of the STP control circuit, the rotor falls on the touch down bearing. Simultaneously, the emergency vent. valve is opened to introduce gases and the STP pump stops, and the "EMERGENCY OPERATION" lamp lights.
STP-H600/H1000 Series Instruction Manual 6.1.8 Abnormal Battery Voltage When battery capacity became less than operating limit value or there was connection mistake, there may be the thing that battery abnormality is detected. When battery abnormality was detected, the STP pump does not operate even if the STP pump START operation is performed. The "FAILURE" lamp lights (Both the "EMERGENCY OPERATION" lamp and the "BATTERY NG" lamp inside the STP control unit front panel may light).
STP-H600/H1000 Series Instruction Manual 6.2 Restarting after Any Safety Function Operates 1) In case of a power failure: Establish a sequence so that power can be supplied to the STP control unit immediately after a power recovery. 2) In case the "FAILURE" lamp lights due to an overload of the inverter (the STP pump continues rotating by inertia: [FREE RUN state]): (1) Press the "MOTOR STOP" switch. The "FAILURE" lamp goes out and the FREE RUN state is reset.
STP-H600/H1000 Series Instruction Manual 3) Other Cases After the STP pump stops thoroughly, power OFF, switch the breaker "OFF" and remove the cause of the abnormality/error. Then, restart the STP pump and check if it operates correctly. NOTICE ◇ For probable causes and troubleshooting, See Section 15, "Troubleshooting.
STP-H600/H1000 Series Instruction Manual 6.3 Operation of the Emergency Vent. Valve The emergency vent. valve is opened immediately after an abnormality/error in the magnetic bearing, excessive vibration or any other abnormality/error is found. Gases (dry N2 gases or other) are introduced through the emergency vent. valve into the STP pump. Attach the emergency vent.
STP-H600/H1000 Series Instruction Manual Table 6.3 Safety Functions Abnormality /Error Operation state of safety functions Power failure Failure time: 2 seconds or more (for details, refer to Section 6.1.1, "Power Failure"). Lamp indication REMOTE output signal [E.V. used herein is the abbreviation for Emergency Vent.] Probable causes of an State of the STP pump abnormality/error "BATTERY OPERATION" "EMERGENCY OPERATION" "ALARM" "E.V. valve OPEN signal" Power failure.
STP-H600/H1000 Series Instruction Manual Abnormality /Error Operation state of safety functions Lamp indication REMOTE output signal State of the STP pump Probable causes of an abnormality/error Overheating inside the STP pump Temperature of the STP pump motor: 110 ℃ or more "ALARM" "OVER TEMPERATURE" "FAILURE" The STP pump stops. Abnormal baking temperature. Insufficient cooling. Leakage of vacuum equipment or piping. Continuous repetition of startup/shutdown. Extraordinarily-high temperature.
STP-H600/H1000 Series Instruction Manual 7 Gas Suction, Cooling and Baking the STP Pump 7.1 Gas Suction WARNING ◇ When sucking gases, they may remain in the STP pump. Introduce a purge gas and then exhaust all gasses. Residual gases in the STP pump may cause an accident when the STP pump is removed. Confirm the characteristics of gases to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.
STP-H600/H1000 Series Instruction Manual 7.2 Cooling the STP Pump There are two methods for cooling: Water cooling and Air cooling. When sucking gases, cool the STP pump in accordance with the operating pressure range. Also, when performing baking, always cool the STP pump. Select the best one which fits your vacuum equipment. 7.2.1 Water Cooling Method 1) 2) 3) 4) Connect the cooling water pipe to the cooling water port in accordance with Figure 7.1.
STP-H600/H1000 Series Instruction Manual 7.2.2 Air Cooling Method When water cooling is not available, an air cooling unit (optional accessory) can be used. Follow the steps below: 1) 2) Remove the water cooling unit (it is attached with the four M8*1 screws). Attach the air cooling unit using screw holes for the water cooling unit. CAUTION ◇ Check the rated voltage of the air cooling unit before use. ◇ Purchase a breaker or fuses for the air cooling unit (remote terminal block TB2 incorporates fuses).
STP-H600/H1000 Series Instruction Manual 7.3 Baking the STP Pump To attain a lower pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment and STP pump. WARNING ◇ The surfaces of the STP pump and its peripheral equipment will become extremely hot when performing baking. NEVER touch them with bare hands. CAUTION ◇ When baking the STP pump, always cool it to prevent overheating (for the cooling method, see Section 7.2, "Cooling the STP Pump").
STP-H600/H1000 Series Instruction Manual ・警告 ・WARNING 高温部 やけどします。 触らないでく ださい。 Hot surface. Can burn hands. Do not touch. This label is attached to the baking heater. Baking Heater (Optional Accessory) Cooling Water Port Cooling Water Port Water Cooling Unit (Standard Accessory): Used when water cooled Air Cooling Unit (Optional Accessory): Used when air cooled Table 7.
STP-H600/H1000 Series Instruction Manual 7.3.2 Interlocking the STP Pump Operation with Baking Follow the steps below to interlock the STP pump operation with baking (read through Section 8, " Remote Input/Output Signal Terminal Blocks," then start operation). CAUTION ◇ Check the rated voltage of the baking heater before use. ◇ Always turn OFF the power to the remote terminal block from equipment, before connecting/disconnecting the remote wire to the remote terminal block.
STP-H600/H1000 Series Instruction Manual 8 Remote Input/Output Signal Terminal Blocks 8.1 I/O TB2 Terminal Block This is a terminal block for a remote output signal. Use it in accordance with Table 8.1 and Figure 8.1. The terminal block functions in both the MANUAL and REMOTE operations. The screw for the terminal is M3*1 . Five abbreviations are used in the following tables: N.O :Normal Open N.
STP-H600/H1000 Series Instruction Manual Terminal (6) (5) FAN N.O OUT (8) (7) POW ER Description Terminal for connecting the air cooling unit. The voltage input to AC. POWER terminal ((19)-(20)) is output to this terminal when the STP pump is in acceleration or rated operation. The voltage is cut OFF when the STP pump is under the BRAKE state (See Section 7.2.2, “Air Cooling Method"). Terminal for outputting the POWER ON state signal.
STP-H600/H1000 Series Instruction Manual I/O TB2 : Remote Output Signal Terminal Block 19 :Normal Open N.C :Normal Close COM :Common 20 L1 AC POWER N1 1 HEATER Fuse F5 250 V AC 10A Fuse F7 250 V AC 10A N.O Terminal for connecting the baking heater CR1 Fuse F6 250 V AC 10A Power input terminals for baking heater, auxiliary pump and air cooling unit 2 N .O OUT 3 R .PUMP 4 N .O OUT 5 FAN 6 N .
STP-H600/H1000 Series Instruction Manual Table 8.2 shows rated contacts for relays CR1 to 4, CR7, and CR10 (See Figure 8.1) and CR8 (See Figure 8.4). Table 8.2 Rated Contacts for Relays CR1 to 4, CR7, CR8 and CR10 Induction Load (cos φ=0.
STP-H600/H1000 Series Instruction Manual AC Power Relay R.PUMP NO.OUT 3 R.P R.P : Auxiliary Pump 4 Figure 8.2 Example of Connecting I/O TB2 R. Pump Terminal CAUTION ◇ When connecting optional power (over 25 V AC or over 60 V DC) to terminals (1) to (6), (19) and (20), secure the remote cable using the attached cable fitting tool (see Figure 8.3). DO NOT apply excessive force to the remote cable. ◇ DO NOT disconnect the ground cable for the metallic terminal block cover.
STP-H600/H1000 Series Instruction Manual 8.2 DC I/O TB3 Terminal Block This is a terminal block for a remote input/output signal. Use it in accordance with Table 8.4 and Figure 8.4. Terminals excluding the HEATING terminal function in either case of the REMOTE/MANUAL operation. The screw for the terminal is M3*1. Four abbreviations are used in the following tables: N.O :Normal Open N.C :Normal Close IN :Input Terminal OUT :Output Terminal. Table 8.
STP-H600/H1000 Series Instruction Manual DC I/O TB3 : N.O : N.C : IN : OUT : Remote Input Signal Terminal Block Normal Open Normal Close Input Terminal Output Terminal +12V 1 kΩ 1 R.P.THER 3 N.C IN 5 INHIBIT Auxiliary pump thermal switch input terminal 1 kΩ 7 N.C IN 2 HEATING 4 N.O IN 9 L..VALVE 10 N.O OUT Rotation inhibit signal input terminal 1 kΩ ＣＲ８ Baking heater control signal input terminal Emergency vent.
STP-H600/H1000 Series Instruction Manual 8.3 START STOP TB5 Terminal Block This is a terminal block for a contact type remote input signal. Use it in accordance with Table 8.5 and Figure 8.5 (See Section 5.6.2, "Starting/Stopping the STP Pump"). The terminal block operates only during the REMOTE operation. The screw for the terminal is M4*1 . Three abbreviations are used in the following tables: N.O :Normal Open N.C :Normal Close IN :Input Terminal Table 8.
STP-H600/H1000 Series Instruction Manual 8.4 START/STOP TB6 Terminal Block This is a terminal block for a voltage type remote input signal. Use it in accordance with Table 8.6 and Figure 8.6 (See Section 5.6.2, “Starting/Stopping the STP Pump"). The terminal block operates only during REMOTE operation. The screw for the terminal is M4*1 . CAUTION ◇ When connecting optional power (over 25 V AC) to terminals (1) or (2), secure the remote cable using the attached cable fitting tool (See Figure 8.3).
STP-H600/H1000 Series Instruction Manual 9 Internal Battery Four batteries (PORTALAC Series Small-Sized Sealed Lead-Acid Batteries, PE12V 2WS : 12V, 2Ah, manufactured by Japan Storage Battery Co., Ltd.) (hereinafter referred to as the internal battery) are inserted into the STP pump for backup during a power failure. These are rechargeable.
Allowable Shelf Life of the Internal Battery (Month) Life of the Internal Battery (Year) STP-H600/H1000 Series Instruction Manual 10 5 4 3 2 1 0.5 10 20 30 40 Ambient Temperatures( ℃) 40 30 20 10 5 ２ 10 Figure 9.1 Life of the Internal Battery 9.3 50 20 30 40 Ambient Temperatures( ℃) Figure 9.2 Allowable Shelf Life of the Internal Battery How to Charge the Internal Battery The battery is charged while the power is "ON," regardless of the operation state of the STP pump.
STP-H600/H1000 Series Instruction Manual 9.4 BATTERY NG Lamp If battery capacity became less than operating limit value or there was connection mistake, the "BATTERY NG" lamp on the rear side of the STP control unit front panel (See 9.3, "Life of the Internal Battery)", the "FAILURE" lamp, and the "EMERGENCY OPERATION" lamp on the STP control unit front panel light, and the STP pump does not start. Replace the battery with a new one and reset the "Battery Capacity Low Warning" (BATTERY NG) lamp.
STP-H600/H1000 Series Instruction Manual 9.5 How to Replace the Internal Battery WARNING ◇ When covering the battery case, be sure not to catch the battery cable in the battery case. Failure to do so may shortcircuit the battery and result in a leakage, production of fire or explosion. CAUTION ◇ Turn OFF the primary power (Switch the breaker "OFF"), before replacing the battery. Failure to do so may result in product damage or a problem due to electric shock or short-circuiting of the internal circuit.
STP-H600/H1000 Series Instruction Manual 9.5.2 How to Replace the Battery in the Battery Case 1) 2) 3) 4) 5) 6) Remove front plate (5) from battery case (4) by unscrewing 4 M2 screws. Disconnect battery internal connector (6). Remove inside plate(10) from battery case by unscrewing 4 M2 screws and pull out the battery from the case (it can be pulled out toward you). Replace the four worn-out batteries with new ones, the side, from which the cord projects, up. Attach inside plate(10).
STP-H600/H1000 Series Instruction Manual (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (11) STP Control Unit Front Panel Internal Battery Connector Battery Case Screw Battery Case Battery Case Front Plate Battery Internal Connector BATTERY NG Lamp RESET Switch Battery Instruction Label Battery Case Inside Plate Flat Head Screw (M2) (2) (8) (7) (1) (4) (10) (3) (5) (11) (9) ・注意 ・CAUTION ◇バッテリーは１年毎に交換してく ◇Change batteries every year .
STP-H600/H1000 Series Instruction Manual 9.6 How to Dispose of the Internal Battery Dispose of or collect worn-out batteries in accordance with the guidelines given by each national and/or local government. If you procure batteries, dispose of them in accordance with the guidelines given by the battery manufacturer. CAUTION ◇ Pay attention to short-circuiting or leakage of the batteries when disposing of them.
STP-H600/H1000 Series Instruction Manual 10 External Battery CAUTION ◇ DO NOT use (an) external batteries when internal batteries are inserted. Failure to do so may result in product damage or a problem. It could cause a problem, such as product damage. ◇ DO NOT connect batteries in parallel. ◇ Replace batteries with new ones before the end of their life. ◇ When the STP pump is left unused over the specified period, charge battery for 90 minutes, or replace it with a new one before starting the STP pump.
STP-H600/H1000 Series Instruction Manual 10.2 Installation of the External Battery CAUTION ◇ Turn OFF the primary power (Switch the breaker "OFF"), before connecting the battery. Failure to do so may result in product damage or a problem due to electric shock or short-circuiting of the internal circuit. ◇ After disconnecting the internal battery connector (CON12), connect the external battery connector (CON9). Having both connected simultaneously may result in damage to the STP control unit.
STP-H600/H1000 Series Instruction Manual 10.3 How to Charge the External Battery NOTICE ◇ The battery is charged while the power is "ON," regardless of the operation state of the STP pump. The STP control unit is equipped with a constant voltage (55 V) circuit and a constant current (0.3 A) circuit for charging the battery. After a power failure, charge the battery for approx. 12 times the BATTERY BACKUP time. For example, if the BATTERY BACKUP time is 6 minutes, it takes approx.
STP-H600/H1000 Series Instruction Manual 11 Operation Principle of the STP Pump The STP-H600/H1000 is a series of magnetically-levitated turbomolecular pumps, featuring the following: l l l Oil free Low vibration High reliability The STP pump is configured so that rotor blade (1) and stator blade (2) are aligned alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor.
STP-H600/H1000 Series Instruction Manual ( 1) Rotor blade (2) Stator blade ( 7) Touch down bearing (4) Radial electromagnet ( 3) Radial sensor ( 8) Touch down bearing ( 3) Radial sensor ( 4) Radial electromagnet ( 6) Axial electromagnet ( 6) Axial electromagnet ( 5) Axial sensor Figure 11.
STP-H600/H1000 Series Instruction Manual 12 Maintenance and Inspection CAUTION ◇ Stop the STP pump, turn OFF the primary power (switch the breaker "OFF") and disconnect the internal battery connector before performing maintenance of the STP control unit (battery replacement/fuse replacement). Failure to do so may result in an accident such as electric shock. ◇ Stop the STP pump, and turn OFF the primary power (Switch the breaker "OFF") before performing inspections of the STP pump (for deposit).
STP-H600/H1000 Series Instruction Manual 12.3 Replacing the Fuses CAUTION ◇ Remove the probable causes of the blown fuse (Ex. a problem with the remote input signal, etc.) before replacing the fuse. ◇ Always use specified and rated fuses. NOTICE ◇ If fuses are blown frequently even after they are replaced, contact Seiko Instruments. The following are protective fuses used in the STP control unit (See Section 4.1.3, "Inside of the Control Unit"). F3, F4: 250 V, 5 A For control power protection.
STP-H600/H1000 Series Instruction Manual 12.4 Inspecting for Deposit ◇ When inspecting for deposit, exhaust gases inside the STP pump thoroughly. Residual gases may cause an accident when removing the STP pump. Confirm the characteristics of gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier. Wear personal protective equipment if necessary. Leaving the STP pump without removing the deposit may cause the STP pump to be corroded beyond repair.
STP-H600/H1000 Series Instruction Manual 12.5 Overhaul The recommended maintenance intervals for different process applications are tabulated below: Period 1 year Etching*1 Process Metal Etch Remarks Ensure that TMS (Temperature Management System) is fitted and operational to prevent accumulation of by-product deposition in the pump.
STP-H600/H1000 Series Instruction Manual 12.6 Transporting for Repair or Overhaul ◇ When removing the STP pump from the vacuum equipment, exhaust gases inside the STP pump thoroughly. Residual gases may result in an accident when removing the STP pump. Confirm the characteristics of gas to be used, referring to the Material Safety Data Sheet (MSDS) you obtain from the gas supplier.
STP-H600/H1000 Series Instruction Manual 13 Storage 13.1 The STP Pump When the STP pump is left unused over the specified period (more than a few months), follow the precautions below: 1) 2) 3) 4) 5) 6) Close the inlet port of the STP pump and vacuum it using an auxiliary pump. Purge dry N2 gas or dry air from the purge port. Close the outlet port and purge port. If the STP pump is water cooled, introduce compressed air from one side of the cooling water port so that no water remains in the STP pump.
STP-H600/H1000 Series Instruction Manual 13.2 The STP Control Unit If the STP control unit (including cables) is not used for a long period (more than a few months), follow the precautions below: 1) Remove the internal battery from the STP control unit (see Section 9, "Internal Battery"). NOTICE ◇ Always remove the battery when the STP control unit is not used for a long period. 2) 3) Store the STP control unit in a horizontal position.
STP-H600/H1000 Series Instruction Manual 14 Disposal 14.1 The STP Pump Dispose of the STP pump as industrial waste according to the guidelines given by each national and/or local government. WARNING ◇ When disposing of the STP pump, exhaust gases inside the STP pump thoroughly. Residual gases may result in an accident when disposing of the STP pump. If the STP pump has been used with reactive or corrosive gasses, always clean thoroughly before disposing of it to avoid any injury.
STP-H600/H1000 Series Instruction Manual 14.3 The Battery Dispose of or collect worn-out batteries in accordance with the guidelines given by each national and/or local government. If you procure batteries, dispose of them in accordance with the guidelines given by the battery manufacturer. CAUTION ◇ Pay attention to short-circuiting or leakage of the battery at their disposal. ◇ To prevent the battery from short-circuiting, remove lead wires and connectors from the battery.
STP-H600/H1000 Series Instruction Manual 15 Troubleshooting If an abnormality/error is found when using the STP pump, check it and take measures in accordance with the following procedures. If you cannot trace it or if the STP pump does not function normally after troubleshooting, fill in the necessary information in the "STP PUMP PROBLEM CHECK SHEET" and fax it to Seiko Seiki.
STP-H600/H1000 Series Instruction Manual 2) i. ii. In case the FREE RUN state is not reset after troubleshooting: Check the tachometer on the front panel. If the needle is in the red, it means the STP pump has stopped. Power OFF and switch the breaker "OFF." iii. If the needle is in the black, the STP pump is rotating. Wait for it to enter the red. Then, power OFF and switch the breaker "OFF. " iv. Restart the STP pump and check if operates correctly.
STP-H600/H1000 Series Instruction Manual 15.3 Abnormalities When Performing The STP Pump Start Operation (When any "Abnormality/Error Warning" lamp lights, see Section 15.5 "When Any Abnormality/Error Warning Lamp Lights.") Table 15.2 Troubleshooting When Performing The STP Pump Start Operation No. Symptom Probable Cause １ The "ACCELERATION" (1) TB3 lamp does not light. INHIBIT (5) (7) for Rotation INHIBIT Signal Input are opened. (2) The "MANUAL/R EMOTE" changeover switch is not in the correct position.
STP-H600/H1000 Series Instruction Manual No. Symptom 2 The STP pump stops. Probable Causes (1) Baking temperature overheat. (2) Insufficient cooling. (3) (4) (5) (6) (7) (8) 3 Countermeasures Set the temperature to 120 ℃ or lower. Always cool during baking 7.2 or gas suction. Power failure. Check if power has failed. 6.1.1 Over vibration After the STP pump stops 6.1.3 (vibration 100 mm p-p thoroughly, power OFF and remove external or more). vibration so as not to transmit it to the STP pump.
STP-H600/H1000 Series Instruction Manual 15.5 When Any Abnormality/Error Warning Lamp Lights When any Abnormality/Error Warning lamp lights, check which lamp is being lit and see Table 15.5 for which procedure No. to follow. Then, follow the steps of that procedure No. (shown in Tables 15.6 to 15.8) to remove the problem (for the names and positions of the "Abnormality/Error Warning" lamps, see Figures 4.1 and 4.3). Table 15.
STP-H600/H1000 Series Instruction Manual Table 15.5 Troubleshooting When Any of Abnormality/Error Warning Lamp Lights PROCEDU Lamp Being Lit RE No. No.1 No.2 Probable Causes “OVER (1) Incorrect connection of TEMPERATURE” the STP connection “FAILURE” cable. “EMERGENCY OPERATION” “OVER (1) Overheat inside the STP TEMPERATURE” pump: “FAILURE” 1) Overheat during baking. 2) Insufficient cooling. No.3 No.4 “BATTERY OPERATION” “EMERGENCY OPERATION” “FAILURE” Countermeasures Connect cables correctly.
STP-H600/H1000 Series Instruction Manual PROCEDU Lamp Being Lit RE No. No.4 “FAILURE” Probable Causes (3) Overheating inside the STP control unit: 1) Ambient temperature. 1) Set the ambient temperature to 40 °C or lower. 2) Insufficient cooling of 2) Remove obstacle from the the STP control unit. ventilation port. If the air cooling fan is broken, contact Seiko Seiki. Remove abnormalities from (4) Peripheral equipment peripheral equipment.
STP-H600/H1000 Series Instruction Manual PROCEDU Lamp Being Lit RE No. No.6 “FAILURE” “BATTERY NG” (inside the front panel) ( “EMERGENCY OPERATION” lamp may light) Probable Causes (1) Insufficient charge or deterioration of the battery. Countermeasures Referred Section 9 1) Check whether or not the battery is fully charged. If 10 the battery is not sufficiently charged, charge it. 2) Check the deterioration and the replacement date of the battery.
STP-H600/H1000 Series Instruction Manual 16 Specifications and Accessories 16.1 Specifications for the STP Pump Table 16.
STP-H600/H1000 Series Instruction Manual 16.2 16.2 Specifications for the STP Control Unit Table 16.
STP-H600/H1000 Series Instruction Manual Item Input/output terminal Input/output cables Safety functions · · · · · · · · · · · · · · · · · · · · · · 16-3 Specifications AC POWER TB1 (3 pins) P.CONNECTOR CON5A (45 pins) INVERTER OUTPUT CON2A (5 pins) LEAK VALVE CON8A (8 pins) I/O TB2 (20 pins) DC I/O TB3 (10 pins) START STOP TB5 (3 pins) START/STOP TB6 (2 pins) EXT. BATTERY CON9 (2 pins) Primary power cable STP connection cable Motor connection cable Emergency vent.
STP-H600/H1000 Series Instruction Manual 16.3 Accessories Table 16.3 Accessories Item STP control unit Primary power cable*1 STP connection cable*1 Motor connection cable*1 Ground cable*1 Inlet port cover Outlet port cover STP connector cover Motor connector cover Leg Rubber foot for lug Emergency vent. valve Emergency vent. valve clamping ring Emergency vent.
Ｃ 16-5 13 1 Ａ Min. 270 Tempreture sensor conector attachment (optional accessory) Flange A B C D Model *1 STP-H600 Series *1 Screw hole for rubber feet *1 M12 /Depth 24(4 pcs.) ISO160F ICF253 339 319 φ 253 φ 225 238 258 25 16 VG200 319 φ300 238 18 *1 85 ﾟ 30 φ 21 0 45 ﾟ ISO200F ISO250 319 319 φ 285 φ290 238 238 16 15 : JVIS ISO250F ASA"6 319 339 φ 335 φ279.4 238 258 16 12.
543 10 6 62 32 Figure 16.2 External Appearance of the STP Control Unit Figure 16.2 35 6 48 0 4 16 Ventilation port Ventilation port (Cable Space) 25 40 35 37 4 30 4 80 35 6 37 25 *1:JIS 40 0 Ventilation port Ventilation port Ventilation port 35 30 Screw hole for rubber foot M3 * 1 (4 pcs.) External Appearance of the STP Control Unit 62 32 30 470 3 24.5 50 50 50 24.5 (150) 500 199 5 188.6 5.4 34.5 130 16-6 34.
Figure 16.3 Label Affixing Positions for the STP Pump 16-7 ・注意 ◇コネクタは確実に ロックしてくださ い。 ◇ブレーカＯＮの時 はコネクタを外さ ないでください。 NO Loc k ROTATION ◇Do not remove connector while breaker is ON . ◇Lock connector securely. ・ CAUTION ・ W ARNING ポンプ使用前に必ず 取付けてください。 Valve KF10 NW10 Connect the emergency venting valve b efore use . Emergency valve installation position ・ CAUTION Install pump securely according to instruction manual. ・ CAUTION 非常用電磁バルブ 取付位置 ｋｇ Handle with caution.
STP-H600/H1000 Series Instruction Manual Affix this label to the inside of front panel. Tuning should be performed by Seiko Seiki trained or authorized personnel only. ・ CAUTION ｋｇ 浮上調整を行う場合はセイコ ー精機のトレーニングまたは 許可を受けてください。 ｋｇ 重量物 ・注意 Heavy product ・注意 ・ CAUTION 次回交換日／ Next exchange date ◇バッテリーは１年毎に交換してく ◇Change batteries every year . ださい。 ◇Do not use external batteries ◇内部バッテリーと外部バッテリー in combination with internal を同時に使用しないでください。 batteries .
STP-H600/H1000 Series Instruction Manual ・警告 ・WARNING 高温部 やけどします。 触らないでく ださい。 Hot surface. Can burn hands. Do not touch. Baking Heater Air Cooling Unit AIR COOLING UNIT VOLTS AC SEIKO SEIKI V MADE IN JAPAN Figure 16.5 Label Affixing Positions for the Special Accessory Figure 16.
STP PUMP PROBLEM CHECK SHEET Contact your nearest Seiko Seiki’s office shown in the rear cover. To : Company Name : Contact Name : TEL. Number : FAX. Number : Address : From: Customer Name Date : : Date : Person in charge : TEL. Number : FAX. Number : Address : Model Name : STPM/C No.
UNIT CONVERSION TABLE Length m cm 1 0.01 -3 1x10 -3 25.4x10 mm inch 3 100 1.00x10 39.4 1 10.0 0.394 0.10 1 39.4x10 2.54 25.4 1 -3 Mass g kg lb. -3 -5 1.00x10 2.20x10 1x10 1 2.20 454 0.454 1 Pa Torr kgf/cm 1 7.50x10 1.02x10 133 1 1.36x10 736 1 1 3 Pressure -3 4 9.
Sales Office (Japan) Seiko Instruments Inc. Vacuum Innovative Products Sales Department 1-8 Nakase, Mihama-ku, Chiba-shi, Chiba 261-8507 JAPAN Telephone: Domestic 043-211-1401 International + 81-43-211-1401 Facsimile: Domestic 043-211-8075 International + 81-43-211-8075 Manufacturer, Sales Office (Japan) Seiko Instruments Inc.
