Specifications

molbox™ RFM™ OPERATION AND MAINTENANCE MANUAL
© 1998-2007 DH Instruments, a Fluke Company Page 158
Table 32. Conversion From mole/s To pccm
TO CONVERT MOLE/SEC TO PCCM MULTIPLY BY
ANY GAS 1.34483 E+06
The “p” in pccm indicates “perfect” in which a gas compressibility factor of 1 is assumed
for all gases. In early 1996, SEMI, a semiconductor industry group, adopted standard
E12-96 which specified that this definition be used for volumetrically base mass flow
units.
Table 33. Conversion From sccm At 0 °C to Volume Flow Units At
Another Pressure And Temperature
TO CONVERT FROM A VOLUMETRIC MASS FLOW
UNIT TO THE EQUIVALENT VOLUME FLOW UNIT
AT TEMPERATURE θ AND P
USER
MULTIPLY BY
sccm to ccm
slm to lm
slh to lh
scfm to cfm
scfh to cfh
sm3m to m3m
sm3h to m3h
( )( ,( ))TZ P
TZPuser
Puser TNN
NN
N
+
⋅
⋅⋅
⋅+
θ
θ
Where:
TK
N
= 27315.
][kPa pressure userPuser
=
]C[etemperatur user °=θ
P 101.325
N
= kPa
zz
Puser T NN(,())
;
+ θ
= gas dependent compressibility factors