Specifications

3. OPERATION

The next display is used to enter the full scale voltage or current. Enter the full scale

voltage or current of the device and press [ENTER]. If configuring a current (mA)

electrical type MFC, you will also be prompted to enter the 0 flow current output value

which must be 4 mA or greater. MFC-CB does not support mixed current/voltage MFCs.

The next selection specifies the flow unit of measure

for this MFC profile. The choice of units available in

this screen can be customized using [SETUP],

<4flowU> (see Section 3.3.4).

After the flow unit of measure ha

s been selected the

display prompts for the flow range. Enter the

numerical value of full scale of the MFC or MFM in

the flow unit.

The next selection specifies whether the device is a

mass flow meter only (MFM) or a mass flow

controller (MFC). Choose <1measure> if the device

for this profile measures only, choose <2control> if

the device measures and controls flow.

Once the device type has been selected, editing is complete and a prompt to edit the

next profile number is presented. Enter another profile number to edit if desired.

Pressing [ESCAPE] goes to <Select MFC profile:>. Pressing [ESCAPE] again returns

to the run screen.

To clear/reset all MFC profiles, except the #1 and #2 factory default profiles, use

[SPECIAL], <1reset>, <3MFC> (see Section 3.4.1.3).

3.3.2 <2JOG>

 PURPOSE

To adjust the increment by which one key press adjusts the set point when the set point

jog function is used (see Section 3.2.9).

 OPER

ATION

To adjust the set point jog function increment, press

[SETUP], <2jog>. The display is:

Use the [←] and [→] keys to adjust the value. Maximum is 1.00 %FS. Minimum is

0.01 %FS. The FS value is the full scale specified in the active MFC profile (see

Section 3.3.1). Press [EN

TER] to return to the run screen with the jog value active.

The jog increment setting is device channel specific (DEV1, DEV2). Changing the jog

increment value set for one device channel does not affect the other device channel.

Set jog step:

0.10 %FS < and > D1

1sccm 2slm 3mg/s

4mol/s 5sm3h 6scfh

Enter range:

100.00 sccm