Instruction Manual

PT2E-1052
45
Detection gas
Chemical
formula
Detection
range
Preset
alarm level
(standard)
Applicable
filter
Phosphorus
Trichloride
PCl3
HCl 0∼15 ppm
5 ppm M
Phosphorus
Trifluoride
PF3
0∼10 ppm
2 ppm M
Silane SiH4
0∼15 ppm
5 ppm M.B
Silicone
Tetrachloride
SiCl4
HCl 0∼15 ppm
5 ppm M
Silicone
Tetrafluoride
SiF4
HF 0∼9 ppm
3 ppm M
Sulfur Tetrafluoride SF4
HF 0∼9 ppm
3 ppm M
Tantalum Fluoride TaF5
HF 0∼9 ppm
3 ppm M
Tin Tetrachloride SnCl4
HCl 0∼15 ppm
5 ppm M
Trichlorosilane SiHCl3
HCl 0∼15 ppm
5 ppm M
Tungsten
Hexachloride
WCl6
HCl 0∼15 ppm
5 ppm M
Tungsten
Hexafluoride
WF6
HF 0∼9 ppm
3 ppm M
*For gases not listed above, contact us or our nearest agent.
*M : Millipore type filter B : Balston type filter
*Gases which have “HCL(HF)” in the box of detection range are
hydrized by moisture in air, and detected by becoming HCL(HF).