Specifications

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
© 1998-2007 DH Instruments, a Fluke Company Page 10
Table 4. molbloc-S Flow at Various molbloc Upstream Pressures
FLOW [slm @ 0°C] WHEN molbloc-S UPSTREAM PRESSURE IS:
[1][2]
molbloc-S
DESIGNATO
R
K
F
[sccm/kPa]
20 kPa
(3psia)
50 kPa
(7 psia)
100 kPa
(15 psia)
Minimum
without
vacuum
[3
]
150 kPa
(22 psia)
200 kPa
(30 psia)
250 kPa
(36 psia)
500 kPa
(70 psia)
5E1-S
50 1 2.5 5 7.7 7.5 10 12.5 25
1E2-S
100 2 5 10 15 15 20 25 50
2E2-S
200 4 10 20 28 30 40 50 100
5E2-S
500 10 25 50 67 75 100 125 250
1E3-S
1 000 20 50 100 129 150 200 250 500
2E3-S
2 000 40 100 200 248 300 400 500 1 000
5E3-S
5 000 100 250 500 596 750 1 000 1 250 2500
1E4-S
10 000 200 500 1 000 1 173 1 500 2 000 2 500 5 000
[1] When volumetrically based mass flow units with reference temperatures other than 0°C are used, flow values
will generally be higher; for example, the flow values for a given molbloc and upstream pressure are
approximately 7% higher when expressed in slm @ 20°C. Flow values at a given pressure may vary by up to
2% due to flowpath machining tolerances.
[2] Flow values in table are valid only when critical flow is established.
[3] Minimum upstream pressure to achieve critical flow with atmospheric pressure (approximately 100 kPa)
downstream of molbloc-S (no vacuum).
Table 5. Minimum molbloc-S Critical Flow (slm) at Various molbloc-S Downstream Pressures
MINIMUM molbloc-S CRITICAL FLOW [SLM @ 0°C] WITH molbloc DOWNSTREAM PRESSURE OF:
[1]
molbloc-S
DESIGNATO
R
≤ 5
kPa
(0.7
psia)
10
kPa
(1.5
psia)
25
kPa
(3.5
psia)
50
kPa
(7
psia)
100
kPa
(15
psia)
110
kPa
(16
psia)
125
kPa
(18
psia)
150
kPa
(22
psia)
200
kPa
(30
psia)
250
kPa
(36
psia)
300
kPa
(44
psia)
5E1-S
1
[2]
1.7 3.4 4.7 7.7 8.4 9.4 11 14 17 20
1E2-S
2
[2]
3.4 5.9 8.4 15 16 18 21 27 33 38
2E2-S
4
[2]
5.9 9.8 16 28 31 34 40 51 63 74
5E2-S
10
[2]
12 20 37 67 72 80 95 122 149 179
1E3-S
20
[2]
20
[2]
39 69 129 139 154 184 239 294 349
2E3-S
40
[2]
40
[2]
73 131 248 268 298 358 468 578 687
5E3-S
100
[2]
100
[2]
173 317 596 646 746 871 1 145 1 420 1 694
1E4-S
200
[2]
200
[2]
347 615 1 173 1 273 1 442 1 741 2 240 2 789 3 338
[1] When volumetrically based mass flow units with reference temperatures other than 0 °C are used, flow values
will generally be higher; for example, the flow values for a given molbloc and upstream pressure are
approximately 7 % higher when expressed in slm @ 20 °C. Flow values at a given pressure may vary by up to
2 % due to flowpath machining tolerances.
[2] Limited by 20 kPa minimum calibration pressure rather than back pressure ratio.