IWAKI AMERICA FA-2E AIR DRIVEN BELLOWS PUMP INSTRUCTION MANUAL
CONTENTS 1 2 2 3 4 5 6 7 INTRODUCTION ........................................................................................................ 3 UNPACKING AND INSPECTION .............................................................................. 2 2.1 Operation Sequence ........................................................................................................... 3 IDENTIFICATION CODES .........................................................................................
1 INTRODUCTION Thank you for selecting an Iwaki America FA-2E Air Driven Bellows Pump. These pumps are designed exclusively for pumping semiconductor grade, high purity liquids. To ensure safety and maximum service life of the pump, please read this instruction manual thoroughly prior to installation and operation. CAUTION! 1. This instruction manual details the proper installation, operation and safety measures necessary to ensure the safe and efficient use of this pump.
2 UNPACKING AND INSPECTION Open the package and check that the product conforms to your order. Also check each of the following points. For any problem or inconsistency, contact Iwaki America at once. 1. Check that the model number indicated on the nameplate conforms to the specifications of your order. 2. Check that the pump body and parts have not been accidentally damaged or that any fasteners have not been loosened in transit.
2.1 Operation Sequence Figure 2 Refer to Figure 2. When pressurized air is supplied to chamber 'a' of the pump, bellows 'A' is compressed and fluid is discharged from the bellows through the pump head discharge (outlet) port. Simultaneously, bellows 'B' is extended and fluid is drawn into the bellows through the pump head suction (inlet) port. Air is being exhausted from pump chamber 'b' during this process.
2 IDENTIFICATION CODES 1 2 3 FA - 2E - W02 1. Series code: FA: Non-metallic pump for medium temperature liquid 2. Maximum discharge volume: 0.5 Gal/min (2L/min) 3. Special specifications No symbol: Threaded suction & discharge W02: Tubing connections 3 SPECIFICATIONS 3.1 FA-2E Pump Specifications Max. discharge volume Note 1 Max. stroke speed Max. stroke length Self-priming ability Note 2 Liquid temp. range Max.
3.2 Proximity Sensor Specifications (for FA-2E pumps) Type High frequency oscillation switch Output system NPN DC open/close output Power source voltage 12-24 VDC ±10%, ripple (P-P): 10% max Current consumption 13 mA max Setting distance Less than 80% of the switching distance Hysteresis 10% max of detecting distance Switching distance 1.5mm (0.
3.3 FA-2E Pump Dimensions/Mass Mass: 8.6 lbs (3.
4 HANDLING PRECAUTIONS The following information deals with measures to ensure safe operation of the pump system. Please read the precautions carefully. To operate this pump, a 4-way solenoid valve and a controller (Iwaki America supplied model or host PLC) are required. In addition, to enhance system safety, a quick exhaust valve is recommended for air exhaust lines. 4.1 General Handling Precautions • Do not remodel the pump: Do not alter or modify the pump.
4.2 Pump Handling Precautions • Do not stop pump without opening discharge first: When stopping pump operation, first release pressure in the discharge line & then shut off supply air pressure. Residual pressure in the liquid discharge piping may result in deformation of the bellows due to the force of hydraulic pressure.
• 4.3 Prohibited liquids: The following liquids must not be used: - Liquids that are easily crystallized - Liquids containing slurry - Solvent based fluids Service life of the valve and bellows is shortened by liquids that are easily crystallized or contain slurry. Some solvents may cause premature failure due to incompatability with liquid end materials.
4.4 Liquid Circulation System Design Recommendations In typical semiconductor wet process liquids, a catalyst such as H2O, O3 or H2O2 is added to the process liquid. The subsequent reaction generates heat and produces extreme gassing of the liquid. Measures should be taken to reduce the amount of gas laden liquid which can enter the pump chambers. Excessive gas can cause an air lock condition for the pump which may increase the pump stroke rate to excessive levels.
