Instruction Manual

PT2E-1052
44
Detection gas
Chemical
formula
Detection
range
Preset
alarm level
(standard)
Applicable
filter
Ammonia NH3
0∼75 ppm
25 ppm M
Antimony
Pentachloride
SbCl5
HCl 0∼15 ppm
5 ppm M
Arsenic
Pentachloride
AsCl5
HCl 0∼15 ppm
5 ppm M
Arsenic
Pentafluoride
AsF5
HF 0∼9 ppm
3 ppm M
Arsenic Trichloride AsCl3
HCl 0∼15 ppm
5 ppm M
Arsenic Trifluoride AsF3
HF 0∼9 ppm
3 ppm M
Arsine AsH3
0∼0.2 ppm
0.05 ppm M.B
Boron Tribromide BBr3
HBr 0∼9 ppm
3 ppm M
Boron Trichloride BCl3
HCl 0∼15 ppm
5 ppm M
Boron Trifluoride BF3
HF 0∼9 ppm
3 ppm M
Bromine Br2
0∼1 ppm
0.2 ppm M
Chlorine Cl2
0∼1.5 ppm
0.5 ppm M.B
0∼1 ppm
0.2 ppm M Chlorine Trifluoride CIF3
0∼0.6 ppm
0.1 ppm M
Diborane B2H6
0∼0.3 ppm
0.1 ppm M
Dichlorosilane SiH2Cl2
HCl 0∼15 ppm
5 ppm M
Disilane Si2H6
0∼15 ppm
5 ppm M.B
Fluorine F2
0∼3 ppm
1 ppm M
Germane GeH4
0∼0.8 ppm
0.2 ppm M.B
Germanium
Tetrachloride
GeCl4
HCl 0∼15 ppm
5 ppm M
Hydrogen Bromide HBr
0∼9 ppm
3 ppm M
Hydrogen Chloride HCl
0∼15 ppm
5 ppm M
Hydrogen Fluoride HF
0∼9 ppm
3 ppm M
Hydrogen Iodine Hl
0∼5 ppm
2 ppm M
Hydrogen Selenide H2Se
0∼0.2 ppm
0.05 ppm M.B
Iodine I2
0∼1 ppm
0.3 ppm M
Molybdenum
Pentachloride
MOCl5
HCl 0∼15 ppm
5 ppm M
Molybdenum
Hexafluoride
MOF6
HF 0∼9 ppm
3 ppm M
Nitrogen Dioxide NO2
0∼15 ppm
5 ppm M.B
0∼1 ppm
0.3 ppm M Ozone O3
0∼0.6 ppm
0.1 ppm M
Phosphine PH3
0∼1 ppm
0.3 ppm M.B
Phosphorus
Oxychloride
POCl3
HCl 0∼15 ppm
5 ppm M
Phosphorus
Pentachloride
PCl5
HCl 0∼15 ppm
5 ppm M
Phosphorus
Pentafluoride
PF5
HF 0∼9 ppm
3 ppm M
TYPICAL DETECTION GASES AND APPLICABLE FILTERS(EXAMPLE)