User Manual

(Cat _-AMEGY)
EMO Switch Guard
Installation
3/64 - 19/64 in.
(1 - 7.7 mm)
_-ATW1
Read this instruction sheet carefully before using the switch guard. This EMO guard is designed
for use on semiconductor manufacturing equipment and is SEMI S2 compliant when properly
installed per SEMI S2 0706.
NEMA: For use on a flat surface of a Type 4x indoor use only or Type 13 enclosure. IEC:IP66
EMO
WARNING
ATTENTION
To prevent electrical shock, disconnect
from power source before installing or
servicing.
41063-311-01
DIR 41063-311 (Version 03)
Printed in China
1638 mm
(
64.5 in
)
254 mm
(
10.0 in
)
1397 mm
(
55.0 in
)
366 mm
(
14.5 in
)
1524 mm
(
60.0 in
)
368 mm
(
14.5 in
)
1270 mm
(
50.0 in
)
432 mm
(
17.0 in
)
1422 mm (56.0 in)
432 mm
(
17.0 in
)
1168 mm
(
46.0 in
)
470 mm
(
18.5 in
)
1321 mm (52.0 in)
470 mm
(
18.5 in
)
1067 mm
(
42.0 in
)
483 mm
(
19.0 in
)
1219 mm (49.0 in)
483 mm
(
19.0 in
)
965 mm
(
38.0 in
)
483 mm
(
19.0 in
)
1118 mm (44.0 in)
470 mm
(
18.5 in
)
864 mm
(
34.0 in
)
470 mm
(
18.5 in
)
1016 mm (40.0 in)
394 mm
(
15.5 in
)
762 mm
(
30.0 in
)
445 mm
(
17.5 in
)
914 mm (36.0 in)
292 mm
(
11.5 in
)
660 mm
(
26.0 in
)
381 mm
(
15.0 in
)
838 mm (33.0 in)
178 mm
(
7.0 in
)
533 mm
(
21.0 in
)
254 mm
(
10.0 in
)
An E-Sto
p
has to be within 10 feet or 3 m of ever
y
o
p
eration and maintenance location.
The location of the E-Sto
p
could not be obstructed and must be easil
y
visible.
Mountin
g
Dimensions
p
er SEMI S8 Er
g
onomic Re
q
uirements for reach of critical controls:
Corresponding Depth
(from leading edge of
workstation)
Seated WorkstationStandin
g
Workstation
Height from floor Corresponding Depth
(from leading edge of
workstation)
Height from floor