3. Another technique is to install an air detection sensor in the suction port area, so that the auto valve is automatically opened by a signal sent out from the sensor and the air elimination operation is initiated. 5 INSTALLATION, PIPING & WIRING 5.1 Installation * 1. Pump installation position • In case of flooded suction system, set the pump as close to the liquid supply tank as possible.
5.2 Piping 5.2.1 General 1. Carry out sufficient air blowing or flushing of tubing and connectors to remove foreign matter from inside surfaces prior to connecting them with the pump. 2. Tube connections should be done such that the extra load of piping is not applied to the pump, use pipe supports as necessary. Supports also prevent the vibration and heat generated along the piping from reaching the pump. 3.
2. Install a filter or strainer with low piping resistance on the suction piping to block the entrance of solid particles or wafer fragments. CAUTION! Wafer fragments inside the pump may get stuck in the bellows and cause damage. If solid matter clogs the pump's valves, internal suction or discharge volume may be affected with the normal checking function disabled. 3. When installing a valve on suction piping, select a valve with a larger orifice than the inner diameter of the pipe.
5.2.3 Air Piping It is critical that all pneumatic piping and components be sized according to the porting of the pump. Full port components with matching effective cross-sectional area are recommended. 1. Effective cross-sectional area indicates the capacity to allow air to flow freely. When air is sent through a pipe, the air cannot run totally through the actual cross-sectional area of the pipe due to the negative effect of the piping resistance.
2. Install a relief type regulating valve: Fluctuation of supply air pressure results in fluctuation of the pump stroke rate as well as discharge volume. Install a regulating valve to maintain the air pressure at a fixed level. Select the regulator based on the air consumption rate of the pump. Pressure drop rating of the regulator should be less than 2.8 PSI (0.2 kgf/cm2). 3.
Figure 9 Pneumatic Piping/Control (FA-2E shown) 16
5.4 Wiring instructions 5.4.1 General A. Extension of leak detector electrode wire: Keep the resistance value at 5K ohms or below. A resistance greater than the above may make it impossible to detect a conductivity change between the leak detection electrodes. (This is dependent on the controller system.) B. Wiring of proximity sensor: Isolate the wires of the proximity sensor from the power line or other high-voltage cable.
5.4.5 Wiring for proximity sensor CAUTION! The proximity sensors of the F series pump have three leads. Faulty wiring may cause the proximity sensor to short circuit. Carry out the wiring carefully and accurately. • Connect the leads of proximity sensor A with terminals 6, 7, and 8 respectively of the controller. • Connect the leads of proximity sensor B with terminals 3, 4, and 5 respectively of the controller. • Symbols A and B are arbitrary. The A and B may be interchanged.
6 OPERATION Carry out the following preparatory steps when starting pump operation for the first time after installation or after a long suspension of the pump operation. 1. Confirm that all liquid connectors along the liquid piping system are fastened tightly. 2. Confirm that the valves on the suction and discharge piping (if applicable) are fully opened. 3. Confirm that the tank or bath has been filled with liquid. Allow the liquid to fill the entire piping system. 4.
7 TROUBLESHOOTING TROUBLE Pump does not operate. CAUSES Faulty operation of 4way solenoid valve Wrong wiring or disconnection in proximity sensor Discharge volume is reduced. 1 Inspect and correct wiring. 2 Replace if shorted. Bellows are damaged 1 Replace pump. Increased discharge pressure 1 Inspect filter and replace it. Supply air pressure or volume is reduced. Pump operates but no liquid is discharged COUNTERMEASURES 1 Inspect and repair or replace. Filter is not venting.
TROUBLE Liquid leaks. CAUSES Bellows are damaged. COUNTERMEASURES 1 Replace pump head. Excessive air consumption. Wear of shaft packing. 1 Replace packing. Excessive vibration or noise. Pump stroke rate is excessively high. 1 Set pump stroke rate within the specification. INSPECTION & CHECK POINTS a Check if supply air pressure is within the specification. b Check if pump stroke speed is within the specification. c Check if liquid temperature is . within the specification.